Durable Non-Wetting Coating on Fluid Ejector

Abstract

A method of forming a nozzle plate of a fluid ejection device includes etching a bore in the first side of the multi-layer substrate, depositing a liner in the bore, removing a layer from a second side of the multi-layer substrate, wherein the removing exposes a closed end of the liner, applying a non-wetting coating to the closed end of the liner and an area surrounding the closed end of the liner, and removing the closed end of the liner, wherein removing the closed end of the liner opens a nozzle.

1 - 15 . (canceled) 
     
     
         16 . A method of forming a nozzle plate of a fluid ejection device, comprising:
 patterning a layer of a multi-layer substrate, wherein the multi-layer includes a nozzle inlet on a first side and the patterning is performed in a region on the second side that corresponds to the nozzle inlet on the first side;   after patterning the layer of the multi-layer substrate, applying a non-wetting coating to the second side of the multi-layer substrate;   patterning the non-wetting coating to form an aperture in the non-wetting coating; and   opening an aperture in a layer of the multi-layer substrate through the aperture in the non-wetting coating, wherein the opening creates a nozzle outlet that is in fluid communication with the nozzle inlet.   
     
     
         17 . The method of  claim 16 , wherein patterning the layer of the multi-layer substrate patterns an adhesion promoting layer. 
     
     
         18 . The method of  claim 17 , wherein the adhesion promoting layer includes metal. 
     
     
         19 . The method of  claim 16 , wherein spin-coating a non-wetting coating includes applying a self-planarizing material. 
     
     
         20 . The method of  claim 19 , wherein the self-planarizing material is a fluoropolymer. 
     
     
         21 . The method of  claim 16 , further comprising planarizing the non-wetting coating. 
     
     
         22 . The method of  claim 16 , wherein opening the aperture includes opening an aperture in an oxide layer. 
     
     
         23 - 37 . (canceled)