Apparatus and method for drying substrates

Abstract

A method for drying substrates using isopropyl alcohol (IPA) includes: a pre-stage in which heated fluid is injected to a bottom surface of a substrate to raise a temperature of the substrate simultaneously to injection of an organic solvent to a top surface of the substrate and injection of a dry gas to the top surface thereof to improve a vaporization power of the organic solvent; and a final stage in which the injection of the heated fluid is stopped and the organic solvent and the dry gas are injected to the top surface of the substrate.

1 . A method for drying substrates, comprising:
 a pre-stage in which heated fluid is injected to a bottom surface of a substrate to raise a temperature of the substrate simultaneously to injection of an organic solvent to a top surface of a rotating substrate.   
     
     
         2 . The method of  claim 1 , further comprising:
 a final stage in which the injection of the heated fluid is stopped and the organic solvent is injected to a top surface of the substrate.   
     
     
         3 . The method of  claim 2 , wherein during the pre-stage and the final stage, a dry gas is injected with the organic solvent to improve a vaporization power of the organic solvent. 
     
     
         4 . The method of  claim 2 , wherein a substrate rotation speed in the final stage is higher than that in the pre-stage. 
     
     
         5 . The method of  claim 2 , wherein during the final stage, the organic solvent is injected from the center to the edge of the substrate only once. 
     
     
         6 . The method of  claim 1 , wherein a temperature of the heated fluid injected to the bottom surface of the substrate is 60 to 80 degrees centigrade. 
     
     
         7 . The method of  claim 1 , wherein in the pre-stage, the heated fluid is injected to the bottom surface of the substrate after fluid accumulated in a pipe is drained for a determined time. 
     
     
         8 . The method of  claim 1 , wherein the heated fluid is deionized water (DI water), and the organic solvent is isopropyl alcohol (IPA). 
     
     
         9 . A method for drying substrates, comprising:
 a pre-stage in which heated fluid is injected to a bottom surface of a substrate to raise a temperature of the substrate simultaneously to injection of an organic solvent to a top surface of the substrate and injection of a dry gas to the top surface thereof to improve a vaporization power of the organic solvent; and   a final stage in which the injection of the heated fluid is stopped and the organic solvent and the dry gas are injected to the top surface of the substrate.   
     
     
         10 . The method of  claim 9 , wherein a substrate rotation speed in the final stage is 600 to 800 rpm which is higher than that in the pre-stage; and
 wherein the organic solvent is injected from the center to the edge of the substrate only once.