US2013264010A1PendingUtilityA1
PCB Droplet Actuator Fabrication
Est. expiryAug 9, 2027(~1.1 yrs left)· nominal 20-yr term from priority
B01L 3/502707H05K 3/4038B01L 3/502792H05K 2201/09527H05K 3/427Y10T29/49165H05K 1/113Y10T29/49155H05K 3/0058H05K 3/0067B01L 2400/0427Y10T156/10H05K 3/28B01L 2300/089Y10T29/49124H05K 3/421B01L 3/502784B01L 2300/12
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Claims
Abstract
Alternative approaches to fabricating printed circuit boards for use in droplet actuator operations are provided. In one embodiment, a method of manufacturing a droplet actuator for conducting droplet operations includes positioning a dielectric material between a first metal layer configured to include an electrode and a second metal layer configured to include an interconnect pad. The method additionally includes forming a connection between the first and second metal layers. Droplet actuators and methods of fabricating and supporting printed circuit boards of droplet actuators are also provided.
Claims
exact text as granted — not AI-modifiedWe claim:
1 . A method of manufacturing a droplet actuator for conducting droplet operations, the method comprising:
(a) positioning a dielectric material between a first metal layer configured to include an electrode and a second metal layer configured to include an interconnect pad; and (b) forming a connection between the first and second metal layers.
2 . The method of claim 1 further comprising applying a photoresist layer onto the first metal layer.
3 . The method of claim 1 further comprising stripping a photoresist layer from the first metal layer.
4 . The method of claim 1 , wherein forming the connection further comprises forming a via connection between the first and second metal layers.
5 . The method of claim 1 , wherein forming the connection further comprises forming an opening through both the dielectric material and the second metal layer through to the first metal layer.
6 . The method of claim 5 further comprising applying a photoresist layer onto the second metal layer in such a manner as to leave the opening exposed.
7 . The method of claim 6 further comprising applying a metal plating into the opening to form the connection.
8 . The method of claim 7 further comprising stripping the photoresist layer from the second metal layer.
9 . The method of claim 1 further comprising forming the electrode from the first metal layer.
10 . The method of claim 1 further comprising forming the interconnect pad from the second metal layer.
11 . The method of claim 1 further comprising laminating a rigid structure onto the second metal layer using a bonding layer.
12 . The method of claim 1 further comprising attaching a rigid structure onto the second metal layer.
13 . The method of claim 12 , wherein attaching the rigid structure further comprises attaching a glass structure to the second metal layer.
14 . The method of claim 1 further comprising applying an electrowetting layer onto the first metal layer.
15 . The method of claim 14 , wherein applying the electrowetting layer to the first metal layer further comprises applying a dielectric substance onto the first metal layer.
16 . The method of claim 14 , wherein applying the electrowetting layer onto the first metal layer further comprises applying at least one of a liquid photoimageable soldermask and a non-florescent material onto the first metal layer.
17 . The method of claim 1 further comprising applying a photoresist layer onto the second metal layer.
18 . The method of claim 1 further comprising stripping a photoresist layer from the second metal layer.
19 . The method of claim 1 further comprising forming the dielectric material from non-florescent material.
20 . The method of claim 1 further comprising positioning a first plate proximate a second plate comprising the first and second metal layers, the dielectric material and the connection to form a gap between the two plates that provides a fluid flow path for a droplet operations.
21 . The method of 20 further comprising forming the first plate.
22 . A droplet actuator for conducting droplet operations, comprising:
(a) a first plate that includes:
(i) a first metal layer comprising an electrode;
(ii) a second metal layer comprising an interconnect pad;
(iii) a dielectric material positioned between the first and second metal layers; and
(iv) a via connecting the electrode to the interconnect; and
(b) a second plate proximate the first plate and forming a gap therebetween that provides a fluid flow path for the droplet operations.
23 . The droplet actuator of claim 22 further comprising an electrowetting layer positioned on at least one of the first and second metal layers proximate the gap.
24 . The droplet actuator of claim 22 , wherein the via comprises metal applied in a hole formed through the second metal layer and the dielectric material.
25 . The droplet actuator of claim 24 , further comprising a photoresist layer protecting the second metal layer from the applied metal.
26 . A method of fabricating and supporting a printed circuit board of a droplet actuator for conducting droplet operations, the method comprising:
(a) providing a core printed circuit board by positioning a dielectric material between a first metal layer configured to include an electrode and a second metal layer configured to include an interconnect pad; (b) applying a photoresist layer onto the first metal layer and forming one or more openings in the dielectric material and the second metal layer; (c) applying a photoresist layer onto the second metal layer and plating the one or more openings to form one or more blind vias, thereby forming a connection between the first and second metal layers; (d) stripping the photoresist layer from both the first metal layer and the second metal layer; (e) patterning the features on both the first metal layer and the second metal layer; (f) applying an electrowetting dielectric layer to the first metal layer; and (g) bonding a rigid support structure to the second metal layer.Cited by (0)
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