Transport Method and Transport Apparatus

Abstract

Provided is a transport method comprising judging whether there is a possibility that misalignment greater than or equal to a threshold value occurs between substrates to be layered that are held by a pair of substrate holders aligned and stacked by an aligning section, the misalignment occurring when the pair of substrate holders is transported from the aligning section to a pressure applying section; and if the judgment indicates that there is the possibility of misalignment, transporting the pair of substrate holders to a region other than the pressure applying section. Whether there is the possibility of misalignment may be judged based on acceleration of the substrate holders. Whether there is the possibility of misalignment may be judged based on acceleration of a transporting section that transports the substrate holders. Whether there is the possibility of misalignment may be judged based on relative positions of the substrate holders. Whether there is the possibility of misalignment may be judged based on relative positions of (i) a transporting section that transports the pair of substrate holders and (ii) one of the pair of substrate holders.

1 - 26 . (canceled) 
     
     
         27 . A method comprising:
 detecting a possibility of misalignment between a plurality of layered substrates during a transporting period.   
     
     
         28 . The method of  claim 27 , wherein the detecting during the transport period includes detecting during a period from when the plurality of layered substrates have completed alignment by an aligning section until an operation of one of applying pressure to and heating the plurality of layered substrates. 
     
     
         29 . The method of  claim 27 , further comprising judging whether a misalignment between the plurality of layered substrates has occurred based on the possibility of misalignment. 
     
     
         30 . The method of  claim 29 , further comprising:
 transporting the plurality of layered substrates to a region other than a pressure applying section when the misalignment has occurred; and   transporting the plurality of layered substrates to the pressure applying section when the misalignment has not occurred.   
     
     
         31 . The method of  claim 29 , wherein the judging is based on a relative position between at least two of the plurality of layered substrates, a first substrate holder that holds the plurality of layered substrates, a second substrate holder that holds the plurality of layered substrates, and a transporting section that transports the plurality of layered substrates. 
     
     
         32 . The method of  claim 29 , wherein the judgment is based on whether the possibility of misalignment is greater than or equal to a threshold value. 
     
     
         33 . The method of  claim 32 , wherein the judging is based on an acceleration of at least one of the plurality of layered substrates, a substrate holder that holds the plurality of layered substrates, and a transporting section that transports the plurality of layered substrates. 
     
     
         34 . An apparatus comprising:
 a control section operable to detect a possibility of misalignment between a plurality of layered substrates during a transporting period.   
     
     
         35 . The apparatus of  claim 34 , wherein the transport period includes a period from when the plurality of layered substrates have completed alignment by an aligning section until an operation of one of applying pressure to and heating the plurality of layered substrates. 
     
     
         36 . The apparatus of  claim 34 , wherein the control section is further operable to judge whether a misalignment between the plurality of layered substrates has occurred based on the possibility of misalignment. 
     
     
         37 . The apparatus of  claim 36 , further comprising a transporting section operable to transport the plurality of layered substrates to a region other than a pressure applying section when the misalignment has occurred, and transport the substrate holder to the pressure applying section when the misalignment has not occurred. 
     
     
         38 . The apparatus of  claim 36 , wherein the control section is further operable to judge based on a relative position between at least two of the plurality of layered substrates, a first substrate holder which holds the plurality of layered substrates, a second substrate holder which holds the plurality of layered substrates, and a transporting section which transports the plurality of layered substrates. 
     
     
         39 . The apparatus of  claim 38 , further comprising a gap sensor mounted on at least one of the first substrate holder, the second substrate holder, and the transporting section, the gap sensor operable to detect the relative position. 
     
     
         40 . The apparatus or  claim 36 , wherein the control section is further operable to judge based on whether the possibility of misalignment is greater than or equal to a threshold value. 
     
     
         41 . The apparatus of  claim 40 , further comprising:
 a servo control section in communication with the control section, the servo control section including an encoder operable to detect an acceleration of at least one of the plurality of layered substrates and a substrate holder which holds the plurality of substrates,   wherein the control section is further operable to judge based on the acceleration.   
     
     
         42 . The apparatus of  claim 40 , further comprising:
 an acceleration sensor mounted on at least one of a substrate holder which holds the plurality of substrates and a transporting section which transports the plurality of layered substrates, the acceleration sensor operable to detect an acceleration,   wherein the control section is further operable to judge based on the acceleration.   
     
     
         43 . A non-transitory computer-readable medium having instructions stored thereon which, when executed by at least one processor, cause the at least one processor to perform operations comprising:
 detecting a possibility of misalignment between a plurality of layered substrates during a transporting period.   
     
     
         44 . The computer-readable medium of  claim 43 , wherein the operation of detecting during the transport period includes detecting during a period from when the plurality of layered substrates have completed alignment by an aligning section until an operation of one of applying pressure to and heating the plurality of layered substrates. 
     
     
         45 . The computer-readable medium of  claim 43 , further comprising an instruction that, when executed by the at least one processor, causes the at least one processor to perform a further operation of judging whether a misalignment between the plurality of layered substrates has occurred based on the possibility of misalignment. 
     
     
         46 . The computer-readable medium of  claim 45 , further comprising instructions that, when executed by the at least one processor, cause the at least one processor to perform further operations of:
 transporting the plurality of layered substrates to a region other than a pressure applying section when the misalignment has occurred; and   transporting the plurality of layered substrates to the pressure applying section when the misalignment has not occurred.