Evaporation apparatus

Abstract

An evaporation apparatus proposed includes a gas storage chamber, a first evaporator, a pressure gauge, a pyrolysis chamber and a deposition chamber. The first evaporator is connected with the gas storage chamber through a first pipe and the first pipe has a first valve. The pressure gauge is connected with the gas storage chamber through a second pipe. The pyrolysis chamber is connected with the gas storage chamber through a third pipe and the third pipe has a second valve, wherein the first evaporator is connected with the pyrolysis chamber through the gas storage chamber, and the gas storage chamber is disposed between the first evaporator and the pyrolysis chamber. The deposition chamber is connected with the pyrolysis chamber through a fourth pipe.

What is claimed is: 
     
         1 . An evaporation apparatus, comprising:
 a gas storage chamber;   a first evaporator, connected with the gas storage chamber through a first pipe, wherein the first pipe has a first valve;   a pressure gauge, connected with the gas storage chamber through a second pipe;   a pyrolysis chamber, connected with the gas storage chamber through a third pipe, wherein the third pipe has a second valve, wherein the first evaporator is connected with the pyrolysis chamber through the gas storage chamber, and the gas storage chamber is disposed between the first evaporator and the pyrolysis chamber; and   a deposition chamber, connected with the pyrolysis chamber through a fourth pipe.   
     
     
         2 . The evaporation apparatus as claimed in  claim 1 , further comprises a pressure adjusting valve connected with the gas storage chamber through a fifth pipe. 
     
     
         3 . The evaporation apparatus as claimed in  claim 1 , further comprises a second evaporator connected with the gas storage chamber through a sixth pipe, wherein the sixth pipe has a third valve.