Composite transducer apparatus and system for processing a substrate and method of constructing the same

Abstract

An apparatus for processing articles with acoustic energy and a method of constructing a transducer that utilizes a composite of piezoelectric pillars. In one embodiment, the invention is a method of constructing a device for generating acoustic energy comprising: providing a layer of supporting material; positioning a piezoelectric material atop the layer of adhesive material; cutting the piezoelectric material into a plurality of pillars so that spaces exist between adjacent pillars; and filling the spaces with a resilient material to form a composite assembly.

What is claimed is: 
     
         1 . An apparatus for processing articles with acoustic energy comprising:
 a transducer assembly comprising:
 a transmitting structure having a concave inner surface and a convex outer surface; 
 a first transducer having a convex bottom surface bonded to the concave inner surface of the transmitting structure; 
 a second transducer having a convex bottom surface bonded to the concave inner surface of the transmitting structure, the second active transducer spaced from the first active transducer so that a non-active acoustic energy area exists on the transmitting structure between the first and second transducers. 
   
     
     
         2 . The apparatus of  claim 1  wherein the first and second transducer are spaced from one another by at least 45 degrees of the concave inner surface. 
     
     
         3 . The apparatus of  claim 1  further comprising:
 a support for supporting an article to be processed; 
 a conduit for applying a fluid to a surface of the article; 
 the transducer assembly positioned adjacent to and opposing the surface of the article so when the fluid is applied to the surface of the article by the conduit, the convex bottom surface of the transmitting structure is fluidly coupled to the surface of the article; and 
 the transducer assembly oriented so that the non-active acoustic area of the transmitting structure faces the surface of the article. 
 
     
     
         4 . The apparatus of claim wherein the support is a rotatable support. 
     
     
         5 . The apparatus of  claim 3  wherein the support is a translational motion support. 
     
     
         6 . The apparatus of  claim 3  wherein the transducer assembly is oriented so that acoustic waves generated by the first and second transducers are propagated at the surface of the article at a non-normal angle that results in reflected acoustic waves traveling away from the transducer assembly. 
     
     
         7 . The apparatus of  claim 1  wherein each of the first and second transducers are formed by a composite assembly comprising a plurality of pillars constructed of a piezoelectric material, the pillars arranged in a spaced-apart manner so that spaces exist between adjacent pillars; the pillars having a width and a height extending between a top surface and a bottom surface, wherein the height of the pillars is greater than the width of the pillars; and the spaces filled with a resilient material so as to form the composite assembly. 
     
     
         8 . A method of constructing a device for generating acoustic energy comprising:
 providing a layer of supporting material;   positioning a piezoelectric material atop the layer of adhesive material;   cutting the piezoelectric material into a plurality of pillars so that spaces exist between adjacent pillars; and   filling the spaces with a resilient material to form a composite assembly.   
     
     
         9 . The method of  claim 8  wherein the pillars have a width and a height, the height being greater than the width. 
     
     
         10 . The method of  claim 8  wherein the height of the pillars is at least twice the width of the pillars. 
     
     
         11 . The method of  claim 8  further comprising:
 applying an electrically conductive material to at least a portion of a top surface of the composite assembly; and 
 applying an electrically conductive material to at least a portion of a bottom surface of the composite assembly. 
 
     
     
         12 . The method of  claim 8  wherein the supporting material is a wax or an adhesive. 
     
     
         13 . The method of  claim 8  further comprising:
 forming the composite assembly so that a bottom surface of the composite assembly has a radius of curvature. 
 
     
     
         14 . The method of  claim 13  further comprising:
 applying an electrically conductive material to at least a portion of a top surface of the composite assembly; and 
 applying an electrically conductive material to at least a portion of the curved bottom surface of the composite assembly. 
 
     
     
         15 . The method of  claim 13  further comprising:
 bonding a transmitting material to the electrically conductive material on the bottom surface of the composite assembly. 
 
     
     
         16 . The method of  claim 15  wherein the transmitting material is sapphire or quartz. 
     
     
         17 . The method of  claim 15  wherein the transmitting material is a polymer film. 
     
     
         18 . The method of  claim 15  wherein the transmitting material has a convex outer surface. 
     
     
         19 . The method of  claim 18  wherein the electrically conductive material applied to the top surface of the composite assembly is two electrically isolated sections separated by a non-active area. 
     
     
         20 . The method of  claim 18  further comprising:
 treating the outer surface of the transmitting material to decrease its surface tension with a fluid. 
 
     
     
         21 . The method of  claim 18  wherein the transmitting material forms an internal cavity in which the composite assembly is located, the method further comprising: filling the internal cavity with a dampening material. 
     
     
         22 . A method of processing an article comprising:
 supporting an article on a support;   providing a transducer assembly comprising:
 a transmitting structure having a concave inner surface and a convex outer surface; 
 a first transducer having a convex bottom surface bonded to the concave inner surface of the transmitting structure; 
 a second transducer having a convex bottom surface bonded to the concave inner surface of the transmitting structure, the second active transducer spaced from the first active transducer so that a non-active acoustic energy area exists on the transmitting structure between the first and second transducers; 
   positioning the transducer assembly adjacent to a surface of the article on the support and in an orientation wherein the non-active acoustic area of the transmitting structure faces the surface of the article;   applying fluid to the surface of the article so that the convex bottom surface of the transmitting structure is fluidly coupled to the surface of the article; and   activating the first and/or second transducers, thereby generating acoustic energy propagated at the surface of the article at a non-normal angle that results in reflected acoustic waves traveling away from the transducer assembly.   
     
     
         23 . The method of  claim 22  wherein each of the first and second transducers are formed by a composite assembly comprising a plurality of pillars constructed of a piezoelectric material, the pillars arranged in a spaced-apart manner so that spaces exist between adjacent pillars; the pillars having a width and a height extending between a top surface and a bottom surface, wherein the height of the pillars is greater than the width of the pillars; and the spaces filled with a resilient material so as to form the composite assembly. 
     
     
         24 . The method of  claim 22  wherein the support is capable of rotation or translation of the article.