Isothermal heating apparatus

Abstract

An isothermal heating apparatus includes a plate including formed therein a heat pipe circuit in which working fluid is charged, and a heating mechanism heating the working fluid. The heat pipe circuit includes a header portion at which the working fluid is heated and evaporated and a plurality of branch portions in which vapor produced by vaporization of the working fluid exchanges heat with the plate and condensates, the branch portions branching off from the header portion. The heating mechanism is provided on an evaporating surface side of the header portion with which the working fluid is in contact when the heating mechanism heats the working fluid. The isothermal heating apparatus can achieve isothermal heating of a heat-treatment subject and size reduction of the apparatus.

1 . An isothermal heating apparatus comprising:
 a plate having formed therein a heat pipe circuit in which a working fluid is charged; and   heating means heating said working fluid, wherein   said heat pipe circuit includes a header portion at which the working fluid is heated and evaporated and a plurality of branch portions in which vapor produced by vaporization of said working fluid exchanges heat with said plate and condensates, said branch portions branching off from said header portion, and   said heating means is provided on a wall surface side of said header portion with which said working fluid is in contact when said heating means heats said working fluid.   
     
     
         2 . The isothermal heating apparatus according to  claim 1 , wherein
 said plate is formed to have a rectangular shape in plan view,   said header portion extends along one side surface of said plate, and   said branch portions are provided to extend toward an other side surface of said plate opposed to said one side surface.   
     
     
         3 . The isothermal heating apparatus according to  claim 2 , wherein said plurality of branch portions are arranged in parallel to one another. 
     
     
         4 . The isothermal heating apparatus according to  claim 2 , wherein said heat pipe circuit further includes a coupling portion coupling said branch portions. 
     
     
         5 . The isothermal heating apparatus according to  claim 4 , wherein said coupling portion couples tips of said branch portions extending from said header portion. 
     
     
         6 . The isothermal heating apparatus according to  claim 4 , wherein a plurality of said coupling portions are provided and are arranged in parallel to one another. 
     
     
         7 . The isothermal heating apparatus according to  claim 1 , wherein said heating means includes a heater, a heat transfer block formed with a recess and storing said heater in said recess, and a heater holding plate holding said heater in said recess. 
     
     
         8 . The isothermal heating apparatus according to  claim 7 , wherein said heating means includes a fixing member fixing said heater holding plate and said heat transfer block integrally to said plate. 
     
     
         9 . The isothermal heating apparatus according to  claim 7 , comprising a thermally conductive interposed member interposed between said plate and said heat transfer block. 
     
     
         10 . The isothermal heating apparatus according to  claim 7 , wherein said heating means includes a thermally conductive interposed member interposed between said heat transfer block and said heater holding plate. 
     
     
         11 . The isothermal heating apparatus according to  claim 7 , wherein said heating means includes a thermally insulative interposed member interposed between said heat transfer block and said heater holding plate. 
     
     
         12 . The isothermal heating apparatus according to  claim 7 , wherein a hollowed portion storing said heater is formed in said heater holding plate at a position opposed to said recess. 
     
     
         13 . The isothermal heating apparatus according to  claim 1 , wherein a high performance boiling surface promoting boiling of said working fluid is formed in said wall surface. 
     
     
         14 . The isothermal heating apparatus according to  claim 1 , wherein a width by which said heating means is in thermal contact with said plate is less than or equal to a width of said wall surface.