Liquid dispensing systems with gas removal and sensing capabilities

Abstract

A dispensing assembly for a pressure dispense package includes a connector having separate and distinct liquid and extraction conduits, and having a pressurization gas conduit. A liner fitment adapter may include a longitudinal bore to receive a probe portion of a connector defining a liquid extraction conduit, and may include a lateral bore to enable removal of gas. Insertion of a connector into a dispensing assembly simultaneously makes fluidic connections between (a) a gas extraction conduit and a dispensing volume; (b) a liquid extraction conduit and the dispensing volume, and (c) a pressurization gas conduit and a space to be pressurized within a pressure dispense vessel. Presence of fluid or change in phase of flowing fluid within a fluid circuit may be sensed by comparing outputs of first and second temperature sensing elements, with one sensing element including a heater to increase temperature of the sensing element in exposure to gas but not in exposure to liquid. A system and method for fluid dispensing includes a first pressure dispense apparatus and a sensing element arranged to sense a condition correlative of approach to gas saturation of dispensed fluid, and in response to such sensed condition initiates dispensation by a second pressure dispense apparatus for combining pressure dispensed fluid flows supplied to a point of use.

1 - 78 . (canceled) 
     
     
         79 . A gas removal apparatus adapted to remove gas from a liquid stream, the apparatus comprising:
 a reservoir body defining an interior volume including therein a filtration medium adapted to permit passage of liquid but prevent passage of bubbles, the reservoir body having a fluid inlet, having a liquid outlet arranged to receive liquid passing through the filtration medium, and having a gas outlet arranged to receive gas accumulated from bubbles prevented from passing through the filtration medium; and   a pressure transducer in sensory communication with the interior volume and arranged to generate an output signal indicative of pressure within the interior volume.   
     
     
         80 . The gas removal apparatus of  claim 79 , having associated therewith a controller arranged to control flow of the liquid stream responsive to the output signal. 
     
     
         81 . The gas removal apparatus of  claim 79 , wherein the filtration medium comprises one or more of a mesh, packed media, porous media, a membrane, and a spunbonded material. 
     
     
         82 . The gas removal apparatus of  claim 79 , wherein the filtration medium comprises multiple types of filtration media arranged in series. 
     
     
         83 . The gas removal apparatus of  claim 79 , wherein the filtration medium comprises a first filtration media arranged to prevent passage of particulate material, and a second filtration media arranged to prevent passage of gas bubbles. 
     
     
         84 . The gas removal apparatus of  claim 79 , further comprising a gas control element arranged to periodically vent gas through the gas outlet. 
     
     
         85 . The gas removal apparatus of  claim 79 , wherein the pressure transducer is adapted to sense pressure droop of the liquid as indicative of a condition of exhaustion or near exhaustion of liquid dispensed to the gas removal apparatus from an upstream pressure dispense package. 
     
     
         86 . The gas removal apparatus of  claim 79 , further comprising a level sensor arranged to sense liquid level within the reservoir. 
     
     
         87 . The gas removal apparatus of  claim 79 , further comprising a liquid flow metering element. 
     
     
         88 . A liquid delivery system for microelectronic device manufacturing, the liquid delivery system comprising the gas removal apparatus of  claim 79 . 
     
     
         89 . A method comprising:
 (a) venting gas from within an interior volume of a collapsible liner disposed in an overpack container of a pressure dispense package, the liner further containing a liquid, wherein the gas is vented through a gas extraction conduit and a gas outlet defined in a dispensing assembly;   (b) supplying pressurized gas to an interstitial space between the liner and the overpack container to compress the liner and thereby dispense liquid from the interior volume through a liquid extraction conduit and a liquid outlet defined in the dispensing assembly, wherein the liquid extraction conduit is distinct from the gas extraction conduit;   (c) flowing liquid received from the liquid output through a reservoir body disposed downstream of the dispensing assembly, wherein the reservoir body defines an interior volume including therein a filtration medium adapted to permit passage of liquid but prevent passage of bubbles, the reservoir body having a reservoir liquid outlet arranged to receive liquid passing through the filtration medium, and having a reservoir gas outlet arranged to receive gas accumulated from bubbles prevented from passing through the filtration medium; and   (d) venting gas from the reservoir gas outlet.   
     
     
         90 . The method of  claim 89 , further comprising sensing liquid level within the interior volume, wherein said venting of gas from the reservoir gas outlet is performed responsive to said sensing of liquid level within the interior volume. 
     
     
         91 . The method of  claim 89 , further comprising sensing pressure within the interior volume, and controlling operation of at least one of the following items (i) to (iii) responsive to the sensing of pressure within the interior volume: (i) flow of liquid to the reservoir body, (ii) flow of liquid through the reservoir liquid outlet, and (iii) venting of gas from the reservoir gas outlet. 
     
     
         92 . The method of  claim 89 , further comprising sensing at least one of chemical specific presence, chemical concentration, particle count, flow, and temperature, and responsive to such sensing controlling operation of at least one of the following items (i) to (iii): (i) flow of liquid to the reservoir body, (ii) flow of liquid through the reservoir liquid outlet, and (iii) venting of gas from the reservoir gas outlet. 
     
     
         93 . An apparatus adapted to detect presence of fluid or change in phase of flowing fluid within a fluid circuit, the apparatus comprising:
 a first thermistor in sensory communication with the fluid at a first location within the fluid circuit, the first thermistor arranged to be driven at a first current level sufficient to cause self-heating of the first thermistor upon exposure of a sensing portion thereof to gas;   a second thermistor in sensor communication with the fluid at a second location within the fluid circuit, the second thermistor arranged to be driven at a second current level that is substantially lower than the first current level; and   a signal processing element arranged to receive a first output signal of the first thermistor and a second output signal of the second thermistor, and to determine presence of fluid or change in phase of flowing fluid within the fluid circuit based on comparison of the first output signal and the second output signal.   
     
     
         94 . The apparatus of  claim 93 , wherein the signal processing element comprises a comparator and an amplifier. 
     
     
         95 . The apparatus of  claim 93 , adapted to detect change in phase from gas phase to liquid phase of flowing fluid within the fluid circuit 
     
     
         96 . The apparatus of  claim 93 , adapted to detect presence or absence of at least one gas bubble in flowing fluid within the fluid circuit. 
     
     
         97 . A fluid dispensing system comprising the apparatus of  claim 93 , a gas vent, a liquid receiving line in fluid communication with a process tool, and flow control element arranged to selectively admit fluid into the liquid receiving line, wherein the system is adapted to operate the flow control element to admit fluid into the liquid receiving line responsive to receipt of a signal derived from the signal processing element indicative of presence of liquid within the fluid circuit. 
     
     
         98 . A connector for a liner-based pressure dispense container, the connector comprising the apparatus of  claim 93 .