High-throughput workpiece handling

Abstract

A system and method for receiving unprocessed workpieces, moving them, orienting them and placing them in a load lock, or other end point is disclosed. The system includes a gantry module for moving workpieces from a conveyor system to a swap module. The swap module is used to remove a carrier or matrix of processed workpieces from a load lock and place a carrier of matrix of unprocessed workpieces in its place. The processed workpieces are then moved by the gantry module back to the conveyor. The gantry module may have X, Y, Z and rotational actuators and include an end effector having multiple grippers. A method of aligning a plurality of workpieces on the end effector so that the plurality can be transported at the same time is also disclosed.

What is claimed is: 
     
         1 . A workpiece handling system, comprising a gantry module for moving a plurality of workpieces from a first location to a second location, said gantry module comprising:
 an end effector having one or more grippers for picking up said workpieces;   a first actuator to move said end effector in an X direction;   a second actuator to move said end effector in a Y direction;   a third actuator to move said end effector in a Z direction; and   a rotational actuator to rotate said end effector about said Z direction.   
     
     
         2 . The workpiece handling system of  claim 1 , wherein said grippers are in communication with a suction system. 
     
     
         3 . The workpiece handling system of  claim 1 , further comprising a swap module, said swap module comprising:
 two swap module end effectors, each having an associated actuator to move said swap module end effector in said Y direction; and
 an actuator to move said two swap module end effectors in said Z direction, wherein a distance between said two swap module end effectors in said Z direction remains constant. 
   
     
     
         4 . The workpiece handling system of  claim 3 , wherein said swap modules end effectors are adapted to couple with a carrier, said carrier adapted to store a plurality of workpieces. 
     
     
         5 . The workpiece handling system of  claim 4 , wherein said second location comprises said carrier. 
     
     
         6 . The workpiece handling system of  claim 3 , wherein said swap module end effectors comprise a plurality of fingers, each of said fingers adapted to support one or more workpieces. 
     
     
         7 . The workpiece handling system of  claim 6 , wherein said second location comprises said fingers. 
     
     
         8 . The workpiece handling system of  claim 1 , wherein said end effector comprises a plurality of linearly arranged grippers. 
     
     
         9 . A method of handling a plurality of workpieces from a source to a destination, comprising:
 using a gantry module to pick up a plurality of workpieces from a first location and move said plurality of workpieces to a first swap module end effector, said gantry module having an end effector capable of moving in x, y, and z directions and capable of rotating about said z direction; and   using said swap module comprising:
 two swap module end effectors, wherein said swap modules move in said y and z directions to load and unload said plurality of workpieces from said destination. 
   
     
     
         10 . The method of  claim 9 , wherein second swap module end effector removes a second plurality of workpieces from said destination prior to said first swap module end effector placing said plurality of workpieces at said destination. 
     
     
         11 . The method of  claim 10 , wherein said end effector picks up said second plurality of workpieces from said second swap module end effector and delivers them to a third location. 
     
     
         12 . The method of  claim 11 , wherein said first swap module is located above said second swap module, and said first swap module is moved in said y direction to a parked location to allow workpieces from said second swap module to be accessed by said end effector. 
     
     
         13 . The method of  claim 12 , wherein said destination comprises at least one load lock and said parked location is selected from a position above said load lock, a position below said load lock, and a position between said load lock and a second load lock. 
     
     
         14 . The method of  claim 9 , wherein said end effector comprises a plurality of linearly arranged grippers and picks up a plurality of workpieces arranged along a first direction, and places said plurality of workpieces on said first swap module end effector along a second direction, said second direction orthogonal to said first direction. 
     
     
         15 . The method of  claim 9 , whereby a carrier is coupled to said first swap module end effector and said end effector places said workpieces in said carrier. 
     
     
         16 . The method of  claim 15 , wherein said swap module end effector places said carrier at said destination. 
     
     
         17 . The method of  claim 9 , whereby said swap module end effector comprises a plurality of fingers, and said end effector places said workpieces on said fingers. 
     
     
         18 . The method of  claim 17 , further comprising aligning each of said workpieces against a raised center portion on each of said plurality of fingers when said swap module end effector is moved in said y direction. 
     
     
         19 . The method of  claim 9 , wherein said end effector comprises a plurality of grippers and said gantry module moves said end effector in said x, y, z directions and rotates about said z direction to successively align each of said workpieces with a respective one of said plurality of grippers prior to picking up each of said workpieces. 
     
     
         20 . The method of  claim 19 , further comprising using a suction system to pick up one of said plurality of workpieces after said end effector is aligned to a respective one of said plurality of grippers. 
     
     
         21 . A method of picking up a plurality of workpieces using a gantry module, said gantry module having an end effector having a plurality of linearly arranged grippers for picking up said workpieces, said method comprising:
 using a camera to determine a location of said plurality of workpieces;   aligning a first gripper of said end effector to a first of said plurality of workpieces;   using a suction system, in communication with said first gripper to pick up said first of said plurality of workpieces;   aligning a second gripper of said end effector to a second of said plurality of workpieces; and   using a suction system, in communication with said second gripper to pick up said second of said plurality of workpieces while said first gripper holds said first of said plurality of workpieces.   
     
     
         22 . The method of picking up a plurality of workpieces of  claim 21 , further comprising transferring said first and second of said plurality of workpieces to a swap module, wherein said swap module moves said first and second of said plurality of workpieces to a destination.