Film substrate conveying device

Abstract

A film substrate conveying device is a device for conveying a belt-like film substrate while placing the film substrate upright, with one end part thereof being on an upper side in a width direction thereof. The film substrate conveying device has at least a pair of first grip rollers disposed to sandwich an upper end part of the film substrate therebetween; and a first angle adjusting mechanism capable of adjusting an inclination direction and an inclination angle of the first grip rollers to be capable of inclining a rotation angle of the first grip rollers such that a rotation direction of the first grip rollers is on an upper side with respect to a conveying direction.

1 - 6 . (canceled) 
     
     
         7 . A film substrate conveying device for conveying a belt-like film substrate while placing the film substrate upright, with one end part thereof being on an upper side in a width direction thereof, the film substrate conveying device comprising:
 at least a pair of first grip rollers disposed to sandwich an upper end part of the film substrate therebetween; and   a first angle adjusting mechanism capable of adjusting an inclination direction and an inclination angle of the first grip rollers to be capable of inclining a rotation axis angle of the first grip rollers such that a rotation direction of the first grip rollers is on an upper side with respect to a conveying direction.   
     
     
         8 . A film substrate conveying device according to  claim 7 , further comprising:
 at least a pair of second grip rollers disposed to sandwich a lower end part of the film substrate therebetween; and   a second angle adjusting mechanism capable of adjusting an inclination direction and an inclination angle of the second grip rollers to be capable of inclining a rotation axis angle of the second grip rollers such that a rotation direction of the second grip rollers is on a lower side with respect to the conveying direction.   
     
     
         9 . A film substrate conveying device according to  claim 7 , further comprising a detection device for detecting a level of a width direction end part of the film substrate,
 wherein when the detection device detects a displacement of the film substrate, the first angle adjusting mechanism and/or the second angle adjusting mechanism controls the first grip rollers and/or the second grip rollers to incline in the inclination direction corresponding to the conveying direction of the film substrate.   
     
     
         10 . A film substrate conveying device according to  claim 7 , wherein the first angle adjusting mechanism and/or the second angle adjusting mechanism controls to change the inclination angle of the first grip rollers and/or the second grip rollers to correct a displacement of the substrate. 
     
     
         11 . A film substrate conveying device according to  claim 8 , wherein the second angle adjusting mechanism comprises:
 a roller attachment part to which the second grip rollers are rotatably attached, and movable to change the rotation direction of the second grip rollers between an upper side and a lower side with respect to the conveying direction;   an urging device urging the roller attachment part to change the rotation direction of the second grip rollers toward the upper side or the lower side with respect to the conveying direction;   an engaging roller configured to move in conjunction with a movement of the roller attachment part;   an arm engaging with the engaging roller against a movement of the engaging roller with an urge of the roller attachment part from the urging device; and   an actuator to drive the arm,   wherein a drive of the arm moves the engaging roller and the roller attachment part, and changes the rotation direction of the second grip rollers.   
     
     
         12 . A film substrate conveying device according to  claim 7 , wherein the first angle adjusting mechanism comprises:
 a roller attachment part to which the first grip rollers are attached rotatably, and movable to change the rotation direction of the first grip rollers between the upper side and the lower side with respect to the conveying direction;   an urging device urging the roller attachment part to change the rotation direction of the first grip rollers toward the upper side or the lower side with respect to the conveying direction;   an engaging roller configured to move in conjunction with a movement of the roller attachment part;   an arm engaging with the engaging roller against a movement of the engaging roller with an urge of the roller attachment part from the urging device; and   an actuator to drive the arm,   wherein a drive of the arm moves the engaging roller and the roller attachment part, and changes the rotation direction of the first grip rollers.