Positioning device for scanning a surface

Abstract

A positioning device for scanning a surface includes a movable element; at least one spring-like element having a resilience element for providing a tunable resilience in at least one direction; wherein the spring-like element is configured to tune the resilience by applying a force onto the resilience element of the at least one spring-like element.

1 - 8 . (canceled) 
     
     
         9 . A method of setting a mechanical property of a positioning device having a movable element which is resiliently supported by at least one element, comprising applying a force to the at least one element. 
     
     
         10 . A method for operating a positioning device for scanning a surface, the positioning device having a movable element, and at least one spring-like element having a resilience element configured to provide a tunable resilience in at least one direction, wherein the spring-like element is configured to tune the resilience by applying a force onto the resilience element of the at least one spring-like element, the method comprising:
 driving the movable element is driven by an actuator, wherein the actuation is performed with an actuation frequency, wherein the resonant frequency of a system comprising the movable element and the at least one spring-like element in the at least one direction is tuned, by tuning the resilience of the resilience element, to adapt an oscillating behavior of the system.   
     
     
         11 . The method of  claim 10 , wherein the actuation is performed with an actuation frequency being different from a resonant frequency of the system comprising of the movable element and the at least one spring-like element in the at least one direction. 
     
     
         12 . The method of  claim 10 , wherein the actuation is performed such that the movable element is driven in a large-range at a frequency lower than resonance frequency of the system, or in a short-range at a frequency higher than the resonance frequency, by tuning the resilience of the tunable resilience element. 
     
     
         13 . The method of  claim 10 , wherein the resonant frequency of the system comprising of the movable element and the at least one spring-like element in the at least one direction is tuned to be equal to the actuation frequency, by tuning the resilience of the resilience element.