Substrate support, substrate processing device and method of placing a substrate

Abstract

A substrate support for supporting a substrate in a processing chamber comprises a frame for carrying the substrate, at least a first fastening means fixedly attached to the frame for aligning the substrate relative to the frame, and at least a second fastening means movably attached to the frame, the second fastening means being movable relative to the frame and/or the substrate. Furthermore, a processing device comprises an edge exclusion projecting over a portion of the surface of the substrate in order to prevent processing of the portion of the surface of the substrate. A part of the edge exclusion may be moved into a gap between the edge(s) of the substrate and the frame element of the substrate support to form a labyrinth seal between the frame element and the edge of the substrate. A method of placing the substrate on the substrate support is also disclosed.

1 . A substrate processing device for processing a substrate comprising:
 at least one process chamber;   processing tools arranged in the process chamber for processing the substrate;   a substrate support having a frame and being received in the process chamber for supporting the substrate; and   an edge exclusion projecting over a portion of the surface of the substrate for preventing processing of a portion of the substrate, wherein the edge exclusion is adapted to provide a labyrinth seal between an edge of the substrate and a frame element of the substrate support, wherein the labyrinth seal comprises at least a protrusion extending from the body portion of the edge exclusion, wherein the edge exclusion is movably arranged within the process chamber relative to the substrate support such that the protrusion is movable into the gap between the edge of the substrate and the frame element.   
     
     
         2 . The substrate processing device according to  claim 1 , wherein the frame is arranged such that a gap is formed between the frame element and the edge of the substrate supported in the substrate support. 
     
     
         3 . The substrate processing device according to  claim 1 , wherein the edge exclusion and the substrate support received in the process chamber are arranged movable relative to each other in order to move at least a portion of the edge exclusion into the gap between the edge of the substrate supported by the substrate support and the frame element of the substrate support to form the labyrinth seal. 
     
     
         4 . The substrate processing device according to  claim 1 , wherein the edge exclusion comprises a body portion for covering the gap between the edge of the substrate and the frame element of the substrate support in order to prevent particles from entering into the gap. 
     
     
         5 . The substrate processing device according to  claim 1 , wherein the edge exclusion comprises an end portion having a free end projecting over a portion of the substrate surface to form a clearance between the underside of the end portion of the edge exclusion and the portion of the upper substrate surface. 
     
     
         6 . A method of placing a substrate on a substrate support, comprising:
 providing the substrate support having a frame   attaching the substrate to the frame; and   moving an edge exclusion into a gap between the edge of the substrate and a frame element of the substrate support.   
     
     
         7 . The method according to  claim 19 , wherein the step of attaching the substrate to the frame includes moving the second fastening means in an inward direction by a force directed towards the edge of the substrate attached to the first fastening means. 
     
     
         8 . The method according to  claim 6 , wherein attaching the substrate to the first fastening means and/or to the second fastening means is provided by closing a clamp spring of the first fastening means and the second fastening means, respectively, and/or by bringing the edge of the substrate into engagement with the first fastening means and the second fastening means, respectively. 
     
     
         9 . The method according to  claim 6 , wherein the first fastening means is placed in a reference corner of the frame of the substrate support, and the substrate is aligned by placing the substrate in the defined position determined by the first fastening means. 
     
     
         10 . The substrate processing device according to  claim 1 , the substrate support for supporting the substrate comprises:
 at least a first fastening means fixedly attached to the frame for aligning the substrate relative to the frame by attaching the substrate to the first fastening means; and   at least a second fastening means movably attached to the frame, the second fastening means being movable relative to the frame and/or movable relative to the substrate attached to the first fastening means.   
     
     
         11 . The substrate support according to  claim 10 , wherein the second fastening means is movable in a direction at least towards and/or away from the edge of the substrate attached to the first fastening means. 
     
     
         12 . The substrate processing device according to  claim 10 , wherein the first fastening means comprises at least a first retainer element and a second retainer element. 
     
     
         13 . The substrate processing device according to  claim 10 , wherein the first fastening means is arranged on the frame to define a reference corner for retaining, aligning and/or fixedly attaching the substrate relative to the substrate support in a reference position. 
     
     
         14 . The substrate processing device according to  claim 10 , wherein the second fastening means comprises at least a third retainer element and a fourth retainer element. 
     
     
         15 . The substrate processing device according to  claim 10 , wherein the second fastening means is movably attached to the substrate support by means of a linear guide for guiding the retainer elements on a linear path relative to the frame and/or relative to the edge of the substrate received in the first fastening means in a direction substantially perpendicular to the edge of the substrate. 
     
     
         16 . The substrate processing device according to  claim 10 , wherein the second fastening means comprises means for exerting a force in the direction towards the edge(s) of the substrate received in the first fastening means. 
     
     
         17 . The substrate processing device according to  claim 1 , wherein the edge exclusion is arranged within the process chamber. 
     
     
         18 . The method according to  claim 6 , the step of providing the substrate support includes providing at least a first fastening means fixedly attached to a frame of the substrate support, and a second fastening means movably attached to the frame, the second fastening means being movable relative to the frame. 
     
     
         19 . The method according to  claim 6 , wherein the step of attaching the substrate to the frame includes:
 moving the second fastening means in an outward direction to increase a space defined by the position of the first fastening means and the second fastening means between the first fastening means and the second fastening means;   attaching the substrate to the first fastening means;   moving the second fastening means in an inward direction towards an edge of the substrate attached to the first fastening means; and   attaching the substrate to the second fastening means.