Rotating Body of Vacuum Pump, Fixed Member Disposed Opposite Rotating Body, and Vacuum Pump Provided with Rotating Body and Fixed Member

Abstract

A rotating body of a vacuum pump is partially constituted by a fiber-reinforced plastic and configured to exhaust gas by rotation. A corrosion-resistant layer is provided on the fiber-reinforced plastic portion which is the base material of the rotating body. A high-emissivity layer having a higher emissivity than the corrosion-resistant layer is provided on the corrosion-resistant layer. Fixed members facing the rotating body of the vacuum pump are each provided with a high-emissivity layer having a higher emissivity than the base material of the fixed members on the surfaces facing the fiber-reinforced plastic portion of the rotating body.

1 . A rotating body of a vacuum pump that is entirely or partially constituted by a fiber-reinforced plastic and exhausts gas by rotation, wherein
 the rotating body is provided with a corrosion-resistant layer on a fiber-reinforced plastic portion, which is a base material thereof, and with a high-emissivity layer having a higher emissivity than the corrosion-resistant layer on the corrosion-resistant layer.   
     
     
         2 . The rotating body of a vacuum pump according to  claim 1 , wherein
 the high-emissivity layer is an oxide film layer obtained by oxidizing a surface of a metal coating film formed on the corrosion-resistant layer, or a DLC layer formed by performing DLC coating treatment on the corrosion-resistant layer.   
     
     
         3 . A fixed member of a vacuum pump that faces an inner circumferential surface or outer circumferential surface of a rotating body of the vacuum pump, which is entirely or partially constituted by a fiber-reinforced plastic, the fixed member forming, between the fixed member and the rotating body, a spiral thread groove exhaust flow channel for exhausting gas, wherein
 a high-emissivity layer having a higher emissivity than a base material of the fixed member is provided on a surface of the fixed member that faces a fiber-reinforced plastic portion of the rotating body.   
     
     
         4 . A fixed member disposed opposite the rotating body of a vacuum pump according to  claim 3 , wherein
 the high-emissivity layer is an oxide film layer obtained by oxidizing a surface of an aluminum alloy which is a base material of the fixed member, or a coating film layer formed by coating the surface of the fixed member with a material having a higher emissivity than the aluminum alloy of the base material.   
     
     
         5 . A vacuum pump comprising the rotating body according to  claim 1 . 
     
     
         6 . A vacuum pump comprising the fixed member according to  claim 3 .