Method for shrinking linewidth of extreme dimension

Abstract

A method for shrinking a linewidth on a substrate includes the steps of applying a stretching force on the substrate, defining a line on a top surface of the substrate and releasing the applied stretching force. The applied force is executed by mechanical stretching or thermal expansion and has a direction parallel to the line.

What is claimed is: 
     
         1 . A method for shrinking a linewidth on a substrate, the method comprising the steps of:
 applying a stretching force on the substrate;   defining a line on a top surface of the substrate; and   releasing the applied stretching force.   
     
     
         2 . The method as claimed in  claim 1 , wherein the line is defined by metal electrodeposition. 
     
     
         3 . The method as claimed in  claim 1 , wherein the applied force is executed by mechanical stretching or thermal expansion. 
     
     
         4 . The method as claimed in  claim 1 , wherein a material for the substrate is polymer or glass. 
     
     
         5 . The method as claimed in  claim 1 , wherein direction of the stretching force is parallel to the line. 
     
     
         6 . A method for shrinking a linewidth on a substrate, the method comprising the steps of:
 defining a line on the substrate; and   applying a stretching force to the substrate.   
     
     
         7 . The method as claimed in  claim 6 , wherein line is defined by metal electrodeposition. 
     
     
         8 . The method as claimed in  claim 6 , wherein the stretching force is mechanical force or heat expansion. 
     
     
         9 . The method as claimed in  claim 6 , a material for the substrate is polymer or glass. 
     
     
         10 . The method as claimed in  claim 6 , wherein direction of the stretching force is vertical to the line.