US2013230703A1PendingUtilityA1

Nanotube network and method of fabricating the same

Assignee: UNIV RAMOTPriority: May 30, 2007Filed: Mar 24, 2013Published: Sep 5, 2013
Est. expiryMay 30, 2027(~0.8 yrs left)· nominal 20-yr term from priority
B32B 38/0004H10K 85/221B81C 2201/0191B32B 2309/08C01B 32/16B82B 3/00H01J 9/025B81C 99/009G03F 7/0002B32B 38/06B82Y 10/00B82Y 30/00Y10T428/24802Y10T428/24612B82Y 40/00Y10S977/842Y10S977/932H05K 13/00C01B 31/0226
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Claims

Abstract

A stamping device for stamping a nanotube network onto a target substrate is disclosed. The device comprises a template structure having a support structure formed on or attached to a substrate, and a plurality of nanotubes being supported by the support structure and engaging a plane which is spatially separated from the substrate.

Claims

exact text as granted — not AI-modified
What is claimed is: 
     
         1 . A nanotube network, comprising:
 a plurality of spatially separated pillars arranged generally perpendicularly to a substrate, each pillar having a proximal surface and a distal surface relative to said substrate, wherein the distal surfaces of said pillars define a plane being spatially separated from said substrate; and   a plurality of nanotubes, supported by said pillars to engage said plane.   
     
     
         2 . The nanotube network of  claim 1 , wherein at least one pillar supports an intersection of at least two non-parallel nanotubes. 
     
     
         3 . The nanotube network of  claim 1 , wherein said spatially separated pillars are arranged in two-dimensional arrangement such that at least three pillars are not aligned along a single straight line. 
     
     
         4 . The nanotube network of  claim 1 , being associated with a nanotube characteristics map identifying each nanotube according to a location and at least one characteristic selected from the group consisting of a characteristic diameter and a characteristic chirality. 
     
     
         5 . A method of fabricating a nanotube network, comprising:
 forming a template structure having a support structure formed on or attached to a substrate, said support structure having a plurality of spatially separated pillars arranged generally perpendicularly to a substrate, each pillar having a proximal surface and a distal surface relative to said substrate, wherein the distal surfaces of said pillars define a plane being spatially separated from said substrate; and   growing a plurality of nanotubes on said template structure such that said nanotubes are detachably supported by said support structure to engage said plane.   
     
     
         6 . The method of  claim 5 , wherein at least one pillar supports an intersection of at least two non-parallel nanotubes. 
     
     
         7 . The method of  claim 5 , further comprising transferring said nanotubes from said template structure to a target substrate. 
     
     
         8 . The method of  claim 7 , wherein said transferring of said nanotubes is by stamping. 
     
     
         9 . The method of  claim 5 , further comprising analyzing said nanotubes, so as to map at least one of: characteristic diameters and characteristic chiralities of said nanotubes. 
     
     
         10 . A method of fabricating a nanotube network on a target substrate, comprising:
 providing a template structure having a support structure formed on or attached to a substrate, said support structure having:   a plurality of spatially separated pillars arranged generally perpendicularly to a substrate, each pillar having a proximal surface and a distal surface relative to said substrate, wherein the distal surfaces of said pillars define a plane being spatially separated from said substrate; and   a plurality of nanotubes, supported by said pillars to engage said plane; and   contacting said stamping device and the target substrate so as to transfer said nanotubes from said template structure to a target substrate.   
     
     
         11 . The method of  claim 10 , wherein at least one pillar supports an intersection of at least two non-parallel nanotubes. 
     
     
         12 . A method of fabricating a microelectronic device, comprising executing the method of  claim 10  and forming on the target substrate a plurality of electrical contacts contacting at least a few of said nanotubes, thereby fabricating the microelectronic device. 
     
     
         13 . The method of  claim 12 , wherein at least a few of said nanotubes are arranged to serve as interconnecting conductors in said microelectronic device. 
     
     
         14 . The method of  claim 12 , wherein at least a few of said nanotubes are arranged to serve as active nanoelectronic devices in said microelectronic device. 
     
     
         15 . The method of  claim 14 , wherein said active nanoelectronic devices comprise at least one device selected from the group consisting of a diode, a transistor, a supercapacitor, a light emitter, and an electron emitter. 
     
     
         16 . The method of  claim 12 , wherein said microelectronic device is constituted for emitting light. 
     
     
         17 . The method of  claim 12 , wherein said microelectronic device is constituted as a detection device. 
     
     
         18 . The method of  claim 12 , wherein said microelectronic device is constituted as micro-fluidic flow sensing device. 
     
     
         19 . The method of  claim 12 , wherein said microelectronic device is constituted as a memory medium. 
     
     
         20 . The method of  claim 12 , wherein said microelectronic device is constituted as a field emission cathode.

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