Organometallic compounds

Abstract

This invention relates to organometallic compounds represented by the formula H a M(NR 1 R 2 ) x (NR 3 H) y (NH 2 ) z wherein M is a metal or metalloid, each of R 1 , R 2 and R 3 is the same or different and is independently a hydrocarbon group or a heteroatom-containing group, a is a value from 0 to 3, x is a value from 0 to 3, y is a value from 0 to 4, z is a value from 0 to 4, and a+x+y+z is equal to the oxidation state of M, provided that at least one of y and z is a value of at least 1, a process for producing the organometallic compounds, and a method for producing a film or coating from organometallic precursor compounds.

1 . An organometallic precursor compound represented by the formula H a M(NR 1 R 2 ) x (NR 3 H) y (NH 2 ) z  wherein M is a metal or metalloid, R 1  is the same or different and is a hydrocarbon group or a heteroatom-containing group, R 2  is the same or different and is a hydrocarbon group or a heteroatom-containing group, R 3  is the same or different and is a hydrocarbon group or a heteroatom-containing group, a is a value of 0 or 1, x is a value from 0 to 3, y is a value from 0 to 4, z is a value of 0 or 1, and a+x+y+z is equal to the oxidation state of M, provided that at least one of y and z is a value of at least 1; wherein the organometallic compound is a liquid at 20° C. 
     
     
         2 . The organometallic compound of  claim 1  which is a liquid at 20° C. 
     
     
         3 . The organometallic compound of  claim 1  wherein a is a value of 0 or 1, x is a value of 2 or 3, y is a value of 0 or 1, and z is value of 1 or 2, wherein a+x+y+z is equal to the oxidation state of M. 
     
     
         4 . The organometallic precursor compound of  claim 1  wherein M is Si, Ti, Zr, Hf, V, Nb, Ta, Cr, Mo, W, Al, Ga, Ge, a Lanthanide series element or an Actinide series element; and each of R 1 , R 2  and R 3  is the same or different and is independently hydrogen, alkyl; a substituted or unsubstituted, saturated or unsaturated, hydrocarbon, aromatic hydrocarbon, cycloaliphatic hydrocarbon, aromatic heterocycle, cycloaliphatic heterocycle, alkyl halide, silylated hydrocarbon, ether, polyether, thioether, ester, lactone, amide, amine, polyamine, nitrile; or mixtures thereof. 
     
     
         5 . The organometallic precursor compound of  claim 1  selected from tris(dimethylamino)silylamine, tris(pyrrolyl)silylamine, tris(2-methylpyrrolidinyl)silylamine, tris(imidazolyl)silylamine, tris(1-methylpiperazinyl)silylamine, tris(pyrazolyl)silylamine, tetrakis(ethylamino)silane, and tris(dimethylamino)(ethylamino)silane. 
     
     
         6 . The organometallic precursor compound of  claim 1  represented by the formula H a Si(NR 1 R 2 ) x (NR 3 H) y (NH 2 ) z  wherein R 1  is the same or different and is a hydrocarbon group or a heteroatom-containing group, R 2  is the same or different and is a hydrocarbon group or a heteroatom-containing group, R 3  is the same or different and is a hydrocarbon group or a heteroatom-containing group, a is a value 0 or 1, x is a value from 0 to 3, y is a value from 0 to 4, z is a value of 0 or 1, and a+x+y+z=4, provided that at least one of y and z is a value of at least 1. 
     
     
         7 . An organometallic compound represented by the formula :M(NR′ 1 R′ 2 ) q  wherein M is a metal or metalloid, R′ 1  is the same or different and is a hydrocarbon group or a heteroatom-containing group, R′ 2  is the same or different and is a hydrocarbon group or a heteroatom-containing group; when a is a value of 2 or greater, R′ 1  or R′ 2  of one (NR′ 1 R′ 2 ) group can be combined with R′ 1  or R′ 2  of another (NR′ 1 R′ 2 ) group to form a substituted or unsubstituted, saturated or unsaturated cyclic group; q is a value equal to or less than the oxidation state of M, and : represents 2 electrons. 
     
     
         8 . The organometallic compound of  claim 7  which is a liquid at 20° C. 
     
     
         9 . The organometallic compound of  claim 7  wherein q is a value from 0 to 4. 
     
     
         10 . The organometallic compound of  claim 7  represented by the formula :Si(NR′ 1 R′ 2 ) 2  wherein R′ 1  is the same or different and is a hydrocarbon group or a heteroatom-containing group, R′ 2  is the same or different and is a hydrocarbon group or a heteroatom-containing group; R′ 1  or R′ 2  of one (NR′ 1 R′ 2 ) group can be combined with R′ 1  or R′ 2  of another (NR′ 1 R′ 2 ) group to form a substituted or unsubstituted, saturated or unsaturated cyclic group; and represents 2 electrons. 
     
     
         11 . A mixture comprising (i) a first organometallic precursor compound represented by the formula H a M(NR 1 R 2 ) x (NR 3 H) y (NH 2 ) z  wherein M is a metal or metalloid, R 1  is the same or different and is a hydrocarbon group or a heteroatom-containing group, R 2  is the same or different and is a hydrocarbon group or a heteroatom-containing group, R 3  is the same or different and is a hydrocarbon group or a heteroatom-containing group, a is a value of 0 or 1, x is a value from 0 to 3, y is a value from 0 to 4, z is a value of 0 or 1, and a+x+y+z is equal to the oxidation state of M, provided that at least one of y and z is a value of at least 1, and (ii) one or more different organometallic precursor compounds; wherein the mixture is a liquid at 20° C. 
     
     
         12 . The mixture of  claim 11  wherein said one or more other organometallic precursor compounds are selected from a hafnium-containing, tantalum-containing or molybdenum-containing organometallic precursor compound. 
     
     
         13 . The mixture of  claim 11  comprising (i) a first organometallic precursor compound represented by the formula H a Si(NR 1 R 2 ) x (NR 3 H) y (NH 2 ) z  wherein R 1  is the same or different and is a hydrocarbon group or a heteroatom-containing group, R 2  is the same or different and is a hydrocarbon group or a heteroatom-containing group, R 3  is the same or different and is a hydrocarbon group or a heteroatom-containing group, a is a value of 0 or 1, x is a value from 0 to 3, y is a value from 0 to 4, z is a value of 0 or 1, and a+x+y+z=4, provided that at least one of y and z is a value of at least 1, and (ii) one or more different organometallic precursor compounds. 
     
     
         14 . A mixture comprising (i) a first organometallic precursor compound represented by the formula :M(NR′ 1 R′ 2 ) q  wherein M is a metal or metalloid, R′ 1  is the same or different and is a hydrocarbon group or a heteroatom-containing group, R′ 2  is the same or different and is a hydrocarbon group or a heteroatom-containing group; when q is a value of 2 or greater, R′ 1  or R′ 2  of one (NR′ 1 R′ 2 ) group can be combined with R′ 1  or R′ 2  of another (NR′ 1 R′ 2 ) group to form a substituted or unsubstituted, saturated or unsaturated cyclic group; q+2 is a value equal to the oxidation state of M, and : represents 2 electrons, and (ii) one or more different organometallic precursor compounds; wherein the mixture is a liquid at 20° C. 
     
     
         15 . The mixture of  claim 14  wherein said one or more other organometallic precursor compounds are selected from a hafnium-containing, tantalum-containing or molybdenum-containing organometallic precursor compound. 
     
     
         16 . The mixture of  claim 14  comprising (i) a first organometallic precursor compound represented by the formula :Si(NR′ 1 R′ 2 ) 2  wherein R′ 1  is the same or different and is a hydrocarbon group or a heteroatom-containing group, R′ 2  is the same or different and is a hydrocarbon group or a heteroatom-containing group; R′ 1  or R′ 2  of one (NR′ 1 R′ 2 ) group can be combined with R′ 1  or R′ 2  of another (NR′ 1 R′ 2 ) group to form a substituted or unsubstituted, saturated or unsaturated cyclic group; and : represents 2 electrons, and (ii) one or more different organometallic precursor compounds.