Nanotube Field Effect Devices and Methods of Making Same

Abstract

Methods of making non-volatile field effect devices and arrays of same. Under one embodiment, a method of making a non-volatile field effect device includes providing a substrate with a field effect device formed therein. The field effect device includes a source, drain and gate with a field-modulatable channel between the source and drain. An electromechanically-deflectable, nanotube switching element is formed over the field effect device. Terminals and corresponding interconnect are provided to correspond to each of the source, drain and gate such that the nanotube switching element is electrically positioned between one of the source, drain and gate and its corresponding terminal, and such that the others of said source, drain and gate are directly connected to their corresponding terminals.

What is claimed is: 
     
         1 .  1 . A nanotube field effect device comprising:
 an insulating layer;   a nanotube fabric layer disposed over said insulating layer, said nanotube fabric layering having three distinct regions in spaced relation to one another;   a first conductive element in electrical communication with a first region of said nanotube fabric layer;   a second conductive element in electrical communication with a second region of said nanotube fabric layer; and   a third conductive element positioned in proximity to a third region of said nanotube fabric layer, said third region situated between said first region and said second region.   
     
     
         2 . The nanotube field effect device of  claim 1  wherein an electrical stimuli applied to said third conductive element enables current flow through said nanotube fabric layer. 
     
     
         3 . The nanotube field effect device of  claim 1  wherein said nanotube fabric is a non-woven fabric of nanotubes. 
     
     
         4 . The nanotube field effect device of  claim 3  wherein said non-woven fabric of nanotubes is patterned. 
     
     
         5 . The nanotube field effect device of  claim 3  wherein said nanotubes are carbon nanotubes. 
     
     
         6 . The nanotube field effect device of  claim 1  wherein said third conductive element is positioned above said nanotube fabric layer. 
     
     
         7 . The nanotube field effect device of  claim 1  wherein said third conductive element is positioned below said nanotube fabric layer.