Gas injection device and solar cell manufacturing method using the same

Abstract

A solar cell manufacturing method includes forming a first electrode on a substrate, forming a mixed metal layer on the first electrode, forming a light absorbing layer by injecting hydrogen selenide on the entire surface of the mixed metal layer using a gas injection device, and forming a second electrode on the light absorbing layer. Further, the gas injection device includes a gas pipeline, an inner gas pipe positioned in the gas pipeline and having an opening, and a plurality of injection nozzles disposed below the gas pipeline.

What is claimed is: 
     
         1 . A gas injection device, comprising:
 a gas pipeline,   an inner gas pipe within the gas pipeline, and including an opening extended through a wall of the inner gas pipe and disposed between opposing longitudinal ends of the inner gas pipe, and   a plurality of injection nozzles disposed below the gas pipeline.   
     
     
         2 . The device of  claim 1 , wherein:
 a cross-section of the inner gas pipe includes a first portion of the wall separated from a second portion of the wall, and   the opening of the inner gas pipe is formed in the first portion of the wall opposite to the injection nozzles with respect to the second portion of the wall.   
     
     
         3 . The device of  claim 2 , wherein:
 the opening has a planar quadrangle shape,   a length of the opening in a longitudinal direction of the inner gas pipe is about 20% to about 30% of an interval between a first injection nozzle adjacent to an inlet of the gas injection device, and a last injection nozzle furthest away from the inlet, and   a width of the opening taken perpendicular to the longitudinal direction of the inner gas pipe is about 40% to about 45% of a diameter of the inner gas pipe.   
     
     
         4 . The device of  claim 3 , wherein:
 the opening is positioned apart from the first injection nozzle and in a direction towards the last injection nozzle by about 40% to about 45% of the interval between the first injection nozzle and the last injection nozzle.   
     
     
         5 . The device of  claim 4 , wherein:
 the diameter of the inner gas pipe is half of a diameter of the gas pipeline.   
     
     
         6 . The device of  claim 5 , wherein:
 both of the longitudinal ends of the inner gas pipe are opened.   
     
     
         7 . The device of  claim 6 , wherein:
 the longitudinal direction of the inner gas pipe is parallel to an arrangement direction of the injection nozzles.   
     
     
         8 . The device of  claim 7 , wherein:
 the plurality of injection nozzles have a same diameter and are disposed at regular intervals.