Soft mold and method for fabricating the same

Abstract

A soft mold and a method for fabricating the same are disclosed. A master mold that has a pattern on a substrate is first formed. A first liquid high polymer precursor is formed on the master mold and then partially cured. A support film having high UV transmittance is attached to the partially cured high polymer. The attached support film and the partially cured high polymer are treated with a coupling agent and a second liquid high polymer precursor is formed on the partially cured high polymer and the support film. The second liquid high polymer precursor and the partially cured high polymer are then fully cured to form a mold. The fully cured mold is stripped from the master mold to form a soft mold having a predetermined shape on one surface.

1 . A soft mold comprising:
 a support film having UV transmittance of about 95% or greater; and   a mold surrounding the support film, the mold having a surface containing a pattern.   
     
     
         2 . The soft mold as claimed in  claim 1 , wherein the mold has a thickness of about 1.5 mm to 6 mm. 
     
     
         3 . The soft mold as claimed in  claim 1 , wherein the mold has a substantially flat surface, the support film is arranged in the mold substantially parallel with the substantially flat surface, and the support film has a substantially uniform thickness. 
     
     
         4 . The soft mold as claimed in  claim 1 , wherein the mold comprises a fully cured elastic polymer or a high polymer equivalent to the fully cured elastic polymer. 
     
     
         5 . The soft mold as claimed in  claim 4 , wherein the mold comprises at least one of PDMS, polyurethane, or polyimide.