Inspection device

Abstract

The invention relates to a device for inspecting contact-sensitive planar materials or workpieces, e.g. wafers for the semiconductor industry, solar cells, glasses, FPD substrates, or biologically active substrates for biosensors, as well as materials having contact-sensitive curved surfaces. Said inspection device comprises a support element ( 1 ) for supporting a material ( 3 ) on the top face of the support element ( 1 ), at least one oscillator which is connected to the support element ( 1 ) and the oscillation frequency and amplitude of which are selected in such a way as to keep the material ( 3 ) hovering on the support element ( 1 ), and at least one optical sensor ( 4 ). The support element is made of a light-permeable material, and the optical sensor ( 4 ) is arranged below the support element ( 1 ).

1 . Inspection device which comprises:
 a support element ( 1 ) for supporting a material ( 3 ) on the top side of the support element ( 1 ),   at least one oscillator connected to the support element ( 1 ), wherein the oscillation frequency and amplitude of the oscillator are selected so as to keep the material ( 3 ) levitating on the support element ( 1 ), and   at least one optical sensor,   wherein   the support element ( 1 ) is made of a light-permeable material and   the optical sensor is arranged below the support element ( 1 ).   
     
     
         2 . Inspection device according to  claim 1 , characterized in that the support element ( 1 ) is made of glass. 
     
     
         3 . Inspection device according to  claim 1 , characterized in that the support element ( 1 ) is made of a light-permeable ceramic material. 
     
     
         4 . Inspection device according to  claim 1 , characterized in that the support element ( 1 ) is made of an oscillatory light-permeable plastic material. 
     
     
         5 . Transport and inspection device for materials which are to be transported and inspected and are moved along a transport path by using transport means, characterized in that an inspection device according to any of the  claims 1  to  4  is arranged within the area of the transport path.