Package carrier and manufacturing method thereof

Abstract

A manufacturing method of a package carrier is provided. An insulation substrate having an upper surface, a lower surface, plural cavities located at the lower surface and plural through holes passing through the insulation substrate and respectively communicating with the cavities is provided. Plural vias is defined by the cavities and the through holes. A conductive material filling up the vias is formed to define plural conductive posts. An insulation layer having a top surface and plural blind vias extending from the top surface to the conductive posts is formed on the upper surface. A patterned circuit layer filling up the blind vias, being connected to the conductive posts and exposing a portion of the top surface is formed on the top surface. A solder mask layer is formed on the patterned circuit layer and has plural openings exposing a portion of the patterned circuit layer to define plural pads.

What is claimed is: 
     
         1 . A manufacturing method of a package carrier, comprising:
 providing an insulation substrate, the insulation substrate having an upper surface, a lower surface opposite to the upper surface, a plurality of cavities and a plurality of through holes, wherein the cavities are located at the lower surface, and the through holes pass through the insulation substrate and respectively communicate with the cavities to define a plurality of vias;   forming a conductive material in the vias, wherein the conductive material fills up the vias to define a plurality of conductive posts;   forming an insulation layer on the upper surface of the insulation substrate, wherein the insulation layer has a top surface relatively far from the upper surface of the insulation substrate and a plurality of blind vias extending from the top surface to the conductive posts;   forming a patterned circuit layer on the top surface of the insulation layer, wherein the patterned circuit layer fills up the blind vias and is connected to the conductive posts, and the patterned circuit layer exposes a portion of the top surface of the insulation layer; and   forming a solder mask layer on the patterned circuit layer, the solder mask layer covering the patterned circuit layer and the exposed portion of the top surface of the insulation layer, the solder mask layer having a plurality of openings, wherein the openings expose a portion of the patterned circuit layer to define a plurality of pads.   
     
     
         2 . The manufacturing method of the package carrier as recited in  claim 1 , wherein a material of the insulation substrate includes ABF resin, polymeric materials, silicon fillers or epoxy resin. 
     
     
         3 . The manufacturing method of the package carrier as recited in  claim 1 , wherein a method of forming the cavities of the insulation substrate includes laser drilling or injection molding. 
     
     
         4 . The manufacturing method of the package carrier as recited in  claim 1 , wherein a method of forming the through holes of the insulation substrate includes laser drilling. 
     
     
         5 . The manufacturing method of the package carrier as recited in  claim 1 , wherein steps of forming the conductive material in the vias comprise:
 performing an electroless plating process to form the conductive material on the upper surface, the lower surface and in the vias of the insulation substrate, wherein the conductive material covers the upper surface and the lower surface of the insulation substrate and fills up the vias; and   removing a portion of the conductive material on the upper surface and the lower surface of the insulation substrate to expose the upper surface and the lower surface of the insulation substrate to define the conductive posts.   
     
     
         6 . The manufacturing method of the package carrier as recited in  claim 1 , wherein each of the conductive posts has a first surface and a second surface opposite to each other, the first surface of each of the conductive posts and the upper surface of the insulation substrate are coplanar, and the second surface of each of the conductive posts and the lower surface of the insulation substrate are coplanar. 
     
     
         7 . The manufacturing method of the package carrier as recited in  claim 1 , wherein a method of forming the insulation layer includes thermal compression bonding. 
     
     
         8 . The manufacturing method of the package carrier as recited in  claim 1 , wherein a material of the insulation layer includes ABF resin, polymeric materials, silicon fillers or epoxy resin. 
     
     
         9 . The manufacturing method of the package carrier as recited in  claim 1 , wherein a method of forming the blind vias of the insulation layer includes laser drilling. 
     
     
         10 . The manufacturing method of the package carrier as recited in  claim 1 , wherein a method of forming the patterned circuit layer includes electroless plating or a semi-additive process. 
     
     
         11 . The manufacturing method of the package carrier as recited in  claim 1 , further comprising:
 forming a surface treatment layer on the pads after the solder mask layer is formed.   
     
     
         12 . The manufacturing method of the package carrier as recited in  claim 11 , wherein the surface treatment layer comprises an electroplated gold layer, an electroplated silver layer, a reduced gold layer, a reduced silver layer, an electroplated nickel-palladium-gold layer, a nickel-palladium-gold layer or an organic solderability preservatives (OSP) layer. 
     
     
         13 . A package carrier adapted for carrying a heating element, the package carrier comprising:
 an insulation substrate which has an upper surface, a lower surface opposite to the upper surface, a plurality of cavities and a plurality of through holes, wherein the cavities are located at the lower surface, and the through holes pass through the insulation substrate and respectively communicate with the cavities to define a plurality of vias;   a plurality of conductive posts respectively disposed in the vias, each of the conductive posts having a first surface and a second surface opposite to each other, wherein the first surface of each of the conductive posts and the upper surface of the insulation substrate are coplanar, and the second surface of each of the conductive posts and the lower surface of the insulation substrate are coplanar;   an insulation layer disposed on the upper surface of the insulation substrate, wherein the insulation layer has a top surface relatively far from the upper surface of the insulation substrate and a plurality of blind vias extending from the top surface to the conductive posts;   a patterned circuit layer disposed on the top surface of the insulation layer and exposing a portion of the top surface of the insulation layer, the patterned circuit layer filling up the blind vias and being connected to the conductive posts; and   a solder mask layer disposed on the patterned circuit layer, the solder mask layer covering the patterned circuit layer and the exposed portion of the top surface of the insulation layer, the solder mask layer having a plurality of openings, wherein the openings expose a portion of the patterned circuit layer to define a plurality of pads, and the heating element is disposed on the pads.   
     
     
         14 . The package carrier as recited in  claim 13 , further comprising a surface treatment layer disposed on the pads. 
     
     
         15 . The package carrier as recited in  claim 14 , wherein the surface treatment layer comprises an electroplated gold layer, an electroplated silver layer, a reduced gold layer, a reduced silver layer, an electroplated nickel-palladium-gold layer, a nickel-palladium-gold layer or an organic solderability preservatives layer.