US2012223461A1PendingUtilityA1

Imprinting device and imprinting method

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Assignee: TAKAYA YOSHIAKIPriority: Dec 26, 2007Filed: May 15, 2012Published: Sep 6, 2012
Est. expiryDec 26, 2027(~1.5 yrs left)· nominal 20-yr term from priority
Inventors:Yoshiaki TakayaYuji HashimaYoshihisa HayashidaHirosuke KawaguchiSatoru TanakaAkihiko KanaiKazuaki Uehara
B29C 33/42B29C 2059/023B29C 2035/0822G03F 7/0002B29C 59/022B82Y 10/00B82Y 40/00B81C 1/00H10P 76/00
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Claims

Abstract

The present invention provides an imprinting device and an imprinting method which can uniformly apply pressure between a mold and a molding object and which can increase and decrease a temperature at a fast speed. An imprinting device is for transferring a pattern on a mold to a film molding object, and comprises a stage for holding the mold, a pressurizing-chamber casing which configures a pressurizing-chamber together with the molding object, sealing means which airtightly seals a space between the pressurizing-chamber casing and the molding object, opening and closing means which opens and closes the space between the pressurizing-chamber casing and the molding object, pressurizing means which adjusts atmospheric pressure in the pressurizing-chamber, heating means which heats either one of or both of the mold and the molding object, and degassing means which eliminates any gas present between the mold and the molding object.

Claims

exact text as granted — not AI-modified
1 - 7 . (canceled) 
     
     
         8 . An imprinting method of transferring a pattern on a mold to a film molding object, comprising a steps of:
 superimposing the molding object on the mold;   eliminating a gas present between the mold and the molding_object by reducing a pressure inside a vacuum chamber where the mold and the molding object are arranged;   and   heating the molding object to a temperature equal to or higher than a glass transition temperature, and   directly pressing the molding object against the mold by a gas in order to transfer the pattern.   
     
     
         9 . An imprinting method of transferring a pattern on a film mold to a molding object, comprising a steps of:
 superimposing the molding object on the mold;   eliminating a gas present between the mold and the molding object by reducing a pressure inside a vacuum chamber where the mold and the molding object are arranged;   and   heating the molding object to a temperature equal to or higher than a glass transition temperature, and directly pressing the mold against the molding object by a gas in order to transfer the pattern.   
     
     
         10 . (canceled) 
     
     
         11 . The imprinting method according to  claim 8 , further comprising a step of heating either one of or both of the mold and the molding object by irradiation of electromagnetic waves. 
     
     
         12 . The imprinting method according to  claim 8 , further comprising a step of heating either one of or both of the mold and the molding object by a gas at a predetermined temperature. 
     
     
         13 . The imprinting method according to  claim 9 , further comprising a step of heating either one of or both of the mold and the molding object by irradiation of electromagnetic waves. 
     
     
         14 . The imprinting method according to  claim 9 , further comprising a step of heating either one of or both of the mold and the molding object by a gas at a predetermined temperature.

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