US2013230703A1PendingUtilityA1
Nanotube network and method of fabricating the same
Est. expiryMay 30, 2027(~0.8 yrs left)· nominal 20-yr term from priority
B32B 38/0004H10K 85/221B81C 2201/0191B32B 2309/08C01B 32/16B82B 3/00H01J 9/025B81C 99/009G03F 7/0002B32B 38/06B82Y 10/00B82Y 30/00Y10T428/24802Y10T428/24612B82Y 40/00Y10S977/842Y10S977/932H05K 13/00C01B 31/0226
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Claims
Abstract
A stamping device for stamping a nanotube network onto a target substrate is disclosed. The device comprises a template structure having a support structure formed on or attached to a substrate, and a plurality of nanotubes being supported by the support structure and engaging a plane which is spatially separated from the substrate.
Claims
exact text as granted — not AI-modifiedWhat is claimed is:
1 . A nanotube network, comprising:
a plurality of spatially separated pillars arranged generally perpendicularly to a substrate, each pillar having a proximal surface and a distal surface relative to said substrate, wherein the distal surfaces of said pillars define a plane being spatially separated from said substrate; and a plurality of nanotubes, supported by said pillars to engage said plane.
2 . The nanotube network of claim 1 , wherein at least one pillar supports an intersection of at least two non-parallel nanotubes.
3 . The nanotube network of claim 1 , wherein said spatially separated pillars are arranged in two-dimensional arrangement such that at least three pillars are not aligned along a single straight line.
4 . The nanotube network of claim 1 , being associated with a nanotube characteristics map identifying each nanotube according to a location and at least one characteristic selected from the group consisting of a characteristic diameter and a characteristic chirality.
5 . A method of fabricating a nanotube network, comprising:
forming a template structure having a support structure formed on or attached to a substrate, said support structure having a plurality of spatially separated pillars arranged generally perpendicularly to a substrate, each pillar having a proximal surface and a distal surface relative to said substrate, wherein the distal surfaces of said pillars define a plane being spatially separated from said substrate; and growing a plurality of nanotubes on said template structure such that said nanotubes are detachably supported by said support structure to engage said plane.
6 . The method of claim 5 , wherein at least one pillar supports an intersection of at least two non-parallel nanotubes.
7 . The method of claim 5 , further comprising transferring said nanotubes from said template structure to a target substrate.
8 . The method of claim 7 , wherein said transferring of said nanotubes is by stamping.
9 . The method of claim 5 , further comprising analyzing said nanotubes, so as to map at least one of: characteristic diameters and characteristic chiralities of said nanotubes.
10 . A method of fabricating a nanotube network on a target substrate, comprising:
providing a template structure having a support structure formed on or attached to a substrate, said support structure having: a plurality of spatially separated pillars arranged generally perpendicularly to a substrate, each pillar having a proximal surface and a distal surface relative to said substrate, wherein the distal surfaces of said pillars define a plane being spatially separated from said substrate; and a plurality of nanotubes, supported by said pillars to engage said plane; and contacting said stamping device and the target substrate so as to transfer said nanotubes from said template structure to a target substrate.
11 . The method of claim 10 , wherein at least one pillar supports an intersection of at least two non-parallel nanotubes.
12 . A method of fabricating a microelectronic device, comprising executing the method of claim 10 and forming on the target substrate a plurality of electrical contacts contacting at least a few of said nanotubes, thereby fabricating the microelectronic device.
13 . The method of claim 12 , wherein at least a few of said nanotubes are arranged to serve as interconnecting conductors in said microelectronic device.
14 . The method of claim 12 , wherein at least a few of said nanotubes are arranged to serve as active nanoelectronic devices in said microelectronic device.
15 . The method of claim 14 , wherein said active nanoelectronic devices comprise at least one device selected from the group consisting of a diode, a transistor, a supercapacitor, a light emitter, and an electron emitter.
16 . The method of claim 12 , wherein said microelectronic device is constituted for emitting light.
17 . The method of claim 12 , wherein said microelectronic device is constituted as a detection device.
18 . The method of claim 12 , wherein said microelectronic device is constituted as micro-fluidic flow sensing device.
19 . The method of claim 12 , wherein said microelectronic device is constituted as a memory medium.
20 . The method of claim 12 , wherein said microelectronic device is constituted as a field emission cathode.Join the waitlist — get patent alerts
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