Device for supplying slurry for semiconductor, provided with pipe clogging prevention means

Abstract

Disclosed is a device for supplying slurry for semiconductor in a polishing process when the semiconductor is manufactured. The slurry supply apparatus includes: a storage tank in which the slurry is stored; a plurality of pressure vessels connected to the storage tank, respectively, for receiving the slurry from the storage tank and discharging the slurry to the outside; an aspiration unit connected to the pressure vessels, for generating a vacuum pressure in the pressure vessels; and a centrifugal separation unit installed in a connection line of the aspiration unit between the pressure vessels and the aspiration unit, for separating foreign substances contained in the introduced compressed air from the compressed air by using a centrifugal force.

1 . A device for supplying slurry for semiconductor in a polishing process when the semiconductor is manufactured, the device comprising:
 a storage tank in which the slurry is stored;   a plurality of pressure vessels connected to the storage tank, respectively, for receiving the slurry from the storage tank and discharging the slurry to the outside;   an aspiration unit connected to the pressure vessels, for generating a vacuum pressure in the pressure vessels; and   a centrifugal separation unit installed in a connection line of the aspiration unit between the pressure vessels and the aspiration unit, for separating foreign substances contained in the introduced compressed air from the compressed air by using a centrifugal force.   
     
     
         2 . The device of  claim 1 , wherein the centrifugal separation unit corresponds to a cylindrical tubular body in which a suction port connected to the pressure vessels is formed on a side surface thereof and an exhaust port is formed perpendicular to the suction port such that the compressed air introduced into the suction port forms vortices in the tubular body to separate heavy slurry from the compressed air by using a centrifugal force. 
     
     
         3 . The device of  claim 2 , wherein the tubular body is formed such that a diameter thereof becomes smaller downward, and a slurry storage box for storing the centrifugally separated slurry is provided at a lower portion of the tubular body.