Deposition Mask and Method of Manufacturing the Same

Abstract

A deposition mask comprises a mask frame having an open window defined in a center thereof, a first mask sheet placed on the mask frame and including a plurality of open regions and a separation region which separates the open regions, and a second mask sheet placed on the first mask sheet and including a first aperture portion in a region which contacts the separation region of the first mask sheet.

1 . A deposition mask, comprising:
 a mask frame having an open window defined in a center thereof;   a first mask sheet placed on the mask frame and including a plurality of open regions and a separation region which separates the open regions; and   a second mask sheet placed on the first mask sheet and including a first aperture portion in a region which contacts the separation region of the first mask sheet.   
     
     
         2 . The deposition mask of  claim 1 , wherein the second mask sheet comprises a second aperture portion including a plurality of apertures which are disposed respectively on the open portions of the first mask sheet. 
     
     
         3 . The deposition mask of  claim 2 , wherein the first aperture portion comprises a plurality of apertures, and each aperture of the first aperture portion has substantially a same shape as each aperture of the second aperture portion. 
     
     
         4 . The deposition mask of  claim 3 , wherein all apertures, including the apertures of the first aperture portion and the apertures of the second aperture portion, are evenly arranged in row and column directions. 
     
     
         5 . The deposition mask of  claim 1 , wherein the second mask sheet is divided into a plurality of unit mask sheets. 
     
     
         6 . The deposition mask of  claim 1 , wherein the second mask sheet is undivided. 
     
     
         7 . The deposition mask of  claim 1 , wherein the first mask sheet is tensile-welded on the mask frame, and the second mask sheet is tensile-welded on the first mask sheet. 
     
     
         8 . A deposition mask, comprising:
 a mask frame having an open window defined in a center thereof;   a mask sheet placed on the mask frame and including a plurality of aperture portions which comprise a first aperture portion and a second aperture portion; and   a filler filling the first aperture portion.   
     
     
         9 . The deposition mask of  claim 8 , wherein the filler fills an entirety of the first aperture portion. 
     
     
         10 . The deposition mask of  claim 8 , wherein the second aperture portion includes a plurality of apertures, wherein the apertures of the second aperture portion form a plurality of pattern regions, and the pattern regions are arranged in a matrix form. 
     
     
         11 . The deposition mask of  claim 10 , wherein the first aperture portion includes a plurality of apertures, and each aperture of the first aperture portion has substantially a same shape as each aperture of the second aperture portion. 
     
     
         12 . The deposition mask of  claim 11 , wherein all apertures, including the apertures of the first aperture portion and the apertures of the second aperture portion, are evenly arranged in row and column directions. 
     
     
         13 . The deposition mask of  claim 8 , wherein the mask sheet is divided into a plurality of unit mask sheets. 
     
     
         14 . The deposition mask of  claim 8 , wherein the mask sheet is undivided. 
     
     
         15 . The deposition mask of  claim 8 , wherein the mask sheet is tensile-welded on the mask frame. 
     
     
         16 . A method of manufacturing a deposition mask, the method comprising the steps of:
 forming a mask frame having an open window defined in a center thereof;   forming a first mask sheet which includes a plurality of open regions and a separation region separating the open regions;   placing the first mask sheet on the mask frame;   forming a second mask sheet which includes a first aperture portion; and   placing the second mask sheet on the first mask sheet so that the first aperture portion of the second mask sheet contacts the separation region of the first mask sheet.   
     
     
         17 . The method of  claim 16 , wherein the second mask sheet includes a second aperture portion comprising a plurality of apertures which are disposed respectively on the open portions of the first mask sheet, and the first aperture portion includes a plurality of apertures, wherein each aperture of the first aperture portion has substantially a same shape as each aperture of the second aperture portion, and all apertures including the apertures of the first aperture portion and the apertures of the second aperture portion are evenly arranged in row and column directions. 
     
     
         18 . The method of  claim 16 , wherein the second mask sheet is divided into a plurality of unit mask sheets. 
     
     
         19 . The method of  claim 16 , wherein the second mask sheet is undivided. 
     
     
         20 . The method of  claim 16 , wherein the step of placing the first mask sheet on the mask frame comprises tensile-welding the first mask sheet on the mask frame, and the step of placing the second mask sheet on the first mask sheet comprises tensile-welding the second mask sheet on the first mask sheet. 
     
     
         21 . A method of manufacturing a deposition mask, the method comprising the steps of:
 forming a mask frame having an open window defined in a center thereof;   forming a mask sheet including a plurality of aperture portions which comprise a first aperture portion and a second aperture portion;   placing the mask sheet on the mask frame; and   filling the first aperture portion of the mask sheet with a filler.   
     
     
         22 . The method of  claim 21 , wherein the first aperture portion includes a plurality of apertures and the second aperture portion includes a plurality of apertures, wherein the apertures of the second aperture portion form a plurality of pattern regions which are arranged in a matrix form, wherein each aperture of the first aperture portion has substantially a same shape as each aperture of the second aperture portion, and wherein all apertures including the apertures of the first aperture portion and the apertures of the second aperture portion are evenly arranged in row and column directions. 
     
     
         23 . The method of  claim 21 , wherein the second mask sheet is divided into a plurality of unit mask sheets. 
     
     
         24 . The method of  claim 21 , wherein the second mask sheet is undivided. 
     
     
         25 . The method of  claim 21 , wherein the step of placing the mask sheet on the mask frame comprises tensile-welding the mask sheet on the mask frame. 
     
     
         26 . The method of  claim 21 , wherein the step of filling the first aperture portion of the mask sheet with the filler comprises:
 coating a photosensitive layer on the second aperture portion of the mask sheet;   forming the filler on the mask sheet coated with the photosensitive layer; and   removing the photosensitive layer coated on the mask sheet.   
     
     
         27 . The method of  claim 26 , wherein the step of removing the photosensitive layer coated on the mask sheet comprises performing exposure and development. 
     
     
         28 . The method of  claim 21 , wherein the filler fills an entirety of the first aperture portion.