Apparatus and method for moving a substrate

Abstract

A substrate holder and method for using it to move a substrate. The holder comprises a frame having an inner periphery defining a first opening for receiving the substrate, and a shoulder projecting laterally inward from the inner periphery of the frame for supporting the substrate in the first frame opening. The shoulder has an inner periphery defining a second opening smaller than the first opening for receiving a substrate support. The holder and a substrate therein is moved to a position above the substrate support and then lowered to a position in which the shoulder of the holder is positioned below a top surface of the substrate support and the substrate is deposited on the top surface of the substrate support.

What is claimed is: 
     
         1 . A method of moving a substrate, the method comprising:
 placing a substrate on a shoulder of a frame over a lower opening in a substrate holder;   lifting the substrate holder;   transporting the substrate holder to a position above a substrate-supporting surface sized to fit through the lower opening;   lowering the substrate holder until the substrate-supporting surface passes through the lower opening to support the substrate from below; and   further lowering the substrate holder until an upper rim of the frame is lower than the substrate-supporting surface;   wherein the shoulder projects laterally inward from an inner periphery of the frame below the upper rim;   wherein the inner periphery defines an upper opening above the lower opening;   wherein the upper opening is larger than both the lower opening and the substrate; and   wherein the substrate rests in the upper opening when placed on the shoulder of the frame.   
     
     
         2 . The method of  claim 1 , wherein the substrate-supporting surface comprises a vacuum groove and is connected to a vacuum device; and further comprising engaging the vacuum device to draw ambient gas through the vacuum groove to grip the substrate. 
     
     
         3 . The method of  claim 1 , further comprising adjusting a planarity of the substrate-supporting surface to a desired orientation. 
     
     
         4 . The method of  claim 3 , wherein the planarity is adjusted by threading an adjustment screw. 
     
     
         5 . The method of  claim 3 , wherein the desired orientation matches the pitch or a robot arm. 
     
     
         6 . The method of  claim 1 , wherein the lifting, transporting, lowering, and further lowering are performed by a programmable robot. 
     
     
         7 . The method of  claim 6 , further comprising:
 closing a plurality of robotic grippers to engage with the substrate holder before the lifting; and   opening the robotic grippers to disengage from the substrate holder after the further lowering.   
     
     
         8 . The method of  claim 7 , further comprising supporting the frame on a plurality of feet while the robotic grippers engage or disengage. 
     
     
         9 . The method of  claim 8 , further comprising receiving lower ends of the feet in registration sockets in a vacuum plate. 
     
     
         10 . The method of  claim 8 , further comprising receiving lower ends of the feet in registration sockets in a second substrate holder. 
     
     
         11 . The method of  claim 1 , further comprising dispensing a predetermined quantity of fluid onto the substrate from a programmable robotic fluid dispenser. 
     
     
         12 . The method of  claim 1 , further comprising stacking a plurality of substrate holders with a minimum spacing between frames; wherein the minimum spacing permits air flow over substrates held in the substrate holders. 
     
     
         13 . The method of  claim 1 , wherein a perforated adaptor plate is interposed between the substrate and the lower opening. 
     
     
         14 . The method of  claim 13 , further comprising activating a vacuum chuck to grip the substrate by drawing a vacuum through perforations in the perforated adaptor plate. 
     
     
         15 . The method of  claim 1 , further comprising moving a doctor blade with adjustable feet across the substrate; wherein a compressible helical spring exerts a force to maintain contact between the adjustable feet and the substrate. 
     
     
         16 . The method of  claim 15 , wherein the compressible helical spring becomes stiffer as it bends. 
     
     
         17 . The method of  claim 15 , wherein a horizontal component of the force is directed toward a rear portion of the doctor blade. 
     
     
         18 . The method of  claim 15 , further comprising adjusting the distance which the feet extend below the bottom surface of the doctor blade to define a gap; wherein a width of the gap corresponds to a desired film thickness. 
     
     
         19 . The method of  claim 1 , further comprising transporting the substrate holder to a printing apparatus; and printing identifying indicia on the substrate in the substrate holder. 
     
     
         20 . The method of  claim 1 , further comprising forming at least one film on the substrate; lifting the substrate holder to bring the shoulder on the frame into supporting engagement with the substrate; and moving the substrate and the substrate holder as a unit.