Pump module and positive displacement pump

Abstract

A pump module ( 4, 5, 6; 4′, 4 ″) includes a housing ( 14 ) that limits at least one channel ( 17 ) connecting at least one inlet with at least one outlet, an elastic membrane ( 18; 21; 22 ) extending in the housing in a flow direction, and a plurality of actuators located in the housing opposite each other on both sides of the at least one flow channel and forming actuation stages (A 1 -A 6 ) arranged one after another in the flow direction, with a respective section of the elastic membrane being deflected and abutting a respective circumferential section of the at least one flow channel upon activation of an actuator of a respective actuation stage for forming a delivery chamber.

What is claimed is: 
     
         1 . A pump module ( 4 ,  5 ,  6 ;  4 ′,  4 ″), comprising a housing ( 14 ) having at least one inlet ( 7 ,  8 ,  9 ) and at least one outlet ( 10 ,  11 ,  12 ); at least one channel ( 17 ) located in the housing ( 14 ) and connecting the at least one inlet with the at least one outlet; an elastic membrane ( 18 ;  21 ;  22 ) extending in the housing in a flow direction; a plurality of actuators located in the housing, the actuators being sequentially individually activated for sectionally deflecting the elastic membrane for forming at least one delivery chamber ( 20 ,  21 ) between sections of the membrane and associated circumferential sections of the at least one flow channel for enclosing a to-be-delivered medium and movable, in course of a delivery movement between, the at least one inlet and the at least one outlet,
 wherein respective actuators which are located opposite each other on both sides of the at least one flow channel form actuation stages (A 1 -A 6 ) arranged one after another in the flow direction, with a respective section of the elastic membrane abutting a respective circumferential section of the at least one flow channel upon activation of an actuator of a respective actuation stage (A 1 -A 6 ). 
 
     
     
         2 . A pump module ( 4 ,  5 ,  6 ;  4 ′) according to  claim 1 , wherein the actuators are formed by solenoids (M 1 . 1 -M 6 . 2 ). 
     
     
         3 . A pump module ( 4 ,  5 ,  6 ;  4 ′) according to  claim 2 , wherein the membrane ( 18 ;  21 ) is formed of one of magnetorheological elastomeric material and elastomeric material with ferromagnetic material integrated in sections associated with the actuation stages (A 1 -A 6 ). 
     
     
         4 . A pump module ( 4 ″) according to  claim 1 , wherein the actuators are formed by electrodes (E 1 . 1 -E 6 . 2 ). 
     
     
         5 . A pump module ( 4 ″) according to  claim 4 , wherein the membrane ( 22 ) is formed of an electrorheological elastomeric material ( 23 ). 
     
     
         6 . A pump module ( 4 ,  5 ,  6 ;  4 ′;  4 ″) according to  claim 1 , wherein the housing ( 14 ) is formed of at least two housing parts ( 15 ,  16 ), the membrane ( 18 ;  21 ;  22 ) which lies therebetween, is formed as a disc having a circular cross-section, and at least one inlet ( 7 ,  8 ,  9 ) faces radially outwardly, and at least one outlet ( 10 ,  11 ,  12 ) is arranged centrally in the radial direction. 
     
     
         7 . A pump module according to  claim 1 , wherein the actuation stages (A 1 -A 6 ) are arranged, in the flow direction, equidistantly or at different distances relative to each other. 
     
     
         8 . A positive displacement pump for delivering fluid, comprising at least one pump module ( 4 ,  5 ,  6 ;  4 ′,  4 ″), including a housing ( 14 ) having at least one inlet ( 7 ,  8 ,  9 ) and at least one outlet ( 10 ,  11 ,  12 ); at least one channel ( 17 ) located in the housing ( 14 ) and connecting the at least one inlet with the at least one outlet; an elastic membrane ( 18 ;  21 ;  22 ) extending in the housing in a flow direction; a plurality of actuators located in the housing, the actuators being sequentially individually activated for sectionally deflecting the elastic membrane for forming at least one delivery chamber ( 20 ,  21 ) between sections of the membrane and associated circumferential sections of the at least one flow channel for enclosing a to-be-delivered medium and movable, in course of a delivery movement between the at least one inlet and the at least one outlet,
 wherein respective actuators which are located opposite each other on both sides of the at least one flow channel form actuation stages (A 1 -A 6 ) arranged one after another in the flow direction, with a respective section of the elastic membrane abutting a respective circumferential section of the at least one flow channel upon activation of an actuator of a respective actuation stage (A 1 -A 6 ). 
 
     
     
         9 . A positive displacement pump according to  claim 8 , comprising a housing ( 1 ), and a plurality of pump modules ( 4 ,  5 ,  6 ) arranged one of seriesly, parallel to each other, and seriesly and parallel to each other. 
     
     
         10 . A positive displacement pump according to  claim 8 , comprising power electronics ( 13 ) for controlling actuators of the at least one pump module ( 4 ,  5 ,  6 ;  4 ′;  4 ″). 
     
     
         11 . A method of producing one of low and high vacuum in a recipient, comprising a vacuum pump formed as a positive displacement pump for delivering fluid and comprising at least one pump module ( 4 ,  5 ,  6 ;  4 ′,  4 ″), including a housing ( 14 ) having a pump module ( 4 ,  5 ,  6 ;  4 ′,  4 ″) comprising a housing ( 14 ) having at least one inlet ( 7 ,  8 ,  9 ) and at least one outlet ( 10 ,  11 ,  12 ); at least one channel ( 17 ) located in the housing ( 14 ) and connecting the at least one inlet with the at least one outlet; an elastic membrane ( 18 ;  21 ;  22 ) extending in the housing in a flow direction; a plurality of actuators located in the housing, the actuators being sequentially individually activated for sectionally deflecting the elastic membrane for forming at least one delivery chamber ( 20 ,  21 ) between sections of the membrane and associated circumferential sections of the at least one flow channel for enclosing a to-be-delivered medium and movable, in course of a delivery movement between the at least one inlet and the at least one outlet,
 wherein respective actuators located opposite each other on both sides of the at least one flow channel form actuation stages (A 1 -A 6 ) arranged one after another in the flow direction, with a respective section of the elastic membrane abutting a respective circumferential section of the at least one flow channel upon activation of an actuator of a respective actuation stage (A 1 -A 6 ). 
 
     
     
         12 . A positive displacement according to  claim 8  and formed as one of vacuum pump and a fore-vacuum pump of one of high, ultra high, high and ultra high vacuum pump and a turbomolecular pump.