Method of forming noble metal layer using ozone reaction gas

Abstract

A noble metal layer is formed using ozone (O 3 ) as a reaction gas.

1 . A method of forming a noble metal layer, comprising:
 using ozone (O 3 ) as a reaction gas at a concentration level ranging from approximately 50 g/m 3  to approximately 300 g/m 3  and at a substrate temperature ranging from approximately 150° C. to approximately 275° C.   
     
     
         2 . The method of  claim 1 , wherein forming the noble metal layer comprises controlling the ozone concentration level and the substrate temperature in accordance with an inverse proportional relationship. 
     
     
         3 . The method of  claim 2 , wherein controlling the ozone concentration level comprises:
 in response to one of the ozone concentration level and substrate temperature being at a level sufficiently high so as to adversely affect a surface roughness of the noble metal layer being formed, reducing the other of the ozone concentration level and substrate temperature to a level sufficiently low so as to maintain the surface roughness of the noble metal layer being formed at a predetermined level.