Laminated structure, display device, and display unit employing same

Abstract

A laminated structure which can reduce defect by preventing deposition failure or holes of an insulating film, manufacturing method, and a display unit that employ same are provided. The laminated structure as an anode for organic light-emitting devices is provided on a flat surface of a substrate. In the laminated structure, an adhesive layer made of ITO, a reflective layer made of silver or an alloy containing silver, and a barrier layer made of ITO are layered in this order from the substrate side. A cross sectional shape of the laminated structure in the laminated direction is a forward tapered shape. A sidewall face of the adhesive layer, the reflective layer, and the barrier layer is totally covered by an insulating film, and deposition failure or holes of the insulating film is prevented. A taper angle made by the sidewall face and the flat surface is preferably from about 10° to about 70°. The laminated structure can be used as a reflective electrode, a reflective film, or a wiring for a liquid crystal display.

1 . A display device comprising:
 a laminated structure including a plurality of layers on a flat surface of a substrate, wherein a cross sectional shape of the laminated structure in the laminated direction includes a forward tapered shape, the forward tapered shape of the plurality of layers is configured such that a width of the laminated structure continually narrows in a direction away from the substrate,   wherein the plurality of layers comprise a silver layer that includes silver or an alloy thereof and a barrier layer that includes indium tin oxide having a thickness ranging from about 3 nm to about 15 nm, the silver layer having a thickness greater than the barrier layer, and   wherein the plurality of layers are dry etched to form the forward tapered shape.   
     
     
         2 . The display device according to  claim 1 , wherein a taper angle made by a sidewall face of the plurality of layers and the flat surface of the substrate is within the range from about 10° to about 70°. 
     
     
         3 . The display device according to  claim 1 , which is a liquid crystal display device, wherein a pixel electrode, a driving device electrically connected to the pixel electrode, and a wiring are provided on the substrate, and the laminated structure is provided between the substrate, and the driving device and the wiring. 
     
     
         4 . The display device according to  claim 1 , wherein the plurality of layers comprise an adhesive layer, the silver layer, and the barrier layer laminated in that order on the substrate. 
     
     
         5 . The display device according to  claim 4 , wherein a thickness of the adhesive layer is about 5 nm to about 50 nm. 
     
     
         6 . The display device according to  claim 4 , wherein a thickness of the adhesive layer is about 10 nm to about 30 nm. 
     
     
         7 . The display device according to  claim 4 , further comprising an insulating film covering a sidewall face of the adhesive layer, the silver layer, and the barrier layer, wherein an opening is formed in the insulating film exposing a least a portion of a top face of the barrier layer. 
     
     
         8 . The display device according to  claim 4 , wherein the forward tapered shape has a width ranging from about 150 nm to about 300 nm. 
     
     
         9 . A display unit comprising:
 a plurality of display devices on a flat surface of a substrate, wherein the display device comprises a laminated structure including a plurality of layers,   wherein a cross sectional shape of the laminated structure in the laminated direction is a forward tapered shape, the forward tapered shape of the plurality of layers is configured such that a width of the laminated structure continually narrows in a direction away from the substrate,   wherein the plurality of layers comprise a silver layer that includes silver or an alloy thereof, and a barrier layer that includes indium tin oxide having a thickness ranging from about 3 nm to about 15 nm, the silver layer having a thickness greater than the barrier layer, and   wherein the plurality of layers are dry etched to form the forward tapered shape.   
     
     
         10 . The display unit according to  claim 9 , wherein a taper angle made by a sidewall face of the plurality of layers and the flat surface of the substrate is within the range from about 10° to about 70°. 
     
     
         11 . The display unit according to  claim 9 , wherein the display device is a liquid crystal display device, wherein a pixel electrode, a driving device electrically connected to the pixel electrode, and a wiring are provided on the substrate, and the laminated structure is provided between the substrate, and the driving device and the wiring. 
     
     
         12 . The display unit according to  claim 9 , wherein the plurality of layers comprise an adhesive layer, the silver layer, and the barrier layer laminated in that order on the substrate.