Electrodynamic actuator and electrodynamic excitation device

Abstract

A linear actuator, comprising: a base; a fixed part support mechanism attached to the base; a fixed part elastically supported by the fixed part support mechanism; and a movable part driven to reciprocate in a predetermined drive direction with respect to the fixed part, wherein the fixed part support mechanism comprises: a movable block attached to the fixed part; a linear guide that couples the movable block with the base to be slidable in the predetermined drive direction; and an elastic member that is disposed between the base and the movable block and prevents transmission of a high frequency component of vibration in the predetermined drive direction.

What is claimed is: 
     
         1 . A linear actuator, comprising:
 a base;   a fixed part support mechanism attached to the base;   a fixed part elastically supported by the fixed part support mechanism; and   a movable part driven to reciprocate in a predetermined drive direction with respect to the fixed part,   wherein the fixed part support mechanism comprises:   a movable block attached to the fixed part;   a linear guide that couples the movable block with the base to be slidable in the predetermined drive direction; and   an elastic member that is disposed between the base and the movable block and prevents transmission of a high frequency component of vibration in the predetermined drive direction.   
     
     
         2 . The linear actuator according to  claim 1 , wherein the elastic member comprises an air spring. 
     
     
         3 . The linear actuator according to  claim 1 , further comprising a fixing block fixed to the base,
 wherein at least one of the linear guide and the elastic member is attached to the base via the fixing block.   
     
     
         4 . The linear actuator according to  claim 1 ,
 wherein:   the movable block is provided as a pair of movable blocks; and   the pair of movable blocks is attached to both side surfaces of the fixed part to sandwich an axis of the fixed part therebetween.   
     
     
         5 . The linear actuator according to  claim 1 ,
 wherein at least a part of the movable part is accommodated in a cylindrical hollow part of the fixed part, thereby forming the linear actuator as an electrodynamic actuator,   the linear actuator further comprising:   a plurality of movable part support mechanisms that support the movable part from a lateral side to enable the movable part to reciprocate in an axial direction of the fixed part,   wherein each of the plurality of movable part support mechanisms comprises:   a rail attached to a side surface of the movable part to extend in the predetermined drive direction; and   a runner block attached to the fixed part to engage with the rail,   wherein the plurality of movable part support mechanisms are arranged to have approximately constant intervals therebetween around an axis of the fixed part.   
     
     
         6 . The linear actuator according to  claim 5 ,
 wherein:   the plurality of movable part support mechanisms are two pairs of movable part support mechanisms; and   the movable part is disposed to be sandwiched between the two pairs of movable part support mechanisms in two directions which are perpendicular to each other.   
     
     
         7 . The linear actuator according to  claim 5 ,
 wherein:   the linear actuator is horizontally disposed in a state where the axis of the fixed part is oriented in a horizontal direction; and   one of the plurality of movable part support mechanisms is disposed under the axis of the fixed part.   
     
     
         8 . The linear actuator according to  claim 5 ,
 wherein:   the movable part comprises a rod extending along the axis of the fixed part to protrude from one end of the movable part; and   the fixed part comprises a bearing which supports the rod to be movable in the axial direction of the fixed part.   
     
     
         9 . An excitation device, comprising:
 at least one linear actuator according to  claim 1 ; and   a vibration table coupled to the movable part of the at least one linear actuator.   
     
     
         10 . The excitation device according to  claim 9 ,
 wherein;   the at least one linear actuator comprises two linear actuators;   one of the two linear actuators is a first actuator having a driving axis in a first direction; and   the other of the two linear actuators is a second actuator having a driving axis in a second direction perpendicular to the first direction,   wherein the excitation device further comprises:   a first slider that couples the vibration table with the first actuator to be slidable in the second direction; and   a second slider that couples the vibration table with the second actuator to be slidable in the first direction.   
     
     
         11 . The excitation device according to  claim 10 , further comprising:
 a third actuator having a driving axis in a third direction which is perpendicular to the first direction and the second direction; and   a third slider that couples the vibration table with the third actuator to be slidable in the first direction and the second direction,   wherein:   the first slider couples the vibration table with the first actuator to be slidable in the second direction and the third direction; and   the second slider couples the vibration table with the second actuator to be slidable in the first direction and the third direction.