Vacuum pump control device and vacuum pump

Abstract

An object of the present invention is to improve, using a simple configuration, heat dissipation of a regenerative resistor that is disposed in a vacuum pump control device (controller) connected to a vacuum pump. The regenerative resistor disposed in the vacuum pump control device is stored in an aluminum die-cast casing. More concretely, a housing of the vacuum pump control device is prepared by aluminum die casting (metal mold casting). A regenerative resistor storing portion (aluminum die-cast casing) provided with a hollow portion is provided on a top panel of the aluminum die cast, the hollow portion being designed to have a size accommodating the entire regenerative resistor. The regenerative resistor is fitted into the hollow portion, and an opening section of the hollow portion is sealed with an aluminum sheet of the same material as that of the casing. In this manner, the regenerative resistor can removably be stored in the aluminum die-cast casing.

What is claimed is: 
     
         1 . A vacuum pump control device for controlling a vacuum pump main body, the vacuum pump control device comprising:
 a housing in which a control circuit for controlling the vacuum pump main body is disposed;   a regenerative resistor storing portion that is provided in the housing, and has a hollow portion into which is inserted a regenerative resistor consuming regenerative energy, and a regenerative resistor fixture for fixing the regenerative resistor; and   a cooling mechanism for cooling the regenerative resistor storing portion.   
     
     
         2 . The vacuum pump control device according to  claim 1 , wherein the regenerative resistor storing portion is produced by a casting process. 
     
     
         3 . The vacuum pump control device according to  claim 1  or  2 , wherein the regenerative resistor storing portion is positioned away from a side surface sandwiched between a surface of the housing on which the control circuit is disposed and a surface of the housing on which the regenerative resistor storing portion is provided. 
     
     
         4 . The vacuum pump control device according to any one of  claims 1  to  3 , wherein the regenerative resistor is stored in a regenerative resistor storing tool having an outer circumferential surface fitted into an inner circumference of the hollow portion, and is then inserted into the hollow portion. 
     
     
         5 . The vacuum pump control device according to  claim 4 , wherein between the inner circumference of the hollow portion and the regenerative resistor storing tool inserted thereto, a clearance is provided in advance for accommodating the regenerative resistor that expands when the regenerative resistor generates heat. 
     
     
         6 . A vacuum pump comprising:
 the vacuum pump main body including a gas transfer mechanism for transferring a gas from an inlet port to an outlet port; and   the vacuum pump control device according to any one of  claims 1  to  5 .