Apparatus for sublimating solid state precursors

Abstract

In some embodiments, an apparatus for sublimating solid state precursors may include a container having a body, lid, and removable bottom, wherein the removable bottom is sealable to the body to seal the container when coupled to the body; a tray insertable into the container from a bottom of the container, the tray comprising: a gas permeable base to support a solid state precursor, the gas permeable base having a through hole disposed proximate the center of the gas permeable base; an outer ring disposed around an outer edge of the base and extending upwardly from the base, the outer ring configured to interface with the lid of the container; and an inner ring disposed within the through hole, the inner ring configured to interface with the lid of the container; an inlet disposed through the lid of the container; and an outlet disposed through the lid of the container.

1 . An apparatus for sublimating solid state precursors, comprising:
 a container having a body, a lid, and a removable bottom, wherein the removable bottom is sealable to the body to seal the container when coupled to the body;   a tray insertable into the container from a bottom of the container, the tray comprising:
 a gas permeable base to support a solid state precursor, the gas permeable base having a through hole disposed proximate the center of the gas permeable base; 
 an outer ring disposed around an outer edge of the base and extending upwardly from the base, the outer ring configured to interface with the lid of the container; and 
 an inner ring disposed within the through hole, the inner ring configured to interface with the lid of the container; 
   an inlet disposed through the lid of the container, the inlet configured to provide a gas through the inner ring of the tray to an area beneath the tray; and   an outlet disposed through the lid of the container to allow a gaseous form of the solid state precursor to flow out of the container.   
     
     
         2 . The apparatus of  claim 1 , wherein the tray comprises a plurality of trays stacked atop one another, and wherein the outer ring of each of the plurality of trays is configured to interface with the outer ring of another tray disposed directly atop the tray or the lid of the container and the inner ring of each of the plurality of trays is configured to interface with the inner ring of another tray disposed directly atop the tray or the lid of the container and wherein the area beneath the tray is an area beneath a bottom most tray of the plurality of trays. 
     
     
         3 . The apparatus of  claim 2 , wherein each of the outer ring and inner ring comprises an outwardly extending tab configured to interface with a cavity formed in each of the outer ring and the inner ring of another tray disposed directly atop the tray or the lid of the container. 
     
     
         4 . The apparatus of  claim 1 , further comprising:
 a temperature control unit disposed through the inner ring of the tray to control a temperature within the container.   
     
     
         5 . The apparatus of  claim 4 , wherein the temperature control unit comprises at least one of a heater or a plurality of conduits configured to allow the flow of a heat transfer fluid within the temperature control unit. 
     
     
         6 . The apparatus of  claim 1 , wherein the container is fabricated from stainless steel, a nickel-chromium alloy, or quartz. 
     
     
         7 . The apparatus of  claim 1 , further comprising a shell disposed around the container. 
     
     
         8 . The apparatus of  claim 7 , wherein the shell may comprise at least one of an insulative material, a heater, or a plurality of conduits configured to allow the flow of a heat transfer fluid within the shell to control over a temperature of the container by increasing or decreasing a transfer of heat from the container during use. 
     
     
         9 . The apparatus of  claim 7 , further comprising a liner disposed between the shell and an outer surface of the container. 
     
     
         10 . The apparatus of  claim 9 , wherein the liner is fabricated from quartz. 
     
     
         11 . The apparatus of  claim 1 , wherein the gas permeable base comprises pores having a diameter of about 25 to 150 microns. 
     
     
         12 . The apparatus of  claim 11 , wherein the gas permeable base comprises a quartz frit or stainless steel frit. 
     
     
         13 . The apparatus of  claim 1 , wherein the inner ring and outer ring are fabricated from stainless steel or quartz. 
     
     
         14 . The apparatus of  claim 1 , further comprising a pressure monitor coupled to each tray to monitor a gas pressure within each tray. 
     
     
         15 . The apparatus of  claim 1 , further comprising a pressure monitor coupled to the inlet and the outlet to monitor a pressure within the container. 
     
     
         16 . The apparatus of  claim 1 , further comprising a heater coupled to the inlet and outlet to control a temperature within the inlet and outlet. 
     
     
         17 . The apparatus of  claim 1 , further comprising a gas manifold disposed beneath the bottom shelf and coupled to a terminal end of the gas conduit, the gas manifold configured to receive the gas and evenly distribute the gas proximate the bottom of the container. 
     
     
         18 . An apparatus for sublimating solid state precursors, comprising:
 a container having a body, a lid, and a removable bottom that is sealable to the body to seal the container when coupled to the body;   a first tray insertable into the container from a bottom of the container, the first tray comprising a gas permeable base to support a solid state precursor and having a central opening formed through the base, an inner wall disposed about the central opening of the base, and an outer wall disposed about an outer edge of the base, wherein the inner and outer walls interface with the lid of the container to provide an airtight seal between the first tray and the lid;   an inlet, disposed through the lid of the container and coupled to an inlet channel passing through the central opening of the base and defined at least in part by the inner wall of the first tray, to provide a gas to an area beneath the first tray; and   an outlet, disposed through the lid of the container in a region generally above a region of the first tray between the inner and outer walls of the first tray, to allow a gaseous form of the solid state precursor to flow out of the container.   
     
     
         19 . The apparatus of  claim 18 , further comprising:
 at least a second tray disposed below the first tray and having a gas permeable base to support a solid state precursor and having a central opening formed through the base, an inner wall disposed about the central opening of the base, and an outer wall disposed about an outer edge of the base, wherein the inner and outer walls of the second tray interface with the inner and outer walls of the first tray to provide an airtight seal between the first tray and the second tray, and wherein the inlet channel further passes through the central opening of the base of the second tray such that the area beneath the first tray where the gas is provided to is beneath the second tray.   
     
     
         20 . The apparatus of  claim 18 , further comprising:
 a temperature control unit disposed within the container to control a temperature within the container.