Display

Abstract

A display device including an organic electroluminescence device provided on a substrate and protected by a protective film characterized in that the protective film is composed of silicon nitride films formed in layers by a chemical vapor deposition method using an ammonia gas, a high-density silicon nitride film being provided in a surface layer of the protective film, and a low-density silicon nitride film having a lower density than that of the high-density silicon nitride film being provided below it.

1 . A display comprising:
 a substrate;   at least one light-emitting device over the substrate in a display region;   a protective layer covering the display region and each light-emitting device in the display region, the protective layer comprising a plurality of layers,   wherein,
 the protective layer comprises an uppermost layer, a lowermost layer and a middle layer between the uppermost and lowermost layers, 
 the protective layer covers an upper light emitting surface of each light emitting device to seal in each light-emitting device, 
 the lowermost layer is adjacent each light emitting device and is adjacent the upper light emitting surface, the lowermost silicon nitride layer has a higher density than that of the middle layer. 
   
     
     
         2 . The display according to  claim 1 , wherein the uppermost layer has a density greater than that of the lowermost layer. 
     
     
         3 . The display according to  claim 1 , wherein the uppermost layer is formed during the deposition of a film below the surface layer. 
     
     
         4 . The display according to  claim 1 , wherein light emitted from each light-emitting device is transmitted outward through the protective layer. 
     
     
         5 . The display of  claim 1 , comprising a plurality of light-emitting devices. 
     
     
         6 . The display of  claim 1 , further comprising a sealing substrate and a resin layer bonding the sealing substrate over the light-emitting devices. 
     
     
         7 . The display of  claim 1 , wherein the uppermost layer has a density of 7.1×10 22  atoms/cm 3  or greater. 
     
     
         8 . The display of  claim 1 , wherein one of the layers of the protective layer is a made of a silicon compound. 
     
     
         9 . The display of  claim 1 , wherein the protective layer covers and is adjacent to sidewalls of each light emitting device. 
     
     
         10 . The display of  claim 1 , wherein the uppermost layer has a higher density that that of the middle layer. 
     
     
         11 . The display of  claim 1 , wherein the density of each of the uppermost layer and the lowermost layer is 6.2×10 22  atoms/cm 3  or greater.