Heat retention barrel and vertical heat treatment apparatus provided with heat retention barrel

Abstract

The invention provides a heat retention barrel and a vertical heat treatment apparatus provided with the heat retention barrel. The heat retention barrel is used for supporting the wafer boat and comprises a barrel body and a barrel base. The external rim of the bottom of the barrel body is located within the upper surface of the barrel base. The pollution of the particles in the heat retention barrel to the reaction chamber of the vertical heat treatment apparatus can be eliminated through the portion of the upper surface of the barrel base outside the external rim. The selection of the materials for the heat retention barrel can increase the heat retention and heat insulation effects as well as the use safety.

1 . A heat retention barrel comprising a barrel base and a barrel body, wherein the external rim of the bottom of the barrel body is located within the upper surface of the barrel base. 
     
     
         2 . The heat retention barrel according to  claim 1 , wherein the barrel body is cylindrically shaped. 
     
     
         3 . The heat retention barrel according to  claim 1 , wherein the heat retention barrel comprises heat insulation material filled in the barrel body; the heat insulation material is quartz fiber, ceramic foam or ceramic fiber. 
     
     
         4 . The heat retention barrel according to  claim 1 , wherein the barrel base further comprises at least one opening formed at the bottom of the barrel base and at least one filter disposed at the opening. 
     
     
         5 . The heat retention barrel according to  claim 4 , wherein the material of the filter is porous quartz or sintered ceramic. 
     
     
         6 . The heat retention barrel according to  claim 1 , wherein the materials of the barrel base and the barrel body are quartz material. 
     
     
         7 . (canceled) 
     
     
         8 . A vertical heat treatment apparatus comprising a reaction chamber, a process tube positioned outside the reaction chamber and a heat retention barrel positioned at the bottom of the reaction chamber, wherein the heat retention barrel comprises a barrel body and a barrel base, the external rim of the bottom of the barrel body is located within the upper surface of the barrel base; the process tube is connected with the portion of the upper surface of the barrel base outside the external rim to seal the reaction chamber with the barrel base. 
     
     
         9 . The vertical heat treatment apparatus according to  claim 7 , wherein the barrel body is cylindrically shaped. 
     
     
         10 . The vertical heat treatment apparatus according to  claim 7 , wherein the heat retention barrel comprises heat insulation material filled in the barrel body; the heat insulation material is quartz fiber, ceramic foam or ceramic fiber. 
     
     
         11 . The vertical heat treatment apparatus according to  claim 7 , wherein the barrel base further comprises at least one opening formed at the bottom of the barrel base and at least one filter disposed at the opening. 
     
     
         12 . The vertical heat treatment apparatus according to  claim 10 , wherein the material of the filter is porous quartz or sintered ceramic. 
     
     
         13 . The vertical heat treatment apparatus according to  claim 7 , wherein the materials of the barrel base and the barrel body are quartz material.