Deposition device, and collection device

Abstract

A Film ( 7 ) is provided on at least a part of a surface of each of a vapor deposition preventing plate ( 3 ) and a shutter ( 4 ) of a vacuum chamber ( 5 ) on which surface vapor deposition particles are vapor-deposited, the film ( 7 ) being provided so as to be peeled off from the each of the vapor deposition preventing plate ( 3 ) and the shutter ( 4 ), and the film being made of a material differing in at least one of a melting point, a sublimation point, solubility in a given solvent, microbial biodegradability, and photodegradability from a material of which a vapor-deposited film that is formed on the film ( 7 ) is made.

1 . A vapor deposition device comprising:
 a vapor deposition chamber in which vapor deposition particles released from a vapor deposition source are vapor-deposited on a substrate,   the vapor deposition particles being vapor-deposited on the substrate when released from the vapor deposition source in a first direction during a first period,   the vapor deposition particles being vapor-deposited on a vapor deposition preventing member when released from the vapor deposition source in a second direction, which is different from the first direction, during the first period, or released from the vapor deposition source during a second period, which is different from the first period, the vapor deposition preventing member being removable from the vapor deposition device,   a film being provided on at least a part of a surface of the vapor deposition preventing member on which surface the vapor deposition particles are vapor-deposited, the film being provided so as to be peeled off from the vapor deposition preventing member, and   the film being made of (i) polylactic acid or polyglycol acid which is a material having greater microbial biodegradability than a material of which a vapor-deposited film that is formed on the film is made or (ii) polyethylene or polypropylene which is a material having a lower melting point or sublimation point than the material of which the vapor-deposited film that is formed on the film is made.   
     
     
         2 . The vapor deposition device as set forth in  claim 1 , wherein the vapor deposition preventing member includes a vapor deposition preventing plate for preventing the vapor deposition chamber from being contaminated with the vapor deposition particles. 
     
     
         3 . The vapor deposition device as set forth in  claim 1 , wherein the vapor deposition preventing member includes a shutter for preventing the vapor deposition particles released from the vapor deposition source from being vapor-deposited on the substrate during the second period. 
     
     
         4 . The vapor deposition device as set forth in  claim 2 , wherein the vapor deposition preventing member includes a shutter for preventing the vapor deposition particles released from the vapor deposition source from being vapor-deposited on the substrate during the second period. 
     
     
         5 . The vapor deposition device as set forth in  claim 1 , wherein the vapor deposition preventing member includes (i) a plurality of control plates which are provided between (a) an opening via which the vapor deposition particles are released from the vapor deposition source and (b) the substrate, and which are provided in a direction perpendicular to a normal direction of the substrate so that the opening is provided between the plurality of control plates, or (ii) the plurality of control plates which are integrated. 
     
     
         6 . The vapor deposition device as set forth in  claim 2 , wherein the vapor deposition preventing member includes (i) a plurality of control plates which are provided between (a) an opening via which the vapor deposition particles are released from the vapor deposition source and (b) the substrate, and which are provided in a direction perpendicular to a normal direction of the substrate so that the opening is provided between the plurality of control plates, or (ii) the plurality of control plates which are integrated. 
     
     
         7 . The vapor deposition device as set forth in  claim 3 , wherein the vapor deposition preventing member includes (i) a plurality of control plates which are provided between (a) an opening via which the vapor deposition particles are released from the vapor deposition source and (b) the substrate, and which are provided in a direction perpendicular to a normal direction of the substrate so that the opening is provided between the plurality of control plates, or (ii) the plurality of control plates which are integrated. 
     
     
         8 . A collection device comprising:
 a film which is provided in a vapor deposition device and on which a vapor-deposited film is formed; and   a separating section for separating the vapor-deposited film from the film on which the vapor-deposited film is formed,   the vapor deposition device including: a vapor deposition chamber in which:   vapor deposition particles are vapor-deposited on a substrate when released from a vapor deposition source in a first direction during a first period,   the vapor deposition particles are vapor-deposited on a vapor deposition preventing member when released from the vapor deposition source in a second direction, which is different from the first direction, during the first period, or released from the vapor deposition source during a second period, which is different from the first period, the vapor deposition preventing member being removable from the vapor deposition device, and   the film is provided on at least a part of a surface of the vapor deposition preventing member on which surface the vapor deposition particles are vapor-deposited, the film being provided so as to be peeled off from the vapor deposition preventing member,   the film being made of (i) a material differing in microbial biodegradability from a material of which the vapor-deposited film that is formed on the film is made or (ii) a material having greater photodegradability than a material of which the vapor-deposited film that is formed on the film is made,   the separating section being a microorganism-containing microbial degradation tank in a case where the film is made of the material differing in microbial biodegradability from the material of which the vapor-deposited film that is formed on the film is made, and   
       the separating section being a light irradiation process tank in a case where the film is made of the material having greater photodegradability than the material of which the vapor-deposited film that is formed on the film is made. 
     
     
         9 . The collection device as set forth in  claim 8 , wherein:
 the separating section is the microorganism-containing microbial degradation tank; and the microorganism-containing biodegradation tank includes a light irradiating section.   
     
     
         10 - 22 . (canceled)