Guided non-line of sight coating

Abstract

A method and apparatus for applying a vapor deposition coating onto a substrate with a non line of sight or limited line of sight is disclosed. A vapor stream is provided in a chamber that is below atmospheric pressure. The vapor stream is impinged with a working gas that provides a flow that transports the vapor stream. The flow of the working gas is modified with a physical object that directs the flow to achieve a desired coating on the substrate.

1 . An apparatus for applying at least one coating on a substrate, the apparatus comprising:
 a chamber, wherein the chamber has an operating pressure below atmospheric pressure, wherein the substrate is present in the chamber;   an evaporant source disposed in the chamber;   a beam generator for producing a beam that impinges the evaporant source to generate an evaporated vapor cloud in the chamber;   a carrier gas stream source for introducing a carrier gas into the chamber that transports the evaporated vapor cloud to coat the substrate; and   a physical flow disrupting object that modifies a flow of the carrier gas to direct the deposition of the evaporated vapor cloud in a desired pattern on the substrate.   
     
     
         2 . The apparatus of  claim 1  further comprising:
 a fixture for positioning the substrate in the chamber. 
 
     
     
         3 . The apparatus of  claim 2  wherein the fixture contains the physical flow disrupting object. 
     
     
         4 . The apparatus of  claim 1  wherein the physical flow disrupting object has openings for exhausting or introducing a portion of the carrier gas. 
     
     
         5 . The apparatus of  claim 1  wherein the physical flow disrupting object prevents the evaporated vapor cloud from coating an area of the substrate. 
     
     
         6 . The apparatus of  1  wherein the physical flow disrupting object enhances the evaporated vapor cloud in coating an area of the substrate. 
     
     
         7 . The apparatus of  claim 1  wherein the physical flow disrupting object is magnetized, charged, ionized, heated, or cooled.