Schottky diode

Abstract

A semiconductor system of a Schottky diode is described having an integrated PN diode as a clamping element, which is suitable in particular as a Zener diode having a breakdown voltage of approximately 20 V for use in motor vehicle generator systems. The semiconductor system of the Schottky diode includes a combination of a Schottky diode and a PN diode. The breakdown voltage of the PN diode is much lower than the breakdown voltage of the Schottky diode, the semiconductor system being able to be operated using high currents during breakdown operation.

1 - 20 . (canceled) 
     
     
         21 . A semiconductor system, comprising:
 a Schottky diode having an integrated PN diode as a clamping element, which is suitable as a Zener diode having a breakdown voltage of approximately 20 V for use in a motor vehicle generator system, a breakdown voltage of the PN diode being much lower than a breakdown voltage of the Schottky diode.   
     
     
         22 . The semiconductor system as recited in  claim 21 , wherein the semiconductor system may be operated using high currents during breakdown operation. 
     
     
         23 . The semiconductor system as recited in  claim 21 , wherein the Schottky diode includes an n-epitaxial layer applied to an n + -substrate of a chip as a cathode zone of the Schottky diode, n-wells diffused into the n-epitaxial layer are provided and are used as a cathode zone of the PN diode, and corresponding p + -wells diffused into the n-epitaxial layer and into the n-wells are provided and are used as an anode zone of the PN diode. 
     
     
         24 . The semiconductor system as recited in  claim 23 , wherein a metal layer is located on a rear side of the chip and is used as a cathode electrode, and a metal layer is located on a front side of the chip, having ohmic contact to the p + -wells and having Schottky contact to the n-epitaxial layer, and is used as an anode electrode. 
     
     
         25 . The semiconductor system as recited in  claim 24 , wherein a breakdown of the PN diode occurs at a junction between the p + -wells and the n-wells. 
     
     
         26 . The semiconductor system as recited in  claim 23 , wherein a doping concentration of the n-epitaxial layer is much lower than a doping concentration of the n-wells and the n-epitaxial layer has sufficient thickness to implement a much higher breakdown voltage of the Schottky diode in comparison to the breakdown voltage of the integrated PN diode. 
     
     
         27 . The semiconductor system as recited in  claim 23 , wherein the n-wells are implemented in the form of one of diffused wells or filled trenches. 
     
     
         28 . The semiconductor system as recited in  claim 27 , wherein the n-wells are implemented in the faun of filled trenches, the trenches having one of a rectangular shape or a U-shape. 
     
     
         29 . The semiconductor system as recited in  claim 23 , wherein the n-wells extend up to the n + -substrate. 
     
     
         30 . The semiconductor system as recited in  claim 23 , wherein additional n-wells, having a higher doping concentration in comparison to the n-wells, are located between the n-wells and the n + -substrate. 
     
     
         31 . The semiconductor system as recited in  claim 23 , wherein a width of the n-wells is smaller than a width of the p + -wells and the breakdown occurs at a largely one-dimensional PN junction. 
     
     
         32 . The semiconductor system as recited in  claim 24 , wherein metallization of at least one of the metal layer on the rear side of the chip and the metal layer on the front side of the chip is made up of at least two layers lying upon each other. 
     
     
         33 . The semiconductor system as recited in  claim 23 , wherein the n-wells are situated in a strip arrangement. 
     
     
         34 . The semiconductor system as recited in  claim 23 , wherein the n-wells are situated as islands. 
     
     
         35 . The semiconductor system as recited in  claim 34 , wherein the islands are one of circular or hexagonal. 
     
     
         36 . The semiconductor system as recited in  claim 24 , wherein the Schottky contact is formed from one of nickel or nickel silicide. 
     
     
         37 . The semiconductor system as recited in  claim 23 , wherein the semiconductor system includes a wideband gap semiconductor material. 
     
     
         38 . The semiconductor system as recited in  claim 37 , wherein the wideband gap semiconductor material is one of SiC or a semiconductor material based on nitrides. 
     
     
         39 . The semiconductor system as recited in  claim 23 , wherein additional structures for reducing edge field strength are in an edge area of the chip. 
     
     
         40 . The semiconductor system as recited in  claim 39 , wherein the additional structures are at least one of weakly doped p-areas, and magnetoresistors. 
     
     
         41 . A method for manufacturing a semiconductor system, the semiconductor system including a Schottky diode having an integrated PN diode as a clamping element, which is suitable as a Zener diode having a breakdown voltage of approximately 20 V for use in a motor vehicle generator system, a breakdown voltage of the PN diode being much lower than a breakdown voltage of the Schottky diode, the method comprising:
 providing an n + -substrate as a starting material for the semiconductor system;   producing an n-epitaxial layer using n-epitaxy;   diffusing n-wells into the n-epitaxial layer;   producing p + -wells with the aid of diffusion; and   producing metal layers with the aid of metallization on a front side and a rear side of a chip.   
     
     
         42 . A method for manufacturing a semiconductor system, the semiconductor system including a Schottky diode having an integrated PN diode as a clamping element, which is suitable as a Zener diode having a breakdown voltage of approximately 20 V for use in a motor vehicle generator system, a breakdown voltage of the PN diode being much lower than a breakdown voltage of the Schottky diode, the method comprising:
 providing an n + -substrate as a starting material for the semiconductor system;   producing an n-epitaxial layer using n-epitaxy;   trench etching up to the n + -substrate;   filling up the trenches using one of n-doped silicon or polysilicon;   producing p + -wells with the aid of diffusion; and   producing metal layers with the aid of metallization on a front side and a rear side of a chip.   
     
     
         43 . A method for manufacturing a semiconductor system, the semiconductor system including a Schottky diode having an integrated PN diode as a clamping element, which is suitable as a Zener diode having a breakdown voltage of approximately 20 V for use in a motor vehicle generator system, a breakdown voltage of the PN diode being much lower than a breakdown voltage of the Schottky diode, the method comprising:
 providing an n + -substrate as a starting material for the semiconductor system;   producing an n-epitaxial layer using n-epitaxy;   implantating or diffusing n-wells;   producing the n-epitaxial layer with a second n-epitaxy;   trench etching up to the n-wells;   filling up the trenches using one of n-doped silicon or polysilicon;   diffusing p + -wells;   producing metal layers with the aid of metallization on a front side and a rear side of a chip.