Gas Recovering System

Abstract

The invention related gas recovering system contains at least one gas supply system, a gas treatment system, and a gas separation system. The gas supply system includes a gas supply unit and a supply source. The gas treatment system includes a gas reactor and a gas reduction device. Also, the gas separation system includes a first exhaust unit, a purifying unit, a second exhaust unit and a heating evaporation unit. The gas recovering system can avoid the unnecessary waste of gas to form hazardous waste. Therefore, gas can make more effective use to reduce cost.

What is claimed is: 
     
         1 . A gas recovering system, comprising:
 at least one gas supply system including:
 a supply source configured to provide at least one gas; 
 a gas supply unit connected to the supply source; 
 at least one gas treatment system connected to the gas supply system and including: 
 a gas reactor connected to the gas supply unit; and 
 a gas reduction device connected to the gas reactor; 
   a gas separation system connected to the gas treatment system and including:
 a first exhaust unit connected to the gas reduction device; 
 a purifying unit connected to the first exhaust unit; 
 a second exhaust unit connected to the purifying unit; and 
 a heating evaporation unit connected to the purifying unit and the gas supply system. 
   
     
     
         2 . The gas recovering system of  claim 1 , wherein the gas supply system further includes at least one mass flow controller. 
     
     
         3 . The gas recovering system of  claim 1 , wherein the gas supply system further includes an eliminating device connected to the first exhaust unit and the second exhaust unit. 
     
     
         4 . The gas recovering system of  claim 1 , wherein the gas treatment system further includes a first storage vessel and the first storage vessel is connected to the gas reactor and the gas reduction device. 
     
     
         5 . The gas recovering system of  claim 1 , wherein the gas separation device further includes a second accumulator tank, and the second accumulator tank is connected to the purifying unit and the heating evaporation unit. 
     
     
         6 . The gas recovering system of  claim 1 , wherein an inner space of the first accumulator tank is configured to store a gas. 
     
     
         7 . The gas recovering system of  claim 1 , wherein an inner space of the second accumulator tank is configured to store a liquid. 
     
     
         8 . A gas recovering device including a gas reduction unit and a gas guiding tube, and a first gas is flowed within the gas guiding tube and the gas reduction unit is connected to the gas guiding tube, wherein the gas reduction unit is characterized by: the gas reduction unit including:
 a conduit connected to the gas guiding tube;   a reduction gas source connected to the conduit and is configured to provide a second gas flowed to the gas guiding tube; and   a microwave irradiating device configured to irradiate a microwave and the microwave is irradiated to the second gas of the conduit.   
     
     
         9 . The gas recovering device of  claim 8 , wherein microwave irradiating device further includes an irradiating tube and a conduit of the gas reduction unit is vertically passing through the irradiating tube. 
     
     
         10 . The gas recovering device of  claim 9 , wherein an external side wall of the irradiating tube further includes a first magnetic coil. 
     
     
         11 . The gas recovering device of  claim 8 , wherein the conduit is a metal material. 
     
     
         12 . The gas recovering device of  claim 8 , wherein the conduit further includes a dielectric layer material disposed therein. 
     
     
         13 . The gas recovering device of  claim 1 , wherein a chamber is further disposed between the conduit and the gas guiding tube. 
     
     
         14 . The gas recovering device of  claim 13 , wherein external wall of the chamber further includes a second magnetic coil. 
     
     
         15 . A gas recovering system, comprising:
 at least one gas supply system including:
 a supply source configured to provide at least one gas; and 
 a gas supply unit connected to the supply source; 
   at least one gas treatment system connected to the gas supply system and including: and
 a gas reactor connected to the gas supply unit; and 
 a gas reduction device connected to the gas reactor, and the gas reduction device including a gas reduction unit and a gas guiding tube, and the gas reduction unit is connected to the gas guiding tube; 
   a gas separation system connected to the gas treatment system and including:
 a first exhaust unit connected to the gas reduction device; 
 a purifying unit connected to the first exhaust unit; 
 a second exhaust unit connected to the purifying unit; and 
 a heating evaporation unit connected to the purifying unit and the gas supply system. 
   
     
     
         16 . The gas recovering system of  claim 15 , wherein the gas reduction unit including:
 a conduit connected to the gas guiding tube;   a reduction gas source connected to the conduit and is configured to provide a second gas flowed to the gas guiding tube; and   a microwave irradiating device configured to irradiate a microwave and the microwave is irradiated to the second gas of the conduit.   
     
     
         17 . The gas recovering system of  claim 15 , wherein the gas supply system further includes at least one mass flow controller. 
     
     
         18 . The gas recovering system of  claim 15 , wherein the gas supply system further includes an eliminating device connected to the first exhaust unit and the second exhaust unit. 
     
     
         19 . The gas recovering system of  claim 15 , wherein the gas treatment system further includes a first storage vessel and the first storage vessel is connected to the gas reactor and the gas reduction device.