Substrate processing apparatus and power source management method

Abstract

A substrate processing apparatus for processing a substrate comprising units for carrying out steps for processing the substrate; ON/OFF switching devices, corresponding to the respective units, switching between an ON state in which electric power is supplied to a corresponding unit and an OFF state in which supply of electric power for the unit is halted; and a control device for acquiring a production information including processing details and an end time limit for a substrate to be introduced into the substrate processing apparatus, preparing a time chart representing an operation scheme for the units based on the production information in a manner such that all of the steps carried out according to the processing details by the units are to be completed by the end time limit, and making the units operate according to the time chart while controlling the ON/OFF switching device according to the time chart.

1 . A substrate processing apparatus for processing a substrate comprising:
 a plurality of units for carrying out steps for processing the substrate;   a plurality of ON/OFF switching devices, corresponding to the respective units, switching between an ON state in which electric power is supplied to a corresponding unit and an OFF state in which supply of electric power for the unit is halted; and   a control device for acquiring a production information including processing details and an end time limit for a substrate to be introduced into the substrate processing apparatus, preparing a time chart representing an operation scheme for the plurality of units based on the production information in a manner such that all of the steps carried out according to the processing details by the plurality of units are to be completed by the end time limit, and making the plurality of units operate according to the time chart while controlling the plurality of ON/OFF switching device according to the time chart.   
     
     
         2 . The substrate processing apparatus according to  claim 1 , wherein the control device controls the plurality of ON/OFF switching device in a manner such that supply of electric power is halted for at least one of the plurality of the units during a non-operating period that is included in an executable period which spans from a time the substrate is introduced into the substrate processing apparatus to the end time limit. 
     
     
         3 . The substrate processing apparatus according to  claim 1 , wherein the control device controls the plurality of ON/OFF switching devices in a manner such that supply of electric power is halted for at least one of the plurality of units in a non-operating condition during an operating period in which at least one of the plurality of units is operated according to the time chart. 
     
     
         4 . The substrate processing apparatus according to  claim 1 , wherein the plurality of units include a plurality of processing units for processing the substrate and the control device prepares the time chart in a manner such that a number of the processing units to be operated is minimized. 
     
     
         5 . The substrate processing apparatus according to  claim 1 , wherein the plurality of units include a processing unit for processing the substrate and a plurality of chemical liquid supply units for supplying chemical liquid to the processing units and the control device prepares the time chart in a manner such that a number of the chemical liquid supply units to be operated is minimized. 
     
     
         6 . The substrate processing apparatus according to  claim 1 , wherein the plurality of units include a processing unit for processing the substrate and a chemical liquid supply unit for supplying chemical liquid to the processing unit, and the control device prepares the time chart in a manner such that a operation start time for the chemical liquid supply unit is scheduled at a time later than a time when the substrate is introduced into the substrate processing apparatus. 
     
     
         7 . The substrate processing apparatus according to  claim 1 , wherein the control device acquires a plurality of product information to prepare a time chart by which a plurality of substrates corresponding to the plurality of production informations are sequentially processed. 
     
     
         8 . The substrate processing apparatus according to  claim 1 , wherein the plurality of units include a plurality of processing units for processing substrate, and the control device includes a counter for counting a number of substrate processing by each of the processing units and prepares a time chart in a manner such that each of the numbers of substrate processing by each of the processing units takes an averaged number. 
     
     
         9 . The substrate processing apparatus according to  claim 1 , further comprising a sensor, detecting malfunction of the substrate processing apparatus and being supplied with electric power on a steady basis. 
     
     
         10 . A power source management method for managing electric power supply for substrate processing apparatus, comprising:
 an acquiring step of acquiring a production information including processing details and an end time limit for a substrate;   a preparing step of preparing a time chart representing an operation scheme for the plurality of units according to the production information in a manner such that all of the steps carried out according to the processing details by the plurality of units is to be completed by the end time limit;   a making step of making the plurality of units operate according to the time chart by the control device; and   a controlling step of controlling a plurality of ON/OFF switching devices, corresponding to the respective units, switching between an ON state in which electric power is supplied to a corresponding unit and an OFF state in which electric power is halted, according to the time chart.