Integrated temperature and humidity control device

Abstract

An integrated temperature and humidity control device includes a temperature and humidity sensing element, a temperature and humidity sensing transmission interface, a computation processing module, a communication interface, and a display interface which are integrated with each other. The device performs local and remote fab temperature and humidity control simultaneously and allows on-site display of temperature and humidity levels at the fab. Accordingly, the device enables convenient simultaneous control and display of temperature and humidity levels and simplifies the layout thereof.

What is claimed is: 
     
         1 . An integrated temperature and humidity control device, controlled by a control console, comprising:
 at least a temperature and humidity sensing element for sensing temperature and humidity and generating at least a temperature and humidity sensing signal;   a temperature and humidity sensing transmission interface connected to the at least a temperature and humidity sensing element for receiving the at least a temperature and humidity sensing signal;   a computation processing module connected to the temperature and humidity sensing transmission interface for receiving the at least a temperature and humidity sensing signal to generate at least a temperature and humidity measurement result;   a communication interface connected to the computation processing module for sending the at least a temperature and humidity measurement result to the control console; and   at least a display interface connected to the computation processing module for displaying the at least a temperature and humidity measurement result.   
     
     
         2 . The integrated temperature and humidity control device of  claim 1 , wherein the control console comprises at least one of a remote host and a local host. 
     
     
         3 . The integrated temperature and humidity control device of  claim 2 , wherein the at least a temperature and humidity sensing element comprises at least one of at least a high-precision temperature and humidity sensing element and at least a low-precision temperature and humidity sensing element, the at least a high-precision temperature and humidity sensing element sensing temperature and humidity and generating at least a high-precision temperature and humidity sensing signal, and the at least a low-precision temperature and humidity sensing element sensing temperature and humidity and generating at least a low-precision temperature and humidity sensing signal. 
     
     
         4 . The integrated temperature and humidity control device of  claim 3 , wherein the temperature and humidity sensing transmission interface comprises at least one of a high-precision temperature and humidity sensing transmission interface and a low-precision temperature and humidity sensing transmission interface, the high-precision temperature and humidity sensing transmission interface connecting to the at least a high-precision temperature and humidity sensing element, communicating with the at least a high-precision temperature and humidity sensing element by two-wire transmission, and receiving the at least a high-precision temperature and humidity sensing signal, and the low-precision temperature and humidity sensing transmission interface connecting to the at least a low-precision temperature and humidity sensing element and receiving the at least a low-precision temperature and humidity sensing signal. 
     
     
         5 . The integrated temperature and humidity control device of  claim 4 , wherein the computation processing module is connected to at least one of the high-precision temperature and humidity sensing transmission interface and the low-precision temperature and humidity sensing transmission interface for receiving the at least a high-precision temperature and humidity sensing signal, computing temperature and humidity levels directly, and generating at least a high-precision temperature and humidity measurement result, and for receiving the at least a low-precision temperature and humidity sensing signal, performing analog-to-digital conversion on the at least a low-precision temperature and humidity sensing signal, computing temperature and humidity levels, and generating at least a low-precision temperature and humidity measurement result. 
     
     
         6 . The integrated temperature and humidity control device of  claim 5 , wherein the communication interface comprises at least one of a first communication interface and a second communication interface, the first communication interface connecting to the computation processing module and transmitting the at least a high-precision temperature and humidity measurement result and the at least a low-precision temperature and humidity measurement result to the remote host by Ethernet, and the second communication interface connecting to the computation processing module and transmitting the at least a high-precision temperature and humidity measurement result and the at least a low-precision temperature and humidity measurement result to the local host via a RS232 interface. 
     
     
         7 . The integrated temperature and humidity control device of  claim 5 , further comprising a storage unit connected to the computation processing module and adapted to receive and store the at least a high-precision temperature and humidity measurement result and the at least a low-precision temperature and humidity measurement result. 
     
     
         8 . The integrated temperature and humidity control device of  claim 5 , wherein one of the high-precision temperature and humidity measurement result and the low-precision temperature and humidity measurement result is processed by a programmable logic device (PLD) in the computation processing module and then sent to the display interface for display. 
     
     
         9 . The integrated temperature and humidity control device of  claim 6 , wherein one of the high-precision temperature and humidity measurement result and the low-precision temperature and humidity measurement result is processed by a driving circuit of a universal asynchronous receiver/transmitter (UART) in the computation processing module and then sent to the local host via the second communication interface. 
     
     
         10 . The integrated temperature and humidity control device of  claim 5 , wherein the at least a high-precision temperature and humidity measurement result and the at least a low-precision temperature and humidity measurement result are selectively read by the remote control console and the local control console such that, in case of an abnormal measurement result, at least one of the remote control console and the local control console issue an adjustment control signal for adjusting temperature and humidity. 
     
     
         11 . The integrated temperature and humidity control device of  claim 3 , wherein the at least a low-precision temperature and humidity sensing element calculates a measured temperature level according to an intrinsic impedance level and calculates a measured humidity level according to an output voltage level. 
     
     
         12 . The integrated temperature and humidity control device of  claim 4 , wherein the temperature and humidity sensing transmission interface effectuates data latch by one of a clock signal and a data signal.