Piezoelectric material and piezoelectric element
Abstract
A piezoelectric element includes a first electrode, a piezoelectric film disposed on the first electrode, and a second electrode disposed on the piezoelectric film. The piezoelectric film is composed of piezoelectric material that is lead free and formed by mixing 100 (1-x) % of material A having a spontaneous polarization of 0.5 C/m2 or greater at 25° C. and 100 x % of material B having piezoelectric characteristics and a dielectric constant of 1000 or greater at 25° C., wherein (1-x) Tc (A)+x Tc (B) >300° C., where Tc (A) is the Curie temperature of the material A and Tc (B) is the Curie temperature of the material B.
Claims
exact text as granted — not AI-modified1 - 9 . (canceled)
10 . A piezoelectric element comprising:
a first electrode; a piezoelectric film disposed on the first electrode; and a second electrode disposed on the piezoelectric film, wherein the piezoelectric film is composed of piezoelectric material that is formed by mixing 100 (1-x) % material A having a spontaneous polarization of 0.5 C/m 2 or greater at 25° C. and 100 x % material B having piezoelectric characteristics and a dielectric constant of 1000 or greater at 25° C., wherein (1-x) Tc (A)+x Tc (B)≧300° C., where Tc (A) is the Curie temperature of the material A and Tc (B) is the Curie temperature of the material B, and; wherein the piezoelectric constant d 33 is 46.5 (pm/V) or higher.
11 . The piezoelectric element according to claim 10 , wherein each of the first electrode and the second electrode is formed from one of metals, one of conductive oxides, or a laminate of layers of plural ones of the metals or the conductive oxides.
12 . The piezoelectric element according to claim 10 , wherein one of the first electrode and the second electrode is formed from any one of or a laminate of layers of selected ones of Pt, Ir, Au, Ti, Zr, Fe, Mn, Ni, Co, IrO 2 , Nb:SrTiO 3 , La:SrTiO 3 , SrRuO 3 , LaNiO 3 , (La, Sr)FeO 3 , and (La, Sr)CoO 3 .
13 . The piezoelectric element according to claim 10 , wherein the first electrode, the piezoelectric material film and the second electrode are formed on a base substrate.
14 . The piezoelectric element according to claim 13 , wherein the base substrate is formed from one of semiconductor material, metal, ceramic and glass.
15 . The piezoelectric element according to claim 13 , wherein the base substrate is made of a material having a melting point or a glass transition point that is 650° C. or higher.
16 . A liquid ejection head comprising the piezoelectric element as claimed in claim 10 .
17 . A liquid ejecting apparatus comprising the liquid ejection head as claimed in claim 16 .Join the waitlist — get patent alerts
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