Serial plating system

Abstract

A serial plating system includes a plating tank that receives a plating solution, a plurality of workpieces that are serially transferred along a transfer path being simultaneously plated in the plating tank, a common cathode that is electrically connected to the plurality of workpieces via a plurality of transfer jigs that respectively hold the plurality of workpieces, a plurality of split anodes that are disposed in the plating tank so as to face the transfer path, and a plurality of power supplies that are respectively connected to a corresponding split anode among the plurality of split anodes and the common cathode, and independently control current supplied to the corresponding split anode among the plurality of split anodes.

What is claimed is: 
     
         1 . A serial plating system comprising:
 a plating tank that receives a plating solution, a plurality of workpieces that are serially transferred along a transfer path being simultaneously plated in the plating tank;   a common cathode that is electrically connected to the plurality of workpieces via a plurality of transfer jigs that respectively hold the plurality of workpieces;   a plurality of split anodes that are disposed in the plating tank so as to face the transfer path; and   a plurality of power supplies that are respectively connected to a corresponding split anode among the plurality of split anodes and the common cathode, and that respectively independently control current supplied to the corresponding split anode among the plurality of split anodes.   
     
     
         2 . The serial plating system as defined in  claim 1 ,
 each of the plurality of split anodes including a first electrode that faces a first side of each of the plurality of workpieces, and including a second electrode that faces a second side of each of the plurality of workpieces.   
     
     
         3 . The serial plating system as defined in  claim 2 ,
 each of the plurality of power supplies including a first power supply that supplies current to the first electrode, and including a second power supply that supplies current to the second electrode, the first power supply and the second power supply independently controlling the current value.   
     
     
         4 . The serial plating system as defined in  claim 1 ,
 a relationship “L 1 =L 2 ” being substantially satisfied, L 1  being a length of each of the plurality of workpieces along a transfer direction, and L 2  being a length of each of the plurality of split anodes along the transfer direction.   
     
     
         5 . The serial plating system as defined in  claim 1 ,
 the plurality of workpieces being supplied to the plating tank in lot units, the plurality of power supplies respectively gradually increasing the current value of the corresponding split anode among the plurality of split anodes when a first workpiece of one lot faces the corresponding split anode based on an electrolysis area in which the first workpiece faces the corresponding split anode, and the plurality of power supplies respectively gradually decreasing the current value of the corresponding split anode among the plurality of split anodes when a final workpiece of one lot faces the corresponding split anode based on an electrolysis area in which the final workpiece faces the corresponding split anode.   
     
     
         6 . The serial plating system as defined in  claim 1 ,
 a relationship “L 2 <L 1 /n” being satisfied, L 1  being a length of each of the plurality of workpieces along a transfer direction, L 2  being a length of each of the plurality of split anodes along the transfer direction, and n being an integer equal to or larger than 2.   
     
     
         7 . The serial plating system as defined in  claim 6 ,
 the plurality of workpieces being supplied to the plating tank in lot units, and   each of the plurality of power supplies controlling the corresponding split anode among the plurality of split anodes at a constant current from a first workpiece to a final workpiece of each lot.   
     
     
         8 . The serial plating system as defined in  claim 6 ,
 a plurality of nozzles that discharge the plating solution to the plurality of workpieces being provided in the plating tank along a transfer direction at positions opposite to each of the plurality of workpieces, and   at least one split anode among the plurality of split anodes being respectively disposed between two adjacent nozzles among the plurality of nozzles.   
     
     
         9 . The serial plating system as defined in  claim 8 ,
 each of the plurality of split anodes having a circular horizontal cross-sectional shape.