High-pressure vessel for growing group iii nitride crystals and method of growing group iii nitride crystals using high-pressure vessel and group iii nitride crystal

Abstract

Present invention discloses a high-pressure vessel of large size formed with a limited size of e.g. Ni—Cr based precipitation hardenable superalloy. Vessel may have multiple zones. For instance, the high-pressure vessel may be divided into at least three regions with flow-restricting devices and the crystallization region is set higher temperature than other regions. This structure helps to reliably seal both ends of the high-pressure vessel, at the same time, may help to greatly reduce unfavorable precipitation of group III nitride at the bottom of the vessel. Invention also discloses novel procedures to grow crystals with improved purity, transparency and structural quality. Alkali metal-containing mineralizers are charged with minimum exposure to oxygen and moisture until the high-pressure vessel is filled with ammonia. Several methods to reduce oxygen contamination during the process steps are presented. Back etching of seed crystals and a new temperature ramping scheme to improve structural quality are disclosed.

What is claimed is: 
     
         1 . An article comprising
 a. a mineralizer comprising an element that aids in ammonothermal growth of a group III-nitride crystal in a high-pressure reactor; and   b. a covering upon the mineralizer that prevents oxygen from contaminating the mineralizer, said covering being compatible with the ammonothermal growth of the group III-nitride crystal.   
     
     
         2 . An article according to  claim 1  wherein the mineralizer comprises an alkali metal mineralizer. 
     
     
         3 . An article according to  claim 2  wherein the alkali metal mineralizer comprises at least one of Na, Li, and K. 
     
     
         4 . An article according to  claim 2  wherein the covering encapsulates the mineralizer and is oxygen- and water-impermeable. 
     
     
         5 . An article according to  claim 2  wherein the covering releases the mineralizer while the high-pressure vessel is self-pressurized by heating. 
     
     
         6 . An article according to  claim 1  wherein the mineralizer comprises Na. 
     
     
         7 . An article according to  claim 6  wherein the mineralizer comprises NaNH 2 . 
     
     
         8 . An article according to  claim 6  wherein the mineralizer comprises elemental Na. 
     
     
         9 . An article according to  claim 1  wherein the covering comprises a metal layer. 
     
     
         10 . An article according to  claim 9  wherein the metal layer comprises a metal foil. 
     
     
         11 . An article according to  claim 9  wherein the metal layer encapsulates the mineralizer. 
     
     
         12 . An article according to  claim 9  wherein the metal comprises nickel. 
     
     
         13 . An article according to  claim 1  wherein the covering comprises a container. 
     
     
         14 . An article according to  claim 13  wherein the article was formed by a method of pouring molten mineralizer into the container and solidifying the molten mineralizer. 
     
     
         15 . An article according to  claim 14  wherein a top surface of the mineralizer is covered with a foil. 
     
     
         16 . An article according to  claim 13  wherein the container has a yield strength that is exceeded at group III-nitride crystal ammonothermal growth conditions. 
     
     
         17 . An article according to  claim 13  wherein the container ruptures as the high-pressure reactor attains conditions for ammonothermal growth of the group III-nitride crystal. 
     
     
         18 . An article according to  claim 1  and additionally comprising an oxygen getter accompanying the mineralizer. 
     
     
         19 . An article according to  claim 1  wherein the covering encapsulates the mineralizer and is oxygen- and water-impermeable. 
     
     
         20 . An article according to  claim 1  wherein the covering releases the mineralizer while the high-pressure vessel is self-pressurized by heating. 
     
     
         21 . An article according to  claim 1  wherein the covering comprises a metal which is stable in supercritical ammonia.