Wafer box and photo mask box

Abstract

A check valve disposed inside a semiconductor device container. The check valve includes a cylinder and a check component. With opening and closing of the check component that is elastic, particles are minimized to prevent polluting objects stored in the semiconductor device container.

What is claimed is: 
     
         1 . A wafer box comprising a box body, an opening formed in a lateral surface of the box body, and a door body engaged to the opening for forming a container space for storing a wafer, which is characterized in that:
 at least one pair of check valves disposed inside the box body, each check valve comprising a cylinder and a check component, the cylinder being a hollow cylinder and the check component being disposed inside the cylinder, wherein the check component comprises:   a circular dome body having an uplifted top and a circular bottom; and   at least one cutting line extending from a center of the uplifted top to the circular bottom.   
     
     
         2 . The wafer box of  claim 1  further comprising a filter membrane disposed inside the cylinder of the check valve. 
     
     
         3 . The wafer box of  claim 1 , wherein the check valve is disposed at a bottom inside the box body. 
     
     
         4 . The wafer box of  claim 1 , wherein the pair of check valves comprises a gas exhausting check valve and a gas filling check valve. 
     
     
         5 . The wafer box of  claim 1 , wherein the circular dome has a thickness. 
     
     
         6 . The wafer box of  claim 1  further comprising a circular ring surrounding the circular bottom. 
     
     
         7 . The wafer box of  claim 1 , wherein the at least one cutting line is multiple cutting lines and is set symmetrically to each other for each two of the cutting lines. 
     
     
         8 . The wafer box of  claim 1 , wherein each of the check valves is an elastic material. 
     
     
         9 . The wafer box of  claim 8 , wherein the elastic material is fluoroelastomer, silicone or rubber. 
     
     
         10 . A photo mask box comprising an upper cover and a bottom cover, the upper cover being engaged with the bottom cover to form a container space for storing a photo mask, which is characterized in that:
 at least one pair of check valves is configured, each check valve comprising a cylinder and a check component, the cylinder being a hollow cylinder and the check component being disposed inside the cylinder, wherein the check component comprises:   a circular dome body having an uplifted top and a circular bottom; and   at least one cutting line extended from a center of the uplifted top to the circular bottom.   
     
     
         11 . The photo mask box of  claim 10 , wherein each of the check valves further comprises a filter membrane disposed inside the cylinder of the check valve. 
     
     
         12 . The photo mask box of  claim 10 , wherein the check valve is disposed inside the bottom cover. 
     
     
         13 . The photo mask box of  claim 10 , wherein the pair of check valves includes a gas exhausting valve and a gas filling valve. 
     
     
         14 . The photo mask box of  claim 10 , wherein the circular dome body has a thickness. 
     
     
         15 . The photo mask box of  claim 10 , further comprising a circular ring surrounding the circular bottom. 
     
     
         16 . The photo mask box of  claim 10 , wherein the at least one cutting lines comprises multiple cutting lines and is set symmetrically to each other for each two of the cutting lines. 
     
     
         17 . The photo mask box of  claim 10 , wherein each of the check valves is an elastic material. 
     
     
         18 . The photo mask box of  claim 17 , wherein the elastic material is fluoroelastomer, silicone or rubber.