System for cooling a sample in an apparatus for processing the sample

Abstract

For cooled processing of a sample, a system for cooling the sample includes a holding device ( 22 ) for receiving the sample in a sample holder ( 20 ), as well as a cooling chamber ( 12 ) that surrounds the position (P) of the sample mounted on the holding device. Provided in the cooling chamber ( 12 ) is a window through which a tool receptacle ( 16 ) for receiving a tool (W) for processing the sample projects into the cooling chamber ( 12 ). The holding device ( 22 ) is coolable to a settable temperature by means of a fluid coolant, and ensures cooling of the sample. For this, a coolant, e.g. liquid nitrogen, flows through a coolant conduit of the holding device ( 22 ), which conduit is furnished with the coolant at the input end ( 31 ) and opens at the output end ( 41 ) into the cooling chamber ( 12 ), which in this fashion is filled with coolant gas.

What is claimed is: 
     
         1 . A system for cooling a sample for processing of the sample in a processing device, comprising:
 a holding device configured to receive a sample for processing via a sample holder;   a cooling chamber including a window, the cooling chamber surrounding the position of the sample mounted on the holding device;   a tool receptacle configured to receive a tool for processing the sample, the tool receptacle being positionable through the window such that it projects into the cooling chamber; and   wherein the holding device is coolable to an adjustable nominal temperature by a fluid coolant, the holding device comprising a coolant conduit through which the fluid coolant can flow, the coolant conduit having an input end configured to supply the fluid coolant and an output end that opens into the cooling chamber.   
     
     
         2 . The system according to  claim 1 , wherein the cooling chamber is configured to hold in its interior a gas atmosphere that is constituted by the coolant and surrounds at least the sample. 
     
     
         3 . The system according to  claim 2 , wherein the cooling chamber comprises, in addition to the window, an opening that is arranged on the upper side of the cooling chamber, while the cooling chamber is otherwise substantially closed off with respect to the environment of the apparatus. 
     
     
         4 . The system according to  claim 1 , wherein the holding device has a temperature control system configured to guide a liquid cryogen in the coolant conduit and evaporate it, and configured to guide only gaseous cryogen into the cooling chamber. 
     
     
         5 . The system according to  claim 4 , further comprising a temperature sensor associated with the temperature control system, the temperature sensor arranged at the output end of the coolant conduit in order to monitor the passage of liquid cryogen. 
     
     
         6 . The system according to  claim 1 , wherein the coolant conduit comprises at the input end a coolant connector configured to be connected to a coolant line of an external coolant vessel. 
     
     
         7 . The system according to  claim 1 , wherein the holding device is arranged on a pivot arm that enables pivoting of the sample around a pivot axis with respect to the tool receptacle. 
     
     
         8 . The system according to  claim 7 , wherein the pivot arm is arranged outside the cooling chamber, and wherein a base of the holding device and/or the sample holder projects through an opening into the cooling chamber. 
     
     
         9 . The system according to  claim 8 , wherein the opening is configured to be closed off by a shield that is pivotable together with the holding device or the sample holder. 
     
     
         10 . The system according to  claim 7 , wherein the coolant conduit comprises at the input end a coolant connector that is configured to be connected to a coolant line and is oriented coaxially with the pivot axis. 
     
     
         11 . The system according to  claim 10 , wherein the pivot arm is held by a joint located to a first side of the cooling chamber, and the coolant connector is arranged on a second side of the cooling chamber, the second side being located opposite the first side. 
     
     
         12 . The system according to  claim 1 , wherein the cooling chamber together with the holding device and pivot arm are detachably mountable as an add-on unit on an apparatus for processing samples, the cooling chamber being detachably connectable to the apparatus via a connection interface, and the window being provided in the connection interface. 
     
     
         13 . An apparatus for processing samples, comprising:
 a holding device configured to receive a sample holder, the sample holder configured to hold a sample to be processed;   an observation device for observing the sample;   a cooling chamber including a window, the cooling chamber surrounding the position of the sample mounted on the holding device;   a tool receptacle in the cooling chamber configured to receive a tool for processing the sample, the tool receptacle being positionable through the window such that it projects into the cooling chamber; and   wherein the holding device is coolable to an adjustable nominal temperature by a fluid coolant, the holding device comprising a coolant conduit through which the fluid coolant can flow and which can be supplied with the coolant at the input end and opens into the cooling chamber at the output end   
     
     
         14 . A method for cooled processing of a sample in an apparatus for processing samples, comprising the steps of:
 receiving a sample to be processed in a sample holder on a holding device of the apparatus, the holding device having a coolant conduit including an input end and an output end which opens into a cooling chamber that surrounds the sample during processing;   cooling the sample via a fluid coolant flowing through the coolant conduit on the holding device; and   processing the sample with at least one tool clamped in the apparatus.   
     
     
         15 . The method according to  claim 14 , wherein after cooling the holding device, the coolant flows into the cooling chamber and creates a cold gas atmosphere therein. 
     
     
         16 . The method according to  claim 14 , wherein the cooling chamber contains a gas atmosphere that is constituted by the coolant and surrounds at least the sample. 
     
     
         17 . The method according to  claim 14 , wherein a liquid cryogen is guided and evaporated in the coolant conduit of the holding device, such that only gaseous cryogen travels into the cooling chamber. 
     
     
         18 . The method according to  claim 14 , wherein the liquid cryogen is liquid nitrogen.