Metalorganic chemical vapor deposition (mocvd) process and apparatus to produce multi-layer high-temperature superconducting (hts) coated tape

Abstract

An MOCVD apparatus and process for producing multi-layer HTS-coated tapes with increased current capacity which includes multiple liquid precursor sources, each having an associated pump and vaporizer, the outlets of which feed a multiple compartment showerhead apparatus within an MOCVD reactor. The multiple compartment showerhead apparatus is located in close proximity to an associated substrate heater which together define multiple deposition sectors in a deposition zone.

1 .- 10 . (canceled) 
     
     
         11 . A process for producing multi-layer coated substrates comprising translating a substrate to be coated through a MOCVD chamber comprising a vacuum chamber, a heater, a showerhead delivery apparatus selected from the group consisting of a multicompartment showerhead and at least two single compartment showerheads, at least one precursor delivery system, and a substrate translation system, where the space between the showerhead and the heater defines an extended length deposition zone within the vacuum chamber and where the substrate translating through the extended length deposition zone is heated by the heater and successively impinged upon by vaporized precursors exiting each of the individual showerhead compartments to deposit a coating thereon. 
     
     
         12 . The process of  claim 11  wherein the vaporized precursors delivered through each showerhead compartment are the same. 
     
     
         13 . The process of  claim 11  wherein multi-layered substrates are produced by delivering different types of vaporized precursors through one or more showerhead compartments. 
     
     
         14 . The process of  claim 11  wherein the vaporized precursors are selected from the group consisting of YBCO, SmBCO, and other rare earth mixed oxides. 
     
     
         15 . The process of  claim 11  where the total thickness of the coating exceeds 1.5 microns and the coated substrate has a critical current of at least 100 Amperes/cm width. 
     
     
         16 . The process of  claim 11  where the thickness of each coating layer is no greater than 1.5 microns. 
     
     
         17 . A multi-coated substrate tape prepared by the process of  claim 11 . 
     
     
         18 . The substrate of  claim 17  where the multi-coated substrate has at least two coatings of different composition deposited thereon. 
     
     
         19 . The substrate of  claim 17  where the substrate is coated with successive layers of YBCO, SmBCO, YBCO, SmBCO and YBCO. 
     
     
         20 . The substrate of  claim 17  where the total thickness of the coating exceeds 1.5 microns and the coated substrate has a critical current of at least 100 Amperes/cm width. 
     
     
         21 . The substrate of  claim 17  where the thickness of each coating layer is no greater than 1.5 microns. 
     
     
         22 . (canceled)