Reflection reducing film, optical member and optical system

Abstract

A reflection reducing film is provided on a surface of an optical substrate, and is sequentially provided with a buffer layer and a reflection reducing layer. The reflection reducing layer includes first to eighth layers sequentially laminated from the side of the buffer layer. The first and sixth layers are made of a low-refractive index material having a refractive index in the range of 1.35 to 1.50 at the d-line, the third, fifth and seventh layers are made of an intermediate-refractive index material having a refractive index in the range of 1.55 to 1.85 at the d-line, and the second, fourth and eighth layers are made of a high-refractive index material having a refractive index in the range of 1.70 to 2.50 at the d-line.

1 . A reflection reducing film comprising:
 a reflection reducing layer which is provided on a substrate and includes first to ninth layers sequentially laminated from the opposite side to the substrate;   wherein the first and eighth layers are made of a low-refractive index material having a refractive index equal to or higher than 1.35 and equal to or lower than 1.50 at the d-line, the third, fifth, seventh and ninth layers are made of an intermediate-refractive index material having a refractive index equal to or higher than 1.55 and equal to or lower than 1.85 at the d-line, and the second, fourth and sixth layers are made of a high-refractive index material having a refractive index higher than that of the intermediate-refractive index material in the range of 1.70 to 2.50 at the d-line.   
     
     
         2 . The reflection reducing film according to  claim 1 , wherein all the following conditional expressions (11) to (19) are satisfied:
   0.24×λ0 ≦N 1 ×d 1≦0.27×λ0  (11)
     0.16×λ0 ≦N 2 ×d 2≦0.19×λ0  (12)
     0.03×λ0 ≦N 3 ×d 3≦0.05×λ0  (13)
     0.20×λ0 ≦N 4 ×d 4≦0.25×λ0  (14)
     0.48×λ0 ≦N 5 ×d 5≦0.51×λ0  (15)
     0.48×λ0 ≦N 6 ×d 6≦0.51×λ0  (16)
     0.29×λ0 ≦N 7 ×d 7≦0.33×λ0  (17)
     0.09×λ0 ≦N 8 ×d 8≦0.13×λ0  (18)
     0.34×λ0 ≦N 9 ×d 9≦0.47×λ0  (19)
   where λ 0  denotes a center wavelength, N 1  to N 9  denotes refractive indices of the first to ninth layers at the center wavelength λ 0 , and d 1  to d 9  denotes physical film thicknesses of the first to ninth layers.   
     
     
         3 . The reflection reducing film according to  claim 2 , further comprising a buffer layer which has a multilayer structure between the substrate and the reflection reducing layer,
 wherein a layer coming into contact with the reflection reducing layer in the buffer layer has a refractive index higher than that of the ninth layer coming into contact with the buffer layer in the reflection reducing layer.   
     
     
         4 . The reflection reducing film according to  claim 3 ,
 wherein a refractive index of the substrate at the d-line is equal to or higher than 1.84 and equal to or lower than 2.2,   wherein the buffer layer includes tenth to fifteenth layers sequentially laminated from the side of the reflection reducing layer,   wherein the eleventh, thirteenth and fifteenth layers are made of the intermediate-refractive index material, and   the tenth, twelfth and fourteenth layers are made of the high-refractive index material.   
     
     
         5 . The reflection reducing film according to  claim 3 ,
 wherein a refractive index of the substrate at the d-line is equal to or higher than 1.71 and equal to or lower than 1.89,   wherein the buffer layer includes tenth to thirteenth layers sequentially laminated from the side of the reflection reducing layer, and   wherein the eleventh and thirteenth layers are made of the intermediate-refractive index material, and the tenth and twelfth layers are made of the high-refractive index material.   
     
     
         6 . The reflection reducing film according to  claim 3 ,
 wherein a refractive index of the substrate at the d-line is equal to or higher than 1.51 and equal to or lower than 1.72,   wherein the buffer layer includes tenth to thirteenth layers sequentially laminated from the side of the reflection reducing layer, and   wherein the eleventh layer is made of the low-refractive index material, the thirteenth layer is made of the intermediate-refractive index material, and the tenth and twelfth layers are made of the high-refractive index material.   
     
     
         7 . The reflection reducing film according to  claim 3 ,
 wherein a refractive index of the substrate at the d-line is equal to or higher than 1.57 and equal to or lower than 1.62,   wherein the buffer layer includes tenth to fourteenth layers sequentially laminated from the side of the reflection reducing layer, and   wherein the tenth, twelfth and fourteenth layers are made of the high-refractive index material, and the eleventh and thirteenth layers are made of the low-refractive index material.   
     
     
         8 . The reflection reducing film according to  claim 3 ,
 wherein a refractive index of the substrate at the d-line is equal to or higher than 1.40 and equal to or lower than 1.58,   wherein the buffer layer includes tenth to twelfth layers sequentially laminated from the side of the reflection reducing layer, and   wherein the tenth layer is made of the high-refractive index material, the eleventh layer is made of the low-refractive index material and the twelfth layer is made of the intermediate-refractive index material, or   the tenth and twelfth layers are made of the high-refractive index material and the eleventh layer is made of the low-refractive index material.   
     
     
         9 . The reflection reducing film according to  claim 1 ,
 wherein the low-refractive index material includes at least one of magnesium fluoride (MgF 2 ), silicon dioxide (SiO 2 ) and aluminum fluoride (AlF 3 ),   wherein the intermediate-refractive index material includes at least one of praseodymium aluminate (PrAlO 3 ), lanthanum aluminate (La 2x Al 2Y O 3(X+Y) ), aluminum oxide (Al 2 O 3 ), germanium oxide (GeO 2 ) and yttrium oxide (Y 2 O 3 ), and   wherein the high-refractive index material includes at least one of lanthanum titanate (LaTiO 3 ), zirconium oxide (ZrO 2 ), titanium oxide (TiO 2 ), tantalum oxide (Ta 2 O 5 ), niobium oxide (Nb 2 O 5 ), hafnium oxide (HfO 2 ) and cerium oxide (CeO 2 ).   
     
     
         10 . An optical member comprising the reflection reducing film according to  claim 1  on a surface thereof. 
     
     
         11 . An optical system comprising the optical member according to  claim 10 .