Method for patterning a stack

Abstract

The embodiments disclose a method for patterning a stack, including embedding servo patterns within a final template and creating positions of plural cross-tracked shifted position error signal (PES) fields incrementally from the embedded servo patterns on the final template.

1 . A method for patterning a stack, comprising:
 embedding servo patterns within a final template; and   creating positions of plural cross-tracked shifted position error signal (PES) fields incrementally from the embedded servo patterns on the final template.   
     
     
         2 . The method of  claim 1 , further comprising before embedding the servo patterns within the final template, embedding the servo patterns using a secondary master template; and patterning an entire higher density primary master imprint template using a lower domain dot density precursor guiding pattern. 
     
     
         3 . The method of  claim 2 , wherein the primary master imprint template is patterned using lower domain dot density precursor guiding pattern with density multiplicatives. 
     
     
         4 . The method of  claim 3 , wherein the secondary master template servo pattern impression is mirrored onto the primary imprint template and the density multiplicatives are a diblock copolymer guided self-assembly process. 
     
     
         5 . The method of  claim 1 , wherein the cross-tracked shifted PES fields have incremental shifts of multiple PES fields that are used to read PES signals to avoid partial domain dot erasures. 
     
     
         6 . The method of  claim 5 , further comprising disabling a PES field pair using a detection of partial dot noise recorded on a readback trace. 
     
     
         7 . The method of  claim 1 , wherein the PES field are created using cross track shifting to determine PES field pair positions producing a highest signal to noise ratio. 
     
     
         8 . The method of  claim 7 , wherein a number of multiple position error signal bursts are adjustable based on a coarseness of the servo patterns and a size of domain dots. 
     
     
         9 . The method of  claim 7 , wherein the PES fields are configured as a set of PES fields oriented 90 degrees to one another in a cross track direction. 
     
     
         10 . The method of  claim 1 , wherein the master template is used as a stencil to embed servo patterns on a final master imprint template to make bit-patterned stacks. 
     
     
         11 . An apparatus, comprising:
 means for setting PES field pairs positions shifts incrementally to control positioning changes; and   means for shifting the PES field pairs positions using the incremental shift value to avoid partial domain dot erasures.   
     
     
         12 . The apparatus of  11 , further comprising means for adjusting the incremental shift value equal to ¼ domain dot to refine positioning shifts. 
     
     
         13 . The apparatus of  11 , further comprising means for adjusting a direction of the incremental shifts to include cross tracks that are parallel to tracks. 
     
     
         14 . The apparatus of  11 , further comprising means for changing the positioning of the PES field pairs incrementally to avoid partial domain dot erasures that do not fall on any track boundary. 
     
     
         15 . The apparatus of  11 , further comprising means for repeating the cross track shifting of the PES field pairs to any number of pairs. 
     
     
         16 . The apparatus of  11 , further comprising means for embedding the servo patterns into a high density final template to be used as a stencil to embed servo patterns to make bit-patterned stacks or media. 
     
     
         17 . A template, comprising:
 a lower density precursor template;   a high density template;   one or more embedded servo patterns; and   a separate secondary master template, wherein the separate secondary master template is configured to create the one or more embedded servo patterns to combine with the high density template and wherein the lower density precursor template is configured to create a primary imprint template to form a high density final template for use in making bit-patterned stacks.   
     
     
         18 . The template of  claim 17 , wherein the primary imprint template is configured to reduce mastering time using the lower domain dot density template. 
     
     
         19 . The template of  claim 17 , wherein one or more servo patterns are embedded within the high density final template using a secondary master template with mirrored servo patterns. 
     
     
         20 . The final template of  claim 17 , wherein the one or more embedded servo patterns within the high density final template are read using cross track shifted PES fields to avoid partial dot erasures and to produce the highest signal to noise ratio.