Moisture barrier coatings for organic light emitting diode devices

Abstract

A process for fabricating an amorphous diamond-like film layer for protection of a moisture or oxygen sensitive electronic device is described. The process includes forming a plasma from silicone oil, depositing an amorphous diamond-like film layer from the plasma, and combining the amorphous diamond-like film layer with a moisture or oxygen sensitive electronic device to form a protected electronic device. Articles including the amorphous diamond-like film layer on an organic electronic device are also disclosed.

1 . An article comprising;
 an organic electronic device;   an amorphous diamond-like film layer adjacent to the organic electronic device,   wherein the amorphous diamond-like film layer comprises a siloxane moiety and   having a thickness of greater than 1000 Angstroms.   
     
     
         2 . An article according to  claim 1 , wherein the amorphous diamond-like film encapsulates the organic electronic device. 
     
     
         3 . An article according to  claim 1 , wherein the amorphous diamond-like film layer has a thickness in a range from 1000 to 10000 nanometers. 
     
     
         4 . An article according to  claim 1 , wherein the organic electronic device comprises an organic light emitting diode, a photovoltaic article, or a thin-film transistor. 
     
     
         5 . An article according to  claim 1 , further comprising a polymer or metallic layer disposed on the amorphous diamond-like film layer or between the amorphous diamond-like film layer and the organic electronic device. 
     
     
         6 . An article according to  claim 1 , further comprising a polymer or metallic layer disposed on the amorphous diamond-like film layer, and a second polymer or metallic layer disposed between the organic electronic device and the amorphous diamond-like film layer. 
     
     
         7 . An article according to  claim 1 , wherein the organic electronic device is a component of a display, signage, or lighting element of the article. 
     
     
         8 . An article according to  claim 1 , wherein the organic electronic device is a component of a cell phone, MP3 player, PDA, television, DVD player, luminare, sign, billboard, or LCD. 
     
     
         9 . A plasma deposition apparatus comprising;
 a vacuum chamber comprising a powered electrode and an counter electrode;   a radio frequency power source in electrical connection with the powered electrode through an impedance matching network; and   a silicone oil source in fluid communication with the vacuum chamber.   
     
     
         10 . An apparatus according to  claim 9 , further comprising a silane source in fluid communication with the vacuum chamber and a process gas source in fluid communication with the vacuum chamber. 
     
     
         11 . An apparatus according to  claim 10 , wherein the silicone oil source comprises silicone oil disposed on a carbon cloth and a power source in electrical connection with the carbon cloth. 
     
     
         12 . An apparatus according to  claim 9 , wherein the silicone oil source is disposed within the vacuum chamber. 
     
     
         13 . An apparatus according to  claim 12 , wherein the silicone oil source is shielded with a Faraday cage. 
     
     
         14 . An organic electronic device fabrication system comprising the plasma deposition apparatus according to  claim 9 .