US2012262790A1PendingUtilityA1

Anti-reflective lenses and methods for manufacturing the same

36
Assignee: SU KAI CPriority: Apr 15, 2011Filed: Apr 15, 2011Published: Oct 18, 2012
Est. expiryApr 15, 2031(~4.8 yrs left)· nominal 20-yr term from priority
G02B 1/115B82Y 30/00B82Y 40/00C07F 7/1804
36
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Claims

Abstract

The present invention relates to a method of making an anti-reflective coating to an optical surface of a mold. In one embodiment, the method includes the steps of: providing a lens mold having an optical surface; forming a layer of a first hydrophobic material with a monolayer thickness over the optical surface; forming a layer of a second hydrophobic material with a thickness of about 10 to 50 nm over the layer of a first hydrophobic material, wherein the first and second hydrophobic materials are different; forming an anti-reflective coating layered structure over the layer of a second hydrophobic material; and forming a layer of a coupling agent that is deposited using vapor deposition and with a thickness of about 1 to 10 nm over the anti-reflective coating layered structure.

Claims

exact text as granted — not AI-modified
1 . A method for making an anti-reflective coating to an optical surface of a mold, comprising the steps of:
 (a) providing a lens mold having an optical surface;   (b) forming a first layer of SiO 2  that is ion assisted with a thickness of 5 to 100 nm to the optical surface;   (c) forming a layer of a first hydrophobic material with a thickness of about 10 to 30 nm to the layer;   (d) forming a layer of a second hydrophobic material with a thickness of about 10 to 50 nm to the layer of a first hydrophobic material, wherein the first and second hydrophobic materials are different;   (e) forming a second layer of SiO 2  that is deposited without using ion assist and with a thickness of about 5 to 40 nm to the layer of a second hydrophobic material;   (f) forming an anti-reflective coating layered structure over the second layer of SiO 2 ; and   (g) forming a layer of a silane coupling agent that is deposited using vapor deposition under aprotic conditions and with a monolayer thickness to the anti-reflective coating layered structure.   
     
     
         2 . The method of  claim 1 , wherein the step of forming an anti-reflective coating layered structure to the second layer of SiO 2  further comprises the steps of:
 (a) forming a third layer of SiO 2  that is deposited using ion assist and with a thickness of about 5 to 100 nm to the second layer of SiO 2 ;   (b) forming a first layer of ZrO 2  with a thickness of about 40 to 50 nm to the third layer of SiO 2 ;   (c) forming a fourth layer of SiO 2  that is deposited using ion assist and with a thickness about 10 to 20 nm to the first layer of ZrO 2 ;   (d) forming a second layer of ZrO 2  with a thickness of about 50 to 70 nm to the fourth layer of SiO 2 ;   (e) forming a fifth layer of SiO 2  that is deposited using ion assist and with a thickness of about 25 to 40 nm to the second layer of ZrO 2 ;   (f) forming a third layer of ZrO 2  with a thickness of about 10 to 25 nm to the fifth layer of SiO 2 ; and   (g) forming a sixth layer of SiO 2  that is deposited using ion assist and with a thickness of about 5 to 15 nm to the third layer of ZrO 2 .   
     
     
         3 . The method of  claim 1 , wherein the first hydrophobic material is a standard hydrophobic material, and the second hydrophobic material is a super hydrophobic material, respectively. 
     
     
         4 . The method of  claim 1 , wherein the layer of silane coupling agent is formed of a composition that comprises cyclic azasilanes. 
     
     
         5 . The method of  claim 4 , wherein the layer of a silane coupling agent is formed of N-n-butyl-aza-2,2-dimethoxy-silacyclopentane. 
     
     
         6 . The method of  claim 1 , wherein the step of forming an anti-reflective coating layered structure to the second layer of SiO 2  further comprises the steps of:
 (a) forming a first layer of a first material with first index refraction, which is deposited using ion assist and with a thickness of about 5 to 100 nm, to the second layer of SiO 2 ;   (b) forming a second layer of a second material with second index refraction, with a thickness of about 40 to 50 nm, to the first layer of the first material;   (c) forming a third layer of the first material with first index refraction, which is deposited using ion assist and with a thickness about 10 to 20 nm, to the second layer of the second material;   (d) forming a fourth layer of the second material with second index refraction, with a thickness of about 50 to 70 nm, to the third layer;   (d) forming a fifth layer of the first material with first index refraction, which is deposited using ion assist and with a thickness of about 25 to 40 nm, to the fourth layer;   (f) forming a sixth layer of the second material with second index refraction, with a thickness of about 10 to 25 nm, to the fifth layer; and   (g) forming a seventh layer of the first material with first index refraction, which is deposited using ion assist and with a thickness of about 5 to 15 nm, to the sixth layer.   
     
     
         7 . The method of  claim 6 , wherein the first index refraction L and the second index refraction H satisfy a ratio of H/L>1. 
     
     
         8 . The method of  claim 7 , wherein the first material with first index refraction comprises SiO 2 , and the second material with second index refraction comprises ZrO 2 . 
     
     
         9 . A mold with an optical surface having an anti-reflective coating that is transferable to an optical surface of a lens, comprising:
 (a) a first layer of SiO 2  that is ion assisted with a thickness of 5 to 100 nm deposited to an optical surface of the mold;   (b) a layer of a first hydrophobic material with a thickness of about 10 to 30 nm deposited to the first layer of SiO 2 ;   (c) a layer of a second hydrophobic material with a thickness of about 10 to 50 nm deposited to the layer of a first hydrophobic material, wherein the first and second hydrophobic materials are different;   (d) a second layer of SiO 2  that is deposited without using ion assist and with a thickness of about 5 to 40 nm deposited to the layer of a second hydrophobic material;   (e) an anti-reflective coating layered structure deposited to the second layer of SiO 2 ; and   (f) a layer of a coupling agent that is deposited using vapor deposition and with a monolayer thickness deposited over the anti-reflective coating layered structure.   
     
     
         10 . The mold of  claim 9 , wherein the anti-reflective coating layered structure comprises:
 (a) a third layer of SiO 2  that is deposited using ion assist and with a thickness of about 5 to 100 nm deposited to the second layer of SiO 2 ;   (b) a first layer of ZrO 2  with a thickness of about 40 to 50 nm deposited to the third layer of SiO 2 ;   (c) a fourth layer of SiO 2  that is deposited using ion assist and with a thickness about 10 to 20 nm deposited to the first layer of ZrO 2 ;   (d) a second layer of ZrO 2  with a thickness of about 50 to 70 nm deposited to the fourth layer of SiO 2 ;   (d) a fifth layer of SiO 2  that is deposited using ion assist and with a thickness of about 25 to 40 nm deposited to the second layer of ZrO 2 ;   (f) a third layer of ZrO 2  with a thickness of about 10 to 25 nm deposited to the fifth layer of SiO 2 ; and   (g) a sixth layer of SiO 2  that is deposited using ion assist and with a thickness of about 5 to 15 nm deposited to the third layer of ZrO 2 .   
     
     
         11 . The mold of  claim 9 , wherein the first hydrophobic material is a standard hydrophobic material, and the second hydrophobic material is a super hydrophobic material, respectively. 
     
     
         12 . The mold of  claim 9 , wherein the layer of coupling agent is formed of a composition that comprises cyclic azasilanes. 
     
     
         13 . The mold of  claim 12 , wherein the layer of coupling agent is formed of N-n-butyl-aza-2,2-dimethoxy-silacyclopentane. 
     
     
         14 . The mold of  claim 9 , wherein the anti-reflective coating layered structure comprises:
 (a) a first layer of a first material with first index refraction, which is deposited using ion assist and with a thickness of about 5 to 100 nm, deposited to the second layer of SiO 2 ;   (b) a second layer of a second material with second index refraction, with a thickness of about 40 to 50 nm, deposited to the first layer of the first material;   (c) a third layer of the first material with first index refraction, which is deposited using ion assist and with a thickness about 10 to 20 nm, deposited to the second layer of the second material;   (d) a fourth layer of the second material with second index refraction, with a thickness of about 50 to 70 nm, deposited to the third layer;   (e) a fifth layer of the first material with first index refraction, which is deposited using ion assist and with a thickness of about 25 to 40 nm, deposited to the fourth layer;   (f) a sixth layer of the second material with second index refraction, with a thickness of about 10 to 25 nm, deposited to the fifth layer; and   (g) a seventh layer of the first material with first index refraction, which is deposited using ion assist and with a thickness of about 5 to 15 nm, deposited to the sixth layer.   
     
     
         15 . The mold of  claim 14 , wherein the first index refraction L and the second index refraction H satisfy a ratio of H/L>1. 
     
     
         16 . The mold of  claim 15 , wherein the first material with first index refraction comprises SiO 2 , and the second material with second index refraction comprises ZrO 2 . 
     
     
         17 . An optical lens, comprising:
 (1) a lens body with an optical surface;   (2) a hard coat layer over the optical surface; and   (3) an anti-reflective coating over the optical surface, wherein the anti-reflective coating comprises:
 (a) a layer of a coupling agent with a monolayer thickness over the hard coat layer; 
 (b) an anti-reflective coating layered structure over the layer of a coupling agent; 
 (c) a second layer of SiO 2  that is deposited without using ion assist and with a thickness of about 5 to 40 nm over the anti-reflective coating layered structure over the layer of a coupling agent; and 
 (d) a layer of a hydrophobic material over the second layer of SiO 2 . 
   
     
     
         18 . The optical lens of  claim 17 , wherein the anti-reflective coating layered structure comprises:
 (a) a third layer of SiO 2  that is deposited using ion assist and with a thickness of about 5 to 100 nm deposited to the second layer SiO 2 ;   (b) a first layer of ZrO 2  with a thickness of about 40 to 50 nm deposited to the third layer of SiO 2 ;   (c) a fourth layer of SiO 2  that is deposited using ion assist and with a thickness about 10 to 20 nm deposited to the first layer of ZrO 2 ;   (d) a second layer of ZrO 2  with a thickness of about 50 to 70 nm deposited to the fourth layer of SiO 2 ;   (e) a fifth layer of SiO 2  that is deposited using ion assist and with a thickness of about 25 to 40 nm deposited to the second layer of ZrO 2 ;   (f) a third layer of ZrO 2  with a thickness of about 10 to 25 nm deposited to the fifth layer of SiO 2 ; and   (g) a sixth layer of SiO 2  that is deposited using ion assist and with a thickness of about 5 to 15 nm deposited to the third layer of ZrO 2 .   
     
     
         19 . The optical lens of  claim 17 , wherein the layer of a hydrophobic material comprises a first hydrophobic material and a second hydrophobic material, wherein the first and second hydrophobic materials are different, and wherein the first hydrophobic material is a standard hydrophobic material, and the second hydrophobic material is a super hydrophobic material, respectively. 
     
     
         20 . The optical lens of  claim 17 , wherein the layer of coupling agent is formed of a composition that comprises cyclic azasilanes. 
     
     
         21 . The optical lens of  claim 20 , wherein the layer of coupling agent is formed of N-n-butyl-aza-2,2-dimethoxy-silacyclopentane. 
     
     
         22 . The optical lens of  claim 17 , wherein the anti-reflective coating layered structure comprises:
 (a) a first layer of a first material with first index refraction, which is deposited using ion assist and with a thickness of about 5 to 100 nm, deposited to the second layer of SiO 2 ;   (b) a second layer of a second material with second index refraction, with a thickness of about 40 to 50 nm, deposited to the first layer of the first material;   (c) a third layer of the first material with first index refraction, which is deposited using ion assist and with a thickness about 10 to 20 nm, deposited to the second layer of the second material;   (d) a fourth layer of the second material with second index refraction, with a thickness of about 50 to 70 nm, deposited to the third layer;   (e) a fifth layer of the first material with first index refraction, which is deposited using ion assist and with a thickness of about 25 to 40 nm, deposited to the fourth layer;   (f) a sixth layer of the second material with second index refraction, with a thickness of about 10 to 25 nm, deposited to the fifth layer; and   (g) a seventh layer of the first material with first index refraction, which is deposited using ion assist and with a thickness of about 5 to 15 nm, deposited to the sixth layer.   
     
     
         23 . The optical lens of  claim 22 , wherein the first index refraction L and the second index refraction H satisfy a ratio of H/L>1. 
     
     
         24 . The optical lens of  claim 23 , wherein the first material with first index refraction comprises SiO 2 , and the second material with second index refraction comprises ZrO 2 . 
     
     
         25 . A method for making an anti-reflective coating to an optical surface of a mold, comprising the steps of:
 (a) providing a lens mold having an optical surface;   (b) forming a layer of a first hydrophobic material with thickness of about 10 to 30 nm over the optical surface;   (c) forming a layer of a second hydrophobic material with a thickness of about 10 to 50 nm over the layer of a first hydrophobic material, wherein the first and second hydrophobic materials are different;   (d) forming an anti-reflective coating layered structure over the layer of a second hydrophobic material; and   (e) forming a layer of a coupling agent that is deposited using vapor deposition and with a monolayer thickness over the anti-reflective coating layered structure.   
     
     
         26 . The method of  claim 25 , wherein the step of forming an anti-reflective coating layered structure over the layer further comprises the steps of:
 (a) forming a first layer of a first material with first index refraction and a thickness of about 5 to 100 nm over the layer of a second hydrophobic material;   (b) forming a second layer of a second material with second index refraction and a thickness of about 40 to 50 nm, to the first layer;   (c) forming a third layer of the first material with first index refraction and a thickness about 10 to 20 nm, to the second layer;   (d) forming a fourth layer of the second material with second index refraction and a thickness of about 50 to 70 nm, to the third layer;   (e) forming a fifth layer of the first material with first index refraction and a thickness of about 25 to 40 nm, to the fourth layer;   (f) forming a sixth layer of the second material with second index refraction and a thickness of about 10 to 25 nm, to the fifth layer; and   (g) forming a seventh layer of the first material with first index refraction and a thickness of about 5 to 15 nm, to the sixth layer.   
     
     
         27 . The method of  claim 26 , wherein the first index refraction L and the second index refraction H satisfy a ratio of H/L>1. 
     
     
         28 . The method of  claim 27 , wherein the first material with first index refraction is SiO 2 , and the second material with second index refraction is ZrO 2 . 
     
     
         29 . The method of  claim 28 , prior to the step of forming a layer of a first hydrophobic material with a thickness of about 10 to 30 nm over the optical surface, further comprising a step of forming an eighth layer of SiO 2  that is ion assisted with a thickness of 5 to 100 nm over the optical surface such that the eighth layer of SiO 2  is formed between the layer of a first hydrophobic material and the optical surface. 
     
     
         30 . The method of  claim 29 , prior to the step of forming an anti-reflective coating layered structure over the layer of a second hydrophobic material, further comprising a step of forming a ninth layer of SiO 2  that is deposited without ion assist and with a thickness of 5 to 40 nm over the layer of a second hydrophobic material such that the ninth layer of SiO 2  is formed between the layer of a second hydrophobic material and the first layer of the first material. 
     
     
         31 . The method of  claim 28 , prior to the step of forming an anti-reflective coating layered structure over the layer of a second hydrophobic material, further comprising a step of forming a layer of SiO 2  that is deposited without ion assist and with a thickness of 5 to 40 nm over the layer of a second hydrophobic material such that the layer of SiO 2  is formed between the layer of a second hydrophobic material and the first layer of the first material. 
     
     
         32 . The method of  claim 28 , wherein each layer of SiO 2  is deposited using ion assist or without using ion assist. 
     
     
         33 . The method of  claim 25 , wherein the first hydrophobic material is a standard hydrophobic material, and the second hydrophobic material is a super hydrophobic material, respectively. 
     
     
         34 . The method of  claim 25 , wherein the layer of coupling agent is formed of a composition that comprises cyclic azasilanes. 
     
     
         35 . The method of  claim 34 , wherein the layer of coupling agent is formed of N-n-butyl-aza-2,2-dimethoxy-silacyclopentane. 
     
     
         36 . A mold with an optical surface having an anti-reflective coating that is transferable to an optical surface of a lens, comprising:
 (a) a layer of a first hydrophobic material with a thickness of about 10 to 30 nm deposited over an optical surface of the mold;   (b) a layer of a second hydrophobic material with a thickness of about 10 to 50 nm deposited over the layer of a first hydrophobic material, wherein the first and second hydrophobic materials are different;   (c) an anti-reflective coating layered structure deposited over the layer of a second hydrophobic material; and   (d) a layer of a coupling agent that is deposited using vapor deposition and with a monolayer thickness deposited over the anti-reflective coating layered structure.   
     
     
         37 . The mold of  claim 36 , wherein the anti-reflective coating layered structure comprises:
 (a) a first layer of a first material with first index refraction and a thickness of about 5 to 100 nm deposited over the layer of a second hydrophobic material;   (b) a second layer of a second material with second index refraction and a thickness of about 40 to 50 nm, deposited to the first layer;   (c) a third layer of the first material with first index refraction and a thickness about 10 to 20 nm, deposited to the second layer;   (d) a fourth layer of the second material with second index refraction and a thickness of about 50 to 70 nm, deposited to the third layer;   (e) a fifth layer of the first material with first index refraction and a thickness of about 25 to 40 nm, deposited to the fourth layer;   (f) a sixth layer of the second material with second index refraction and a thickness of about 10 to 25 nm, deposited to the fifth layer; and   (g) a seventh layer of the first material with first index refraction and a thickness of about 5 to 15 nm, deposited to the sixth layer.   
     
     
         38 . The mold of  claim 37 , wherein the first index refraction L and the second index refraction H satisfy a ratio of H/L >1. 
     
     
         39 . The mold of  claim 38 , wherein the first material with first index refraction is SiO 2 , and the second material with second index refraction is ZrO 2 . 
     
     
         40 . The mold of  claim 39 , further comprising a layer of SiO 2  that is ion assisted with a thickness of 5 to 100 nm and deposited over the optical surface such that the layer of SiO 2  is formed between the layer of a first hydrophobic material and the optical surface. 
     
     
         41 . The mold of  claim 40 , further comprising a layer of SiO 2  that is deposited without ion assist and with a thickness of 5 to 40 nm and over the layer of a second hydrophobic material such that the layer of SiO 2  is formed between the layer of a second hydrophobic material and the first layer of the first material. 
     
     
         42 . The mold of  claim 39 , further comprising a layer of SiO 2  that is deposited without ion assist and with a thickness of 5 to 40 nm over the layer of a second hydrophobic material such that the layer of SiO 2  is formed between the layer of a second hydrophobic material and the first layer of the first material. 
     
     
         43 . The mold of  claim 39 , wherein each layer of SiO 2  is deposited using ion assist or without using ion assist. 
     
     
         44 . The mold of  claim 36 , wherein the first hydrophobic material is a standard hydrophobic material, and the second hydrophobic material is a super hydrophobic material, respectively. 
     
     
         45 . The mold of  claim 36 , wherein the layer of coupling agent is formed of a composition that comprises cyclic azasilanes. 
     
     
         46 . The mold of  claim 45 , wherein the layer of coupling agent is formed of N-n-butyl-aza-2,2-dimethoxy-silacyclopentane. 
     
     
         47 . An optical lens, comprising:
 (i) a lens body with an optical surface; and   (ii) an anti-reflective coating formed on the optical surface, wherein the anti-reflective coating comprises:
 (a) a layer of a first hydrophobic material thickness of about 10 to 30 nm deposited over an optical surface of the mold; 
 (b) a layer of a second hydrophobic material with a thickness of about 10 to 50 nm deposited over the layer of a first hydrophobic material, wherein the first and second hydrophobic materials are different; 
 (c) an anti-reflective coating layered structure deposited over the layer of a second hydrophobic material; and 
 (d) a layer of a coupling agent that is deposited using vapor deposition and with a monolayer thickness deposited over the anti-reflective coating layered structure and coupled to the optical surface. 
   
     
     
         48 . The optical lens of  claim 47 , wherein the anti-reflective coating layered structure comprises:
 (a) a first layer of a first material with first index refraction and a thickness of about 5 to 100 nm deposited over the layer of a second hydrophobic material;   (b) a second layer of a second material with second index refraction and a thickness of about 40 to 50 nm, deposited to the first layer;   (c) a third layer of the first material with first index refraction and a thickness about 10 to 20 nm, deposited to the second layer;   (d) a fourth layer of the second material with second index refraction and a thickness of about 50 to 70 nm, deposited to the third layer;   (e) a fifth layer of the first material with first index refraction and a thickness of about 25 to 40 nm, deposited to the fourth layer;   (f) a sixth layer of the second material with second index refraction and a thickness of about 10 to 25 nm, deposited to the fifth layer; and   (g) a seventh layer of the first material with first index refraction and a thickness of about 5 to 15 nm, deposited to the sixth layer.   
     
     
         49 . The optical lens of  claim 48 , wherein the first index refraction L and the second index refraction H satisfy a ratio of H/L>1. 
     
     
         50 . The optical lens of  claim 49 , wherein the first material with first index refraction is SiO 2 , and the second material with second index refraction is ZrO 2 . 
     
     
         51 . The optical lens of  claim 50 , further comprising a layer of SiO 2  that is ion assisted with a thickness of 5 to 100 nm and deposited over the optical surface such that the layer of SiO 2  is formed between the layer of a first hydrophobic material and the optical surface. 
     
     
         52 . The optical lens of  claim 51 , further comprising a layer of SiO 2  that is deposited without ion assist and with a thickness of 5 to 40 nm and over the layer of a second hydrophobic material such that the layer of SiO 2  is formed between the layer of a second hydrophobic material and the first layer of the first material. 
     
     
         53 . The optical lens of  claim 50 , further comprising a layer of SiO 2  that is deposited without ion assist and with a thickness of 5 to 40 nm over the layer of a second hydrophobic material such that the layer of SiO 2  is formed between the first layer of the first material and the layer of a second hydrophobic material. 
     
     
         54 . The optical lens of  claim 50 , wherein each layer of SiO 2  is deposited using ion assist or without using ion assist. 
     
     
         55 . A coupling agent usable in lens making, comprising cyclic azasilanes. 
     
     
         56 . The coupling agent of  claim 55 , wherein cyclic azasilanes comprise N-n-butyl-aza-2,2-dimethoxy-silacyclopentane. 
     
     
         57 . The coupling agent of  claim 55 , wherein in use, cyclic azasilanes are applied in a solvent.

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