Silicon-metal composite micromechanical component and method of manufacturing the same

Abstract

The invention relates to a method ( 1 ) of manufacturing a silicon-metal composite micromechanical component ( 51 ) combining DRIE and LIGA processes. The invention also relates to a micromechanical component ( 51 ) including a layer wherein one part ( 53 ) is made of silicon and another part ( 41 ) of metal so as to form a composite micromechanical component ( 51 ). The invention concerns the field of timepiece movements.

1 - 32 . (canceled) 
     
     
         33 . A silicon-metal composite micromechanical component including a part formed in a silicon layer, wherein said silicon part includes a toothing for forming a wheel or a pinion and, at least over one portion of the thickness thereof, a metal part with a thickness of more than 6 microns for insulating the silicon part from destructive stress. 
     
     
         34 . The micromechanical component according to  claim 33 , wherein the metal part forms a sleeve that covers the peripheral wall of said silicon part. 
     
     
         35 . The micromechanical component according to  claim 34 , wherein said sleeve is connected to said peripheral wall by bridges of material. 
     
     
         36 . The micromechanical component according to  claim 34 , wherein said metal part includes, in the extension thereof, a second metal part projecting from said silicon part. 
     
     
         37 . The micromechanical component according to  claim 33 , wherein the metal part forms a sleeve in a cavity made in the silicon part in order to receive a pivoting arbour that is driven therein. 
     
     
         38 . The micromechanical component according to  claim 37 , wherein said sleeve is connected to the wall of said cavity by bridges of material. 
     
     
         39 . The micromechanical component according to  claim 37 , wherein the metal part includes, in the extension thereof, a second metal part projecting from the silicon part. 
     
     
         40 . The micromechanical component according to  claim 39 , wherein the second metal part includes a toothing for forming a wheel or a pinion. 
     
     
         41 . The micromechanical component according to  claim 33 , wherein each metal part includes nickel. 
     
     
         42 . The micromechanical component according to  claim 33 , wherein it includes a second silicon part formed from a second layer. 
     
     
         43 . The micromechanical component according to  claim 42 , wherein the second silicon part includes at least over one portion of the thickness thereof, an additional metal part for insulating the second silicon part from destructive stress. 
     
     
         44 . The micromechanical component according to  claim 43 , wherein the additional metal part forms a sleeve in a cavity made in the second silicon part for receiving a pivoting arbour that is driven therein. 
     
     
         45 . The micromechanical component according to  claim 44 , wherein said sleeve is connected to the wall of said cavity by bridges of material. 
     
     
         46 . The micromechanical component according to  claim 43 , wherein the additional metal part includes, in the extension thereof, a second additional metal part projecting from the second silicon part. 
     
     
         47 . The micromechanical component according to  claim 46 , wherein the second additional metal part includes a toothing for forming a wheel or pinion. 
     
     
         48 . The micromechanical component according to  claim 43 , wherein each metal part includes nickel. 
     
     
         49 . The micromechanical component according to  claim 43 , wherein the second silicon part is mounted on the silicon part via an intermediate layer of silicon oxide. 
     
     
         50 . The micromechanical component according to  claim 43 , wherein the second silicon part includes a toothing for forming a wheel or pinion. 
     
     
         51 . A timepiece wherein it includes at least one micromechanical component according to  claim 33 .